METHOD FOR MANUFACTURING A DISPLAY DEVICE

Abstract

In a liquid crystal display device with a reflective area and a transmissive area, a reflective electrode and a transmissive electrode are manufactured without an extra process.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view showing the schematic configuration of the liquid crystal display device that is an embodiment of the invention;

FIG. 2 is a schematic plan view showing the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 3 a schematic cross-sectional view showing the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 4 is a schematic cross-sectional view showing the pixel section and the drain signal line of the liquid crystal display device that is the embodiment of the invention;

FIG. 5A is a schematic cross-sectional view showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5B is a schematic cross-sectional view subsequent to FIG. 5A, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5C is a schematic cross-sectional view subsequent to FIG. 5B, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5D is a schematic cross-sectional view subsequent to FIG. 5C, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5E is a schematic cross-sectional view subsequent to FIG. 5D, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5F is a schematic cross-sectional view subsequent to FIG. 5E, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5G is a schematic cross-sectional view subsequent to FIG. 5F, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5H is a schematic cross-sectional view subsequent to FIG. 5G, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5I is a schematic cross-sectional view subsequent to FIG. 5H, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 5J is a schematic cross-sectional view subsequent to FIG. 5I, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 6A is a schematic cross-sectional view showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 6B is a schematic cross-sectional view subsequent to FIG. 6A, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 6C is a schematic cross-sectional view subsequent to FIG. 6B, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 6D is a schematic cross-sectional view subsequent to FIG. 6C, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 6E is a schematic cross-sectional view subsequent to FIG. 6D, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 6F is a schematic cross-sectional view subsequent to FIG. 6E, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 7A is a schematic cross-sectional view showing a manufacturing process of the pixel section and the drain signal line of the liquid crystal display device that is the embodiment of the invention;

FIG. 7B is a schematic cross-sectional view subsequent to FIG. 7A, showing a manufacturing process of the pixel section and the drain signal line of the liquid crystal display device that is the embodiment of the invention;

FIG. 7C is a schematic cross-sectional view subsequent to FIG. 7B, showing a manufacturing process of the pixel section and the drain signal line of the liquid crystal display device that is the embodiment of the invention;

FIG. 7D is a schematic cross-sectional view subsequent to FIG. 7C, showing a manufacturing process of the pixel section and the drain signal line of the liquid crystal display device that is the embodiment of the invention;

FIG. 7E is a schematic cross-sectional view subsequent to FIG. 7D, showing a manufacturing process of the pixel section and the drain signal line of the liquid crystal display device that is the embodiment of the invention;

FIG. 8A is a schematic cross-sectional view showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 8B is a schematic cross-sectional view subsequent to FIG. 8A, showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 8C is a schematic cross-sectional view subsequent to FIG. 8B, showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 8D is a schematic cross-sectional view subsequent to FIG. 8C, showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 8E is a schematic cross-sectional view subsequent to FIG. 8D, showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 8F is a schematic cross-sectional view subsequent to FIG. 8E, showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 8G is a schematic cross-sectional view subsequent to FIG. 8F, showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 8H is a schematic cross-sectional view subsequent to FIG. 8G, showing a manufacturing process of the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 9A is a schematic cross-sectional view showing a manufacturing process of the connection terminal of the liquid crystal display device that is the embodiment of the invention;

FIG. 9B is a schematic cross-sectional view subsequent to FIG. 9A, showing a manufacturing process of the connection terminal of the liquid crystal display device that is the embodiment of the invention;

FIG. 9C is a schematic cross-sectional view subsequent to FIG. 9B, showing a manufacturing process of the connection terminal of the liquid crystal display device that is the embodiment of the invention;

FIG. 9D is a schematic cross-sectional view subsequent to FIG. 9C, showing a manufacturing process of the connection terminal of the liquid crystal display device that is the embodiment of the invention;

FIG. 9E is a schematic cross-sectional view subsequent to FIG. 9D, showing a manufacturing process of the connection terminal of the liquid crystal display device that is the embodiment of the invention;

FIG. 9F is a schematic cross-sectional view subsequent to FIG. 9E, showing a manufacturing process of the connection terminal of the liquid crystal display device that is the embodiment of the invention;

