Number | Date | Country | Kind |
---|---|---|---|
63-203997 | Aug 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4352561 | Tohyama et al. | Oct 1982 | |
4555767 | Case et al. | Nov 1985 | |
4618262 | Maydan et al. | Oct 1986 | |
4645349 | Tabata | Feb 1987 | |
4676647 | Kikkawa et al. | Jun 1987 |
Number | Date | Country |
---|---|---|
60231125 | May 1984 | JPX |
Entry |
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IBM Technical Disclosure Bulletin, vol. 20, No. 3, "Optical Thickness Measurement Analysis Applicable to Multilayer Films", Aug. 1979. |