This application claims priority under 35 U.S.C. § 119 to Japanese Patent Application No. 2017-143661 filed on Jul. 25, 2017, the entire content of which is hereby incorporated by reference.
The present invention relates to a method for producing a nozzle plate and a method for producing a liquid jet head.
Conventionally, there is an ink jet printer (liquid jet device) including an ink jet head (liquid jet head) as a device which discharges an ink in the form of a droplet onto a recording medium such as a recording paper to record an image or a character on the recording medium. The ink jet head includes a nozzle plate in which a nozzle that discharges an ink is formed.
For example, JP-A-2014-65220 discloses a method for producing a nozzle plate, in which a part of a metal layer in a stacked body of a resin layer and a metal layer is removed, thereby exposing the resin layer, and thereafter a nozzle is formed so as to open in a region exposed from the metal layer in the resin layer.
However, a residue sometimes occurred during the formation of the nozzle. In particular, when a residue occurring during the formation of the nozzle remained around the nozzle hole, there was a possibility that the discharged ink deflected, and therefore, the discharge accuracy of the nozzle was deteriorated.
The invention has been made for solving the above problem, and an object thereof is to provide a method for producing a nozzle plate and a method for producing a liquid jet head, each capable of improving the discharge accuracy of a nozzle.
A method for producing a nozzle plate according to one embodiment of the invention includes a substrate preparation step of preparing a coating agent-applied substrate in which a coating agent is applied to at least a part of a nozzle plate substrate, a nozzle hole formation step of forming a nozzle hole in a region, to which the coating agent is applied, of the coating agent-coated substrate after the substrate preparation step, and a coating agent removal step of removing the coating agent after the nozzle hole formation step.
According to this method, even if a residue (hereinafter also referred to as “debris”) occurs during the formation of a nozzle hole, the debris can be collectively removed together with the coating agent in the coating agent removal step, and therefore, the removal of the debris can be easily performed. Accordingly, the discharge accuracy of the nozzle can be improved.
In the method for producing a nozzle plate, the substrate preparation step may include a joined body preparation step of preparing a joined body of the nozzle plate substrate and a cover plate having an opening portion for exposing a nozzle hole forming region of the nozzle plate substrate, and a coating agent application step of applying the coating agent to at least the nozzle hole forming region of the joined body after the joined body preparation step.
In the meantime, as a method for removing a debris, there is a method using an adhesive tape without using a coating agent. However, in the case where a debris occurs in the nozzle hole forming region, the opening portion of the cover plate is generally smaller than a fingertip, and therefore, the adhesive tape does not sufficiently penetrate into the nozzle hole forming region, and there is a possibility that the debris cannot be sufficiently removed. On the other hand, according to this method, even in the case where a debris occurs in the nozzle hole forming region, the debris can be collectively removed together with the coating agent in the coating agent removal step, and therefore, this method is preferred.
In the method for producing a nozzle plate, in the coating agent application step, the coating agent may be applied to the nozzle hole forming region and an inner surface surrounding the opening portion of the cover plate.
According to this method, even in the case where a debris occurs on the inner surface surrounding the opening portion of the cover plate in addition to the nozzle hole forming region, the debris in each place can be collectively removed together with the coating agent in the coating agent removal step. Therefore, the appearance of the nozzle plate can be improved.
In the method for producing a nozzle plate, in the coating agent application step, the coating agent may be applied to the nozzle hole forming region and an outer surface on the opposite side to a joining surface to the nozzle plate substrate of the cover plate.
According to this method, even in the case where a debris occurs on the outer surface of the cover plate in addition to the nozzle hole forming region, the debris in each place can be collectively removed together with the coating agent in the coating agent removal step. Therefore, the appearance of the nozzle plate can be improved.
In the method for producing a nozzle plate, in the nozzle hole formation step, the nozzle hole may be formed using a laser beam.
According to this method, a debris is more likely to occur as compared with the case where the nozzle hole is formed using a punch, and therefore, the practical benefit for removing the debris is high.
In the method for producing a nozzle plate, in the coating agent removal step, the coating agent may be removed by washing with water.
According to this method, the removal of the debris can be performed more easily at lower cost as compared with the case where the coating agent is removed using a chemical solution.
