The present invention relates to bipolar transistors and, more particularly, to methods and structures for recovering gain lost or degraded because of, for example, a hot carrier effect.
Bipolar transistors are electronic devices with two p-n junctions that are in close proximity to each other. A typical bipolar transistor has three device regions: an emitter, a collector, and a base disposed between the emitter and the collector. Ideally, two p-n junctions, i.e. the emitter-base and collector-base junctions, are separated by a specific distance. Modulation of the current flow in one p-n junction by changing the bias of the nearby junction is called “bipolar transistor action.”
If the emitter and collector are doped n-type and the base is doped p-type, the device is an “npn” transistor. Alternatively, if the opposite doping configuration is used, the device is a “pnp” transistor. Because of the mobility of minority carriers, i.e. electrons, in the base region of npn transistors, higher frequency operation and higher speed performances can be obtained with npn transistors. Therefore, the present inventors believe npn transistors comprise many of the bipolar transistors used to build integrated circuits. In
Performance wear-out over a device (bipolar transistor) operating lifetime has been a major problem for all semiconductor devices. One of the wear-out mechanisms is the known hot carrier effect due to reverse bias of the base-emitter junction in bipolar devices. In some circuit applications, the base-emitter junction is required to be reverse biased at a high voltage (such as VBE=1.5 volts or higher) for a long time, which would severely degrade key device performance parameters, in particular a current gain (hfe “aka” β). The current gain β is a ratio of the collector current Ic divided by the base current Ib. The reverse bias of the base-emitter junction at a high voltage for a long time significantly reduces the bipolar transistor operating lifetime.
For discussions of the hot carrier effect and reverse bias of the base-emitter junction in bipolar transistors, see, for example: HOT-ELECTRON-INDUCED DEGRADATION AND POST-STRESS RECOVERY OF BIPOLAR TRANSISTOR GAIN AND NOISE CHARACTERISTICS, by Sun et al., IEEE Transections on Electron Devices, Vol. 39, No. 9, September 1992, pgs. 2178-2180; TEMPERATURE DEPENDENCE AND POST-STRESS RECOVERY OF HOT ELECTRON DEGRADATION EFFECTS IN BIPOLAR TRANSISTORS, by Huang et al., IEEE 1991 Bipolar Circuits and Technology, 5/91, pgs. 170-173.
Traditionally, bipolar device manufacturers and designers are limited by a maximum allowed base-emitter reverse voltage (VBE) in order to ensure reliability in the transistor operation lifetime. However, as the reverse voltage limit continues to be reduced in advanced semiconductor technology with more demanding performance requirements and ever shrinking device dimensions, it is becoming very problematic for circuit designers to use standard circuit libraries developed from previous technologies (e.g., larger technology nodes).
For example, a customer may desire a semiconductor foundry to support a transistor circuit (device) with a reverse bias voltage (VBE) at 3.0V using, for example, BiCMOS6WL technology of IBM that offers a reverse voltage bias limit of approximately (±10%) 1.75V. With traditional reliability guidelines and models, such a design significantly impacts reliability during the transistor lifetime and, thus, is problematic. Meeting reliability requirements for such transistor designs is very challenging. It is, therefore, very important for, for example, a semiconductor foundry or other semiconductor manufacturer to have a solution in order to alleviate this base-emitter junction reverse bias voltage limit.
U.S. Pat. No. 7,238,565 B2 entitled “METHODOLOGY FOR RECOVERY OF HOT CARRIER INDUCED DEGRADATION IN BIPOLAR DEVICES,” by Guarin et al., issued Jul. 3, 2007, discloses the recovery of degradation caused by the hot carrier effect in the base-collector junction using thermal annealing. A method of forward biasing a bipolar transistor for degradation recovery is also disclosed in this patent. In one of several embodiments disclosed in the '565B2 Patent, a high forward current around the peak fT current is provided to the bipolar transistor while operating below an avalanche condition (VCB of less than 1 volt). The high forward current contributes to increase the temperature of the bipolar transistor to about 200° C. or greater. More particularly, appropriately increasing the temperatures of the base-collector junction and the base-emitter junction contributes to recovering the degradation significantly. U.S. Pat. No. 7,238,565 B2 is hereby incorporated in its entirety herein by reference.
The present inventors believe that improvements to the invention disclosed in U.S. Pat. No. 7,238,565 B2, assigned to International Business Machines Corporation (the assignee of the present invention and patent application) are achievable, particularly with respect to implementations (methods and arrangements) for gain recovery in a bipolar transistor.
According to the present invention, a method of recovering gain in a bipolar transistor comprises: providing a bipolar transistor including an emitter, a collector, and a base disposed between junctions at the emitter and the collector; reverse biasing the junction disposed between the emitter and the base with an operational voltage and for an operational time period, so that a current gain (β) of the transistor is degraded; idling the transistor, generating a repair current Ibr into the base, while forward biasing the junction disposed between the emitter and the base with a first repair voltage (VBER), and while at least partly simultaneously reverse biasing the junction disposed between the collector and the base with a second repair voltage (VCBR), for a repair time period (TR), so that the gain is at least party recovered; wherein VBER, VCBR and TR have the proportional relationship:
T
R∝(Δβ)2×exp[1/(Tam+Rth×1e×VCER], VCER=VBER+VCBR, and 1e=β×Ibr,
β is the normal current gain of the transistor, Δβ is the target recovery gain of the transistor in percentage, Tam is the ambient temperature in degrees K, Ibr is the repair current to the base in μ amps, Rth is the self-heating thermal resistance of the transistor in K/W, TR is the repair time period in seconds.
