Number | Name | Date | Kind |
---|---|---|---|
4642813 | Wilder | Feb 1987 | |
4678920 | Iadipaolo et al. | Jul 1987 | |
4711579 | Wilkinson | Dec 1987 | |
4858156 | Martin | Aug 1989 | |
4935714 | McClure | Jun 1990 | |
4958140 | Yasuda et al. | Sep 1990 | |
4961067 | Suzuki | Oct 1990 | |
5031147 | Maruyama et al. | Jul 1991 | |
5059942 | Burrows | Oct 1991 |
Entry |
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Tsukamoto, "Optical Inspection System for Mask Pattern", Proceedings of the International Conference on Industrial Electronics, Control and Instrumentation, Tokyo, Japan, Oct. 22-26, 1984; IEEE Press, vol. 2, New York (US), pp. 1032-1035. |