A method for producing a liquid jet head according to one embodiment of the invention includes producing a nozzle plate using the method for producing a nozzle plate.
According to this method, in the method for producing a liquid jet head including producing a nozzle plate using the method for producing a nozzle plate, the discharge accuracy of the liquid jet head can be improved.
According to the invention, a method for producing a nozzle plate and a method for producing a liquid jet head, each capable of improving the discharge accuracy of a nozzle can be provided.
Hereinafter, embodiments according to the invention will be described with reference to the drawings. In the following embodiments, an ink jet printer (hereinafter also simply referred to as “printer”) which performs recording on a recording medium using an ink (liquid) will be described as an example. In the drawings used in the following description, the scales of the respective members are appropriately changed so that the respective members have recognizable sizes.
As shown in
The conveyance mechanisms 2 and 3 convey the recording medium P in the X direction. Specifically, the conveyance mechanism 2 includes a grid roller 11 extending in the Y direction, a pinch roller 12 extending parallel to the grid roller 11, and a drive mechanism (not shown) such as a motor for axially rotating the grid roller 11. The conveyance mechanism 3 includes a grid roller 13 extending in the Y direction, a pinch roller 14 extending parallel to the grid roller 13, and a drive mechanism (not shown) for axially rotating the grid roller 13.
The ink supply mechanism 4 includes ink tanks 15, each of which stores an ink, and ink tubes 16, each of which connects each ink tank 15 to each ink jet head 5.
The ink tanks 15 are, for example, ink tanks 15Y, 15M, 15C, and 15K, which store inks of four colors: yellow, magenta, cyan, and black, respectively. In this embodiment, the ink tanks 15Y, 15M, 15C, and 15K are arranged side by side in the X direction.
For example, the ink tubes 16 are flexible hoses having flexibility. The ink tubes 16 connect the respective ink tanks 15 to the respective ink jet heads 5 separately.
The scanning mechanism 6 allows the ink jet heads 5 to scan back and forth in the Y direction. Specifically, the scanning mechanism 6 includes a pair of guide rails 21 and 22 extending in the Y direction, a carriage 23 movably supported by the pair of guide rails 21 and 22, and a drive mechanism 24 for moving the carriage 23 in the Y direction.
The drive mechanism 24 is disposed between the guide rails 21 and 22 in the X direction. The drive mechanism 24 includes a pair of pulleys 25 and 26 which are disposed spaced apart in the Y direction, an endless belt 27 which is wound between the pair of pulleys 25 and 26, and a drive motor 28 which rotatably drives the pulley 25.
The carriage 23 is connected to the endless belt 27. On the carriage 23, the ink jet heads 5 are mounted in a state of being arranged side by side in the Y direction. In this embodiment, the ink jet heads 5 are ink jet heads 5Y, 5M, 5C, and 5K capable of discharging the inks of four colors: yellow, magenta, cyan, and black, respectively.
As shown in
To the fixing plate 31, a base plate 35 is fixed in a standing state in the Z direction.
The ink supply portion 33 includes a flow path member 36 which is fixed to the fixing plate 31, a pressure damper 37 which is fixed to the base plate 35, and an ink connection tube 38 which connects the flow path member 36 to the pressure damper 37.
To the pressure damper 37, the ink tube 16 is connected. When the pressure damper 37 is supplied with the ink through the ink tube 16, the ink is once stored therein. The pressure damper 37 supplies the stored ink to the head chip 32 through the ink connection tube 38 and the flow path member 36.
The control portion 34 includes an IC substrate 41 which is fixed to the base plate 35 and a control circuit 42 which is mounted on the IC substrate 41.
The control circuit 42 includes an integrated circuit for driving the head chip 32, and the like. The control circuit 42 is electrically connected to the head chip 32 through a flexible printed wiring board 44 having a wiring pattern (not shown) printed thereon.
The head chip 32 shown in
The actuator plate 51 is a so-called monopole substrate whose polarization direction is set to one direction along the thickness direction (Y direction). For example, as the actuator plate 51, a ceramic substrate composed of lead zirconate titanate (PZT) or the like is preferably used. The actuator plate 51 may be of a so-called chevron type formed by stacking two piezoelectric substrates whose polarization directions differ from each other in the Z direction.
