Jurcik et al, "The Effect of Baking on the Dry Down of UHP Distribution Systems: From Laboratory to Industrial Scale via Numerical Simulation", Proceedings--Institute of Environmental Sciences, 1995 meeting. |
McAndrew et al, "Using Simulation to Optimize Gas Distribution System Cost and Performance", Journal of the IES, Sep./Oct. 1994, pp. 30-39. |
Liehr et al, "Concepts in Competitive Miroelectronics Manufacturing," J. Vac. Sci. Technol. B 12(4), Jul./Aug. 1994, pp. 2727-2740. |
K. Tatenuma et al, Buneski 223, 393 (1994). |
Miyazaki et al, "Determination of Trace Impurities in Corrosive Gases by Gas-Phase FTIR," Bull. Chem. Soc. Jpn. 66,3508-3510(1993), Nov. 1993, vol. 68, No. 11, pp. 3508-3510. |
Tatenuma et al, "Quick Acquisition of Clean Ultrahigh Vacuum by Chemical Process Technology," J. Vac. Sci. Technol. A 11(4), Jul./Aug. 1993, pp. 1719-1724. |
Miyazaki et al, "Analysis of Trace Moisture in HCl by Gas-Phase FTIR," Bull. Chem. Soc. Jpn. 66,969-971(1993), Mar. 1993, vol. 66, No. 3, pp. 969-971. |
Venet, paper presented at 1991 Fall AICHE Conference, pp. 26-28. |