Number | Name | Date | Kind |
---|---|---|---|
4016062 | Mehta et al. | May 1977 | |
4172758 | Bailey et al. | Oct 1979 | |
4229248 | Silverman et al. | Oct 1980 | |
4248688 | Gartner et al. | Feb 1981 |
Entry |
---|
Ion Implantation, Sputtering and Their Applications, P. D. Townsend et al., Academic Press, 1976, pp. 111-112. |