As shown in
The plurality of channels 55 and 56 include a discharge channel 55 which is filled with an ink and a non-discharge channel 56 which is not filled with an ink. The discharge channel 55 and the non-discharge channel 56 are alternately arranged side by side in the X direction. On the drive wall 57, a drive electrode (not shown) is formed by vapor deposition or the like. The drive electrode deforms the drive wall 57 due to a piezoelectric slip effect by applying a drive voltage thereto through the flexible printed wiring board 44 (see
The cover plate 52 is formed in a rectangular shape in a plan view seen from the Y direction. As shown in
On the front surface of the cover plate 52, a common ink chamber 61 is formed. On the back surface of the cover plate 52, a plurality of slits 62 are formed.
The common ink chamber 61 is formed at a position equivalent to that of the upper end portion of the discharge channel 55 in the Z direction. The common ink chamber 61 is recessed toward the back surface side of the cover plate 52 and also extends in the X direction. The ink flows in the common ink chamber 61 through the flow path member 36 (see
The slits 62 are formed in the common ink chamber 61 at positions facing the discharge channels 55 in the Y direction. Each of the slits 62 allows the inside of the common ink chamber 61 and the inside of each of the discharge channels 55 to communicate with each other separately. On the other hand, the non-discharge channels 56 do not communicate with the inside of the common ink chamber 61
The support plate 53 supports the actuator plate 51 and the cover plate 52, and also supports the nozzle plate body 70 simultaneously. The support plate 53 is a rectangular frame-shaped plate material formed long in the X direction so as to correspond to the actuator plate 51. As shown in
The support plate 53 is formed in a stepped plate shape so that the plate becomes smaller toward the lower side due to a step difference. That is, the support plate 53 is configured such that a base portion 53b which is located on the upper side and a step portion 53c which is disposed on the lower surface of the base portion 53b and is formed so that the outer shape thereof is smaller than that of the base portion 53b are integrally formed. The support plate 53 is combined so that the lower surface of the step portion 53c and the lower surface of the actuator plate 51 are flush with each other. For example, to the lower surface of the step portion 53c, the nozzle plate body 70 is fixed by bonding or the like.
As shown in
For example, the nozzle plate 54 is made of a resin material such as polyimide. The material of the nozzle plate 54 is not limited to a resin material, and the nozzle plate 54 may be made of a metal material such as stainless steel (SUS), silicon, glass or the like. Further, the nozzle plate 54 may be configured to have a single layer structure or a stacked structure.
The nozzle plate 54 is formed to a size corresponding to the outer shape of the step portion 53c of the support plate 53. That is, the nozzle plate 54 is formed in a rectangular plate shape having a longer side in the X direction. For example, the thickness of the nozzle plate 54 is about 50 μm.
In the nozzle plate 54, nozzle holes 63 which penetrate the plate in the Z direction are formed. Each nozzle hole 63 allows the ink to flow in the Z direction from the upper side to the lower side and jets the ink from a downstream opening. For example, each nozzle hole 63 is formed in a tapered shape whose diameter gradually decreases from the upper side to the lower side. The nozzle holes 63 are formed in the nozzle plate 54 at positions facing the discharge channels 55 in the Z direction separately. That is, the nozzle holes 63 are formed at intervals in the X direction. Accordingly, the discharge channels 55 communicate with the outside through the nozzle holes 63. On the other hand, the non-discharge channels 56 are closed by the nozzle plate 54. Hereinafter, a region where the nozzle holes 63 (nozzle array) arranged in the X direction are formed in the nozzle plate 54 is referred to as “nozzle hole forming region 54b”. As shown in
The nozzle cover plate 71 is bonded and fixed to the discharge surface 54a of the nozzle plate 54 by thermocompression bonding. The nozzle cover plate 71 is desirably made of a material having higher rigidity than that of the nozzle plate 54. For example, the nozzle cover plate 71 is formed by subjecting a thin plate or the like made of stainless steel to press working or etching working.
