Claims
- 1. In a method for preparing polyimide layers having a thickness of less than about 0.2 .mu.m, wherein a solution of a polyimide prepolymer is applied to a substrate in the form of a film and the applied film is thereafter annealed to convert the prepolymer to polyimide, the improvement wherein said prepolymer is a film-forming prepolymer of a highly heat-resistant polyimide, said solution of said prepolymer also contains a compound selected from a diazoquinone, an oligomeric ester or ether having an aliphatic or cycloaliphatic structural element, polymethylmethacrylate or a polyolefin sulfone, which compound is volatilized in the annealing process, and, during annealing, said solution gives off a percentage of volatile products, relative to its total weight, which is sufficiently large to result in a reduction in the thickness of the applied film of at least about 40%.
- 2. A method according to claim 1 wherein said prepolymer, during the annealing, gives off high molecular weight alcohols as volatile products in the formation of the polyimide.
- 3. A method according to claim 1 wherein said solution of said prepolymer has added thereto a silane.
Priority Claims (1)
Number |
Date |
Country |
Kind |
3107633 |
Feb 1981 |
DEX |
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Parent Case Info
This application is a continuation of application Ser. No. 537,685, filed Sept. 30, 1983 now abandoned, which is a continuation of application Ser. No. 350,769 filed Feb. 22, 1982 and now abandoned.
US Referenced Citations (6)
Continuations (2)
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Number |
Date |
Country |
Parent |
537685 |
Sep 1983 |
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Parent |
350769 |
Feb 1982 |
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