FIG. 10A is a schematic cross-sectional view showing the schematic configuration of the pixel section and the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 10B is a schematic cross-sectional view subsequent to FIG. 10A, showing the schematic configuration of the pixel section and the connection terminals of the liquid crystal display device that is the embodiment of the invention;

FIG. 11A is a schematic cross-sectional view showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11B is a schematic cross-sectional view subsequent to FIG. 11A, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11C is a schematic cross-sectional view subsequent to FIG. 11B, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11D is a schematic cross-sectional view subsequent to FIG. 11C, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11E is a schematic cross-sectional view subsequent to FIG. 11D, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11F is a schematic cross-sectional view subsequent to FIG. 11E, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11G is a schematic cross-sectional view subsequent to FIG. 11F, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11H is a schematic cross-sectional view subsequent to FIG. 11G, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 11I is a schematic cross-sectional view subsequent to FIG. 11H, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 12 is a schematic plan view showing the configuration of the pixel section of the liquid crystal display device that is an embodiment of the invention;

FIG. 13A is a schematic cross-sectional view showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 13B is a schematic cross-sectional view subsequent to FIG. 13A, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 13C is a schematic cross-sectional view subsequent to FIG. 13B, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention;

FIG. 13D is a schematic cross-sectional view subsequent to FIG. 13C, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention; and

FIG. 13E is a schematic cross-sectional view subsequent to FIG. 13D, showing a manufacturing process of the pixel section of the liquid crystal display device that is the embodiment of the invention.

Claims

1. A method for manufacturing a display device having pixels arranged in a matrix, the method including the steps of: forming source electrodes on a substrate;laminating a first insulating film and a second insulating film on the source electrodes;forming a contact hole in the first and second insulating films;laminating a first conductive film and a second conductive film on the first and second insulating films and connecting the source electrode to the first conductive film via the contact hole;using a first pattern of a resist film to etch the first and second conductive films;removing part of the resist film to form a second pattern; andusing the second pattern to etch the second conductive film.

2. A method for manufacturing a display device according to claim 1, wherein the second pattern is used to form a transmissive area.

3. A method for manufacturing a display device according to claim 1, wherein the display device has a reflective area and a transmissive area and the second pattern is used to form the transmissive area.

4. A method for manufacturing a display device having pixels arranged in a matrix on a substrate, the method including the steps of: forming a source electrode in each of the pixels;laminating a first insulating film and a second insulating film on the source electrode;forming a contact hole in the second insulating film;using the contact hole formed in the second insulating film to remove the first insulating film on the source electrode;laminating a first conductive film and a second conductive film on the first and second insulating films and connecting the source electrode to the first conductive film via the contact hole;using a first pattern of a resist film to etch the first and second conductive films;removing part of the resist film to form a second pattern; andusing the second pattern to etch the second conductive film.

5. A method for manufacturing a display device according to claim 4, wherein the second pattern is used to form a transmissive area.

6. A method for manufacturing the display device according to claim 4, wherein the display device has a reflective area and a transmissive area and the second pattern is used to form the transmissive area.

7. A method for manufacturing a display device having pixels arranged in a matrix on a substrate, the method including the steps of: forming a source electrode in each of the pixels;forming a first insulating film on the source electrode;laminating a second insulating film made of resin on the first insulating film;exposing the second insulating film to light followed by development to form a pattern having a first contact hole in the second insulating film;using the pattern having the first contact hole to form a second contact hole in the second insulating film;laminating a first conductive film and a second conductive film on the first and second insulating films and connecting the source electrode to the first conductive film via the first and second contact holes;applying a resist film on the first and second conductive films;exposing the resist film to light followed by development to form a first pattern;using the first pattern of the resist film to etch the first and second conductive films;using ashing to remove part of the resist film to form a second pattern; andusing the second pattern to etch the second conductive film.

8. A method for manufacturing a display device according to claim 7, wherein the second pattern is used to form a transmissive area.

9. A method for manufacturing a display device according to claim 7, wherein the display device has a reflective area and a transmissive area and the second pattern is used to form the transmissive area.