The nozzle cover plate 71 has substantially the same outer shape as that of the nozzle plate 54. That is, the nozzle cover plate 71 is formed in a rectangular frame shape having a longer side in the X direction. The nozzle cover plate 71 is formed so as to cover the discharge surface 54a of the nozzle plate 54 avoiding the nozzle hole forming region 54b. As shown in
For example, a water-repellent film may be applied to an outer surface 71a (a surface on the opposite side to the nozzle plate 54) of the nozzle cover plate 71. This can prevent the ink from adhering to the nozzle cover plate 71 and remaining thereon as much as possible. Incidentally, the discharge surface 54a of the nozzle plate 54 and an upper surface (a surface on the nozzle plate 54 side) of the nozzle cover plate 71 to be joined to the discharge surface 54a are each desirably hydrophilic. This can increase the joining force between the nozzle plate 54 and the nozzle cover plate 71.
Meanwhile, a water-repellent film may be applied to the discharge surface 54a of the nozzle plate 54. This can prevent the ink from adhering to the discharge surface 54a of the nozzle plate 54 and remaining thereon as much as possible. Further, a water-repellent film may not be applied to the lower surface of the nozzle cover plate 71.
Next, a method for recording information on the recording medium P using the printer 1 (see
As shown in
During this operation, in each of the ink jet heads 5, a drive voltage is applied to the drive electrode of the head chip 32. This causes thickness-shear deformation in the drive wall 57 and generates a pressure wave in the ink filled in the discharge channel 55. By this pressure wave, the internal pressure of the discharge channel 55 is increased, so that the ink is discharged through the nozzle hole 63. Then, the ink lands on the recording medium P, whereby various information is recorded on the recording medium P.
Next, a method for producing the nozzle plate 54 (a method for producing the nozzle plate body 70) of the embodiment will be described.
The method for producing the nozzle plate 54 of this embodiment includes a substrate preparation step of preparing a coating agent-applied substrate 90 in which a coating agent 91 is applied to a part of a nozzle plate substrate 81 which is a base material of the nozzle plate 54, a nozzle hole formation step of forming the nozzle hole 63 in the coating agent-applied substrate 90, and a coating agent removal step of removing the coating agent 91. The substrate preparation step of this embodiment includes a joined body preparation step of preparing a joined body 80 of the nozzle plate substrate 81 and the nozzle cover plate 71, and a coating agent application step of applying the coating agent 91 to the joined body 80.
As shown in
As the nozzle plate substrate 81, for example, a polyimide substrate is used. As the nozzle cover plate 71, for example, an SUS substrate is used. The opening portion 72 of the nozzle cover plate 71 is formed by, for example, etching. The opening portion 72 is formed larger than the nozzle hole 63 to be formed in the nozzle hole forming region 81b. The width W1 of the opening portion 72 is set to, for example, 0.15 mm or more and 1 mm or less.
In the joined body preparation step, the nozzle cover plate 71 is joined to the surface 81a of the nozzle plate substrate 81, whereby the joined body 80 is obtained. For example, the nozzle cover plate 71 is disposed on the surface 81a of the nozzle plate substrate 81, and the nozzle plate substrate 81 and the nozzle cover plate 71 are bonded to each other by thermocompression bonding. In this manner, the joined body 80 of the nozzle plate substrate 81 and the nozzle cover plate 71 is prepared.
After the joined body preparation step, the process proceeds to the coating agent application step.
As shown in
Specifically, in the coating agent application step, the coating agent 91 is applied to the nozzle hole forming region 81b, an inner surface 71b surrounding the opening portion 72 of the nozzle cover plate 71, and the outer surface 71a on the opposite side to the joining surface to the nozzle plate substrate 81 of the nozzle cover plate 71. The coating agent 91 is applied by, for example, a bar coater. The coating agent 91 may be applied by spraying.
In the coating agent application step, the coating agent 91 is continuously applied to the nozzle hole forming region 81b, the inner surface 71b surrounding the opening portion 72 of the nozzle cover plate 71, and the outer surface 71a of the nozzle cover plate 71.
After the coating agent application step, the process proceeds to the nozzle hole formation step.
As shown in
In the nozzle hole formation step, the nozzle hole forming region 81b is irradiated with the laser beam from the other surface side of the nozzle plate substrate 81 (the direction indicated by the arrow L1). The irradiation direction of the laser beam may be a direction in which the nozzle hole forming region 81b is irradiated with the laser beam through the opening portion 72 from the surface 81a side of the nozzle plate substrate 81 (the direction opposite to the direction indicated by the arrow L1).
