Number | Date | Country | Kind |
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101 32 231 | Jun 2001 | DE |
Number | Name | Date | Kind |
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6292503 | Watanabe et al. | Sep 2001 | B1 |
Number | Date | Country |
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34 45 725 | Jul 1985 | DE |
38 37 874 | May 1990 | DE |
0390614 | Oct 1990 | DE |
39 36 694 | Nov 1990 | DE |
0 390 614 | Oct 1990 | EP |
Entry |
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Gessner et al., In-situ etching in InP based BH laser struuctres in MOVPE, May 14-18, 2001, 2001 internation conference on Indium Phosphide and related materials, pp. 398-400.* |
Reinhold Paul: “Optoelektronische Halbleiterbauelemente” [optoelectronic semiconductor components], B. G. Teubner Verlag, Stuttgart, 1992, pp. 195-206. |
Masahiko Kondow et al.: “Chemical beam Etching of GaAS Using a Novel Precursor of Tertiarybutylchloride (TBCI)”, Jpn. J. Appl. Phys., vol. 38, 1999, pp. L617-L619. |