Method for manufacture of a physical quantity detector

Abstract

In the manufacture of a physical quantity detector, such as a pressure sensor and a load sensor, comprising a cylindrical part of which one end is closed with a strain generating part and a sensor part formed on the strain generating part, the cylindrical part mentioned above is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold, and cooling the molten alloy in the metal mold to confer amorphousness on the alloy. The metal mold is composed of a split mold having at least two split parts for forming a cavity and an insert pin to be inserted into the cavity so as to define the inner configuration of the cylindrical part, or further an insert core to be inserted into the mold so as to form the surface of the cavity corresponding to the surface of the strain generating part. In another embodiment, the cavity is formed so that the parting face of the mold corresponds to the surface of the strain generating part.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

Other objects, features, and advantages of the invention will become apparent from the following description taken together with the drawings, in which:

FIG. 1 is a sectional view schematically illustrating an example of a pressure sensor which is a physical quantity detector;

FIG. 2 is a fragmentary sectional view schematically illustrating one embodiment of an apparatus to be used in the production of a sensor member according to the present invention;

FIG. 3 is a perspective view illustrating a cast product produced by the use of the apparatus shown in FIG. 2; and

FIG. 4 is a fragmentary sectional view schematically illustrating another embodiment of an apparatus to be used in the production of a sensor member according to the present invention.

Claims

1. A method for the manufacture of a physical quantity detector comprising a cylindrical part of which one end is closed with a strain generating part and a sensor part formed on the strain generating part, characterized in that said cylindrical part is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold, and cooling the molten alloy in the metal mold to confer amorphousness on the alloy.

2. The apparatus set forth in claim 1, wherein said metal mold is composed of a split mold having at least two split parts for forming a cavity, an insert core to be inserted into the mold so as to form a surface of the cavity corresponding to a surface of the strain generating part, and an insert pin to be inserted into the cavity so as to define the inner configuration of said cylindrical part.

3. The apparatus set forth in claim 1, wherein said metal mold is composed of a split mold having at least two split parts for forming a cavity and an insert pin to be inserted into the cavity so as to define the inner configuration of said cylindrical part, wherein the cavity is formed so that a parting face of the mold corresponds to a surface of the strain generating part.

4. The apparatus set forth in claim 2, wherein the surface of said cavity corresponding to the surface of the strain generating part is formed in a flat surface.

5. The apparatus set forth in claim 3, wherein a surface of said cavity corresponding to the surface of the strain generating part is formed in a flat surface.