When the nozzle plate substrate 81 is heated by the laser beam, the nozzle plate substrate 81 may be thermally deformed. However, in tis embodiment, the nozzle cover plate 71 is bonded to the nozzle plate substrate 81, and therefore, thermal deformation of the nozzle plate substrate 81 can be suppressed. Accordingly, the nozzle hole 63 can be accurately formed.
After the nozzle hole formation step, the process proceeds to the coating agent removal step. A reference numeral 92 in
As shown in
After the coating agent removal step, a water-repellent film (not shown) may be applied to the outer surface 71a of the nozzle cover plate 71.
According to the above steps, the production of the nozzle plate 54 (nozzle plate body 70) is completed.
As described above, the method for producing the nozzle plate 54 according to this embodiment includes the substrate preparation step of preparing the coating agent-applied substrate 90 in which the coating agent 91 is applied to a part of the nozzle plate substrate 81, the nozzle hole formation step of forming the nozzle hole 63 in a region, to which the coating agent 91 is applied, of the coating agent-applied substrate 90 after the substrate preparation step, and the coating agent removal step of removing the coating agent 91 after the nozzle hole formation step.
According to this embodiment, even in the case where the debris 92 occurs during the formation of the nozzle hole 63, the debris 92 can be collectively removed together with the coating agent 91 in the coating agent removal step, and therefore, the removal of the debris 92 can be easily performed. Accordingly, the discharge accuracy of the nozzle can be improved. Further, when a debris remained around the nozzle hole, the discharged ink deflected, and therefore, the discharge accuracy of the ink jet head was deteriorated in some cases. However, according to this embodiment, the discharge accuracy of the ink jet head 5 can be improved.
Further, in this embodiment, the substrate preparation step includes the joined body preparation step of preparing the joined body 80 of the nozzle plate substrate 81 and the nozzle cover plate 71 having the opening portion 72 for exposing the nozzle hole forming region 81b of the nozzle plate substrate 81, and the coating agent application step of applying the coating agent 91 to at least the nozzle hole forming region 81b of the joined body 80 after the joined body preparation step.
In the meantime, as a method for removing the debris 92, there is a method using an adhesive tape without using a coating agent. However, in the case where the debris 92 occurs in the nozzle hole forming region 81b, the opening portion 72 of the nozzle cover plate 71 is generally smaller than a fingertip, and therefore, the adhesive tape does not sufficiently penetrate into the nozzle hole forming region 81b, and there is a possibility that the debris 92 cannot be sufficiently removed. On the other hand, according to this method, even in the case where the debris 92 occurs in the nozzle hole forming region 81b, the debris 92 can be collectively removed together with the coating agent 91 in the coating agent removal step, and therefore, this method is preferred.
Further, in this embodiment, in the coating agent application step, the coating agent 91 is applied to the nozzle hole forming region 81b and the inner surface 71b surrounding the opening portion 72 of the nozzle cover plate 71.
According to this embodiment, even in the case where the debris 92 occurs on the inner surface 71b surrounding the opening portion 72 of the nozzle cover plate 71 in addition to the nozzle hole forming region 81b, the debris 92 in each place can be collectively removed together with the coating agent 91 in the coating agent removal step. Therefore, the appearance of the nozzle plate 54 (nozzle plate body 70) can be improved.
Further, in this embodiment, in the coating agent application step, the coating agent 91 is applied to the nozzle hole forming region 81b and the outer surface 71a on the opposite side to the joining surface to the nozzle plate substrate 81 of the nozzle cover plate 71.
According to this embodiment, even in the case where the debris 92 occurs on the outer surface 71a of the nozzle cover plate 71 in addition to the nozzle hole forming region 81b, the debris 92 in each place can be collectively removed together with the coating agent 91 in the coating agent removal step. Therefore, the appearance of the nozzle plate 54 (nozzle plate body 70) can be improved.
Further, in this embodiment, in the nozzle hole formation step, the nozzle hole 63 is formed using a laser beam.
According to this embodiment, the debris 92 is more likely to occur as compared with the case where the nozzle hole 63 is formed using a punch, and therefore, the practical benefit for removing the debris 92 is high.
Further, in this embodiment, in the coating agent removal step, the coating agent 91 is removed by washing with water.
