Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/JP88/00173 | 2/19/1988 | 12/18/1989 | 12/18/1989 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO89/07578 | 8/24/1989 |
Number | Name | Date | Kind |
---|---|---|---|
3010797 | Aries | Nov 1961 | |
3660298 | McClincy et al. | May 1972 | |
4457902 | Watson | Jul 1984 |
Number | Date | Country |
---|---|---|
0208567 | EPX |
Entry |
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Japanese, vol. 10, No. 123(C-344) (2180), May 8, 1986-Process and Device for Preparing Silicon. |