Claims
- 1. A method for sintering a thin gel plate, comprising:placing a layer of refractory powder on a support surface; placing a thin gel plate on the layer of refractory powder; elevating the temperature of the thin gel plate to a sintering temperature, to sinter the plate, wherein the refractory powder partially fuses, to anchor the gel to the support surface and prevent non-uniform stresses in the plate from warping the sintered plate; and separating the sintered plate from the support surface.
- 2. A method as defined in claim 1, wherein the thin gel plate is a silica gel plate.
- 3. A method as defined in claim 2, wherein the thin silica gel plate is derived from a sol-gel process.
- 4. A method as defined in claim 1, wherein the refractory powder has a sintering temperature within a range of 1100 to 1500 degrees Celsius.
- 5. A method as defined in claim 1, wherein the refractory powder sinters above the sintering temperature of the gel plate.
- 6. A method as defined in claim 1, wherein the refractory powder is a silica-based powder.
- 7. A method as defined in claim 6, wherein the silica-based powder has a particle size between 10 nm and 500 μm.
- 8. A method as defined in claim 6, wherein the silica-based powder is derived by fuming, precipitating, or sol-gel processes.
- 9. A method as defined in claim 6, wherein the layer of silica-based powder has a uniform thickness of less than about 1.5 cm.
- 10. A method as defined in claim 9, wherein the layer of silica-based powder has a uniform thickness of less than about 3 mm.
- 11. A method for sintering a thin gel plate, comprising:placing a layer of ceramic powder on a support surface; placing a thin gel plate on the layer of ceramic powder; elevating the temperature of the thin gel plate to a sintering temperature, to sinter the plate, wherein the ceramic powder partially fuses, to anchor the gel to the support surface and prevent non-uniform stresses in the sintered plate from warping the plate; and separating the sintered plate from the support surface.
- 12. A method as defined in claim 11, wherein the thin plate is a silica gel plate.
- 13. A method as defined in claim 12, wherein the thin silica gel plate is derived from a sol-gel process.
- 14. A method as defined in claim 11, wherein the ceramic powder is fumed silica powder.
- 15. A method as defined in claim 14, wherein the layer of fumed silica has a uniform thickness of less than about 1.5 cm.
- 16. A method as defined in claim 15, wherein the layer of fumed silica has a uniform thickness of less than about 3 mm.
- 17. A method for sintering a thin silica gel plate, comprising:placing a layer of silica-based powder on a support surface; placing a thin silica gel plate on the layer of silica-based powder; elevating the temperature of the silica gel plate to a sintering temperature, to sinter the plate, wherein the silica-based powder partially fuses, to anchor the gel to the support surface and prevent non-uniform stresses in the sintered plate from warping the sintered plate; and separating the sintered plate from the support surface.
- 18. A method as defined in claim 17, wherein the thin silica gel plate is derived from a sol-gel process.
- 19. A method as defined in claim 17, wherein the silica-based powder is derived by fuming, precipitating, or sol-gel processes.
- 20. A method as defined in claim 17, wherein the silica-based powder has a sintering temperature within a range of 1100 to 1500 degrees Celsius.
- 21. A method as defined in claim 17, wherein the silica-based powder sinters at the sintering temperature of the silica gel plate.
- 22. A method as defined in claim 17, wherein the silica-based powder sinters above the sintering temperature of the silica gel plate.
- 23. A method as defined in claim 17, wherein the refractory powder has a particle size between 10 nm and 500 μm.
- 24. A method as defined in claim 17, wherein the support surface is a quartz glass support surface.
- 25. A method as defined in claim 17, wherein the layer of silica-based powder has a uniform thickness of less than about 1.5 cm.
- 26. A method as defined in claim 23, wherein the layer of silica-based powder has a uniform thickness of less than about 3 mm.
Parent Case Info
This application claims the benefit of U.S. Provisional Application No. 60/256,664, filed Dec. 18, 2000.
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|
Number |
Date |
Country |
|
60/256664 |
Dec 2000 |
US |