According to this embodiment, the removal of the debris 92 can be performed more easily at lower cost as compared with the case where the coating agent 91 is removed using a chemical solution.
The technical scope of the invention is not limited to the above-mentioned embodiments, and various modifications can be added without departing from the gist of the invention.
For example, the invention may be applied to a method for producing the ink jet head 5 including a step of producing the nozzle plate 54 using the method for producing the nozzle plate 54 described above.
For example, in the above-mentioned embodiment, an example in which the substrate preparation step includes the joined body preparation step of preparing the joined body 80 of the nozzle plate substrate 81 and the nozzle cover plate 71 having the opening portion 72 for exposing the nozzle hole forming region 81b of the nozzle plate substrate 81 has been described, however, the invention is not limited thereto. For example, in the substrate preparation step, only the nozzle plate substrate 81 may be prepared without preparing the nozzle cover plate 71. That is, in the substrate preparation step, the coating agent-applied substrate 90 in which the coating agent 91 is applied to at least a part of the nozzle plate substrate 81 may be prepared. For example, after the nozzle hole 63 is formed in the coating agent-applied substrate 90 to which the coating agent 91 has already been applied, the coating agent 91 may be removed.
Further, in the above-mentioned embodiment, an example in which in the coating agent application step, the coating agent 91 is applied to the nozzle plate substrate 81 on the nozzle cover plate 71 side has been described, however, the invention is not limited thereto. For example, in the coating agent application step, the coating agent 91 may be applied to the nozzle plate substrate 81 on the side opposite to the nozzle cover plate 71. That is, in the coating agent application step, the coating agent 91 may be applied to both surfaces of the nozzle plate substrate 81.
Further, in the above-mentioned embodiment, an example in which in the coating agent application step, the coating agent 91 is applied to the nozzle hole forming region 81b, the inner surface 71b surrounding the opening portion 72 of the nozzle cover plate 71, and the outer surface 71a of the nozzle cover plate 71 has been described, however, the invention is not limited thereto. For example, in the coating agent application step, the coating agent 91 may not be applied to at least one of the inner surface 71b surrounding the opening portion 72 of the nozzle cover plate 71 and the outer surface 71a of the nozzle cover plate 71. That is, in the coating agent application step, the coating agent 91 may only be applied to at least the nozzle hole forming region 81b.
Further, in the above-mentioned embodiment, an example in which in the coating agent application step, as the coating agent 91, a liquid material capable of penetrating into the opening portion 72 is used has been described, however, the invention is not limited thereto. For example, a solid such as a sealing material may be melted by heat and filled in the opening portion 72 and then solidified. For example, the sealing material in the opening portion 72 may be removed by melting after the nozzle hole formation step.
Further, in the above-mentioned embodiment, an example in which in the nozzle hole formation step, the nozzle hole 63 is formed using a laser beam has been described, however, the invention is not limited thereto. For example, in the nozzle hole formation step, the nozzle hole 63 may be formed using a punch.
Further, in the above-mentioned embodiment, an example in which in the coating agent removal step, the coating agent 91 is removed by washing with water has been described, however, the invention is not limited thereto. For example, in the coating agent removal step, the coating agent 91 may be removed using a chemical solution. For example, in the case where acetone or xylene is used as the chemical solution, as the coating agent 91, a resist which is easily removed with acetone or xylene is used.
Further, in the above-mentioned embodiment, an ink jet head of a so-called wall bend type among the ink jet heads of a piezo system has been described, however, the invention is not limited thereto. For example, the invention may be applied to an ink jet head of a so-called roof shoot type (the direction of a pressure to be applied to an ink and the discharge direction of an ink droplet are the same), or an ink jet head of another piezo system among the ink jet heads of a piezo system.
Further, the system is not limited to the piezo system, and the invention may be applied also to an ink jet head of a thermal system, or the like.
Further, in the above-mentioned embodiment, an ink jet head of an edge shoot type has been described, however, the invention is not limited thereto. For example, the invention may be applied to an ink jet head of a so-called side shoot type in which an ink is discharged from a central portion in the extending direction of a discharge channel.
In addition to the above, the component in the above-mentioned embodiment can be appropriately replaced with a known component without departing from the gist of the invention.
Number | Date | Country | Kind |
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2017-143661 | Jul 2017 | JP | national |