Number | Date | Country | Kind |
---|---|---|---|
62-187703 | Jul 1987 | JPX | |
63-78189 | Apr 1988 | JPX | |
63-78188 | Apr 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4783430 | Su | Nov 1988 |
Entry |
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Interrante et al, "Studies of Organometallic Precursors to Aluminum Nitride", Mat. Res. Soc. Symp. Proc., vol. 73, 1986, Materials Research Society, pp. 359-366. |