Claims
- 1. A method of producing an electric contact which is provided on at least one of a pair of conductors and a surface of said at least one conductor being coated with a metal layer comprising a high melting point metal or an alloy of a high melting point metal and, on said metal layer, a ceramic layer comprising at least one material selected from the group consisting of nitrides, carbides and borides of high melting point metals, said method comprising the steps of:
- sputter etching a surface of said at least one conductor in a first reaction chamber which is kept at a reduced pressure,
- moving said sputter etched conductor to a second reaction chamber which is connected with said first reaction chamber through a connecting hole and kept at a pressure lower than that in said first chamber,
- forming a metal layer comprising a high melting point metal or an alloy of a high melting point metal on said sputter etched surface of said conductor by a vapor phase deposition method,
- moving said conductor having said metal layer thereon in the previous step to a third reaction chamber which is connected with said second chamber through a connecting hole and kept at a pressure lower than that in said second reaction chamber, and
- forming a ceramic layer comprising at least one material selected from the group consisting of nitrides, carbides and borides of high melting point metals on said metal layer formed on said conductor.
- 2. The method according to claim 1, wherein said ceramic layer is formed by nitriding, carbonizing or boriding said metal layer.
- 3. The method according to claim 1, wherein said vapor phase deposition method is sputtering.
- 4. The method according to claim 1, wherein said high melting point metal is at least one metal selected from the group consisting of Ti, Zr, Hf, Ta, W and Mo.
Priority Claims (5)
Number |
Date |
Country |
Kind |
6490 |
Jan 1991 |
JPX |
|
6491 |
Jan 1991 |
JPX |
|
6492 |
Jan 1991 |
JPX |
|
46761 |
Mar 1991 |
JPX |
|
46762 |
Mar 1991 |
JPX |
|
Parent Case Info
This is a divisional of application Ser. No. 07/824,052 filed Jan. 23, 1992, now U.S. Pat. No. 5,272,295 issued Dec. 21, 1993.
US Referenced Citations (12)
Foreign Referenced Citations (4)
Number |
Date |
Country |
54-90565 |
Jul 1979 |
JPX |
705547 |
Dec 1979 |
SUX |
1064335 |
Dec 1983 |
SUX |
1107184 |
Aug 1984 |
SUX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
824052 |
Jan 1992 |
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