METHOD FOR MANUFACTURING INKJET HEAD

Abstract

A method for manufacturing an inkjet head having a pressure chamber that stores ink, a nozzle that is provided at the pressure chamber and ejects the ink, and an actuator that changes an internal pressure of the pressure chamber to eject the ink in the pressure chamber through the nozzle is provided. The method includes the steps of: laminating a first separation film and a second separation film on a substrate; forming the actuator on the second separation film by using one of a liquid phase method and a vapor phase method to manufacture an upper structure; exposing an interface between the first separation film and the second separation film; contacting a separation liquid with the interface between the first separation film and the second separation film to separate the first separation film from the second separation film at the interface, thereby separating the upper structure from the substrate; forming a lower structure having the pressure chamber, independently of the substrate; and joining the upper structure and the lower structure together.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view in part of an inkjet head in accordance with in accordance with an embodiment of the invention.

FIG. 2 is a perspective view showing a bottom side of the inkjet head shown in FIG. 1.

FIGS. 3A-3D are views showing steps of manufacturing the inkjet head shown in FIG. 1.

FIGS. 4A-4D are views showing steps of manufacturing the inkjet head shown in FIG. 1.

FIG. 5 is a plan view of a silicon substrate, for describing a manufacturing process.

FIGS. 6A-6C are views showing steps of manufacturing the inkjet head shown in FIG. 1.

FIGS. 7A-7B are views showing steps of manufacturing the inkjet head shown in FIG. 1.

FIGS. 8A-8B are views showing steps of manufacturing the inkjet head shown in FIG. 1.

Claims

1. A method for manufacturing an inkjet head having a pressure chamber that stores ink, a nozzle that is provided at the pressure chamber and ejects the ink, and an actuator that changes an internal pressure of the pressure chamber to eject the ink in the pressure chamber through the nozzle, the method comprising the steps of: laminating a first separation film and a second separation film on a substrate;forming the actuator on the second separation film by using one of a liquid phase method and a vapor phase method to manufacture an upper structure;exposing an interface between the first separation film and the second separation film;contacting a separation liquid with the interface between the first separation film and the second separation film to separate the first separation film from the second separation film at the interface, thereby separating the upper structure from the substrate;forming a lower structure having the pressure chamber, independently of the substrate; andjoining the upper structure and the lower structure together.

2. A method for manufacturing an inkjet head according to claim 1, wherein the substrate is a silicon substrate.

3. A method for manufacturing an inkjet head according to claim 1, wherein the first separation film is composed of silicon oxide, the second separation film is composed of zirconium oxide, and a separation liquid is water.

4. A method for manufacturing an inkjet head according to claim 1, wherein, in the step of exposing the interface between the first separation film and the second separation film, grooves that define the upper structure in a predetermined chip unit is formed such that the grooves extend from the side of the upper structure to reach at least the interface between the second separation film and the first separation film.

5. A method for manufacturing an inkjet head according to claim 1, wherein the actuator is formed from a piezoelectric element.

6. A method for manufacturing an inkjet head according to claim 1, wherein the lower structure is formed by an electroforming method.

7. A method for manufacturing an inkjet head according to claim 1, wherein the lower structure is formed from one of Ni and Ni alloy.