A bipolar transistor recovery arrangement comprises: a bipolar transistor including an emitter, a collector, and a base disposed between junctions at the emitter and the collector, the transistor having a current gain (β) that is degraded; a collector load circuit connected to the collector, an emitter circuit connected to the emitter, and a base bias circuit connected to the base and in parallel with the collector load circuit; and a gain recovery circuit connected to the base and in parallel with the base bias circuit, the gain recovery circuit including a current source connected in parallel with a current mirror for generating a repair current (Ibr) to the base during a repair time period (TR); wherein the VBER, VCBR and TR have the proportional relationship:
T
R∝(Δβ)2×exp[1/(Tam+Rth×1e×VCER], VCER=VBER+VCBR, and 1e=β×Ibr,
β is the normal current gain of the transistor, Δβ is the target recovery gain of the transistor in percentage, Tam is the ambient temperature in K, Ibr is the repair current to the base in p amps, Rth is the self-heating thermal resistance of the transistor in K/W, TR is in seconds.
A further embodiment of the method according to the invention includes monitoring the degradation, and then idling the transistor when the degradation reaches a preset threshold. In general, according to embodiments of the invention, higher values of Ibr and accordingly VBER result in shorter recovery times (repair times) TR
Further and still other embodiments of the invention will become more readily apparent when the detailed description is taken in conjunction with the following drawing, in which:
a) is a schematic circuit diagram of an npn transistor, a base bias circuit, a collector load circuit, an emitter circuit, a switch P0, sources of potential PD, VCC, IN, gnd, all according to the prior art;
a) is a schematic circuit diagram according to a first preferred circuit embodiment of the present invention, including a gain recovery circuit 100N with input signal GRC—b for the npn transistor Q0;
c) is a more detailed schematic circuit diagram of a preferred embodiment for the embodiment shown in
a) is a schematic circuit diagram (larger scale) of the gain recovery circuit 100N in
Preferred embodiments of the present invention will now be described in more detail with reference to the accompanying drawing figures.
The performance degradation caused by a high voltage reverse bias across the base-emitter junction can be significantly recovered by switching the degraded device into a repair mode in which a high forward current causes a high forward bias VBER and a low reverse bias VCBR for a suitable (e.g. short) period of time. “High” as used in this context for VBE means high for VBE in 6WL (low bias for VBE in 6WL Technology is approx. 0.81 volts). “Low” as used in this context for VCB means low for VCB in 6WL Technology (high bias for VCB in 6WL is approx. 4 volts.
As shown in the experimental data chart of
A first preferred embodiment of a method according to the present invention is shown in
According to the preferred embodiments of the methods and apparatus (e.g. circuits) according to the invention disclosed herein, various features of the invention are shown in the figures listed within respective parentheticals as set forth below. The particular values shown are for the BiCMOS6WL or BiCMOS8HP Technology of IBM.
Device repair bias conditions and timing (
Forward bias emitter-base junction by supplying the repair current Ibr to the base, so that emitter current is close to peak fT current density and Veb_repair=0.8V˜1.2V, and the collector-base junction is reverse biased at Vcb_repair=0.5V˜2V.
Repair times (Tr) ranging from one second to 100 seconds (depending on the repairing base current Ibr which affects both repair emitter current Ier and the voltages Veb—repair (VBER) and Vcb—repair (VCBR), as is well understood by those skilled in the art in view of the present specification and figures.
Ibr is within a range of several hundred μA to ensure the emitter current Ie is close to peak fT current. Preferably, 6WL:Ib, is in a range of approx. 10 μA to approx. 300 μA; 8HP: Ibr is in a range of approximately 100 μA to approximately 300 μA.
Add repair circuit blocks 100N, 100P into the normal function blocks in the bipolar device circuit arrangements, comprising emitter-bias blocks, base-bias blocks and collector-bias blocks.
During normal operations of the devices Q0, Q1, the repair blocks are isolated and do not affect normal operations of the devices Q0, Q1.
During a repair process (e.g. in power-on sequence) according to an embodiment of the invention, the respective repair block 100N, 100P is switched on, and the respective degraded bipolar device Q0, Q1 is then biased at the repair mode (Ibr, VBER, VCBR).
Add repair circuit blocks 100N, 100P into the arrangements with the normal function blocks in the bipolar device circuit arrangements, comprising emitter-bias blocks, base-bias blocks and collector-bias blocks.
During normal operations of the devices Q0, Q1, the repair blocks 100N, 100P do not operate and do not affect normal operation of the devices Q0, Q1.
Repair mode is enabled when the monitored device degradation exceeds a pre-determined level. For example, the degradation is monitored for device Q0 by means of the monitor 200N, and any decision that the degradation exceeds the predetermined level or threshold is performed in the controller 300N.
During a repair method (i.e. when the repair mode is triggered by the monitor and controller), the degraded bipolar device Q0, Q1 is then biased at the repair mode (Ibr, VBER, VCBR) and e.g. Ibr≅several hundred μA.
(1) Device repair during power-on sequence (
(2) On-demand device repair, started when device current gain becomes less than a pre-determined value (
Further detailed information for the circuit embodiments are described in the following Sections 1 and 2.
In order to facilitate the repair function, a current source is added to the base terminal of the device, as shown in
In the embodiment of
Q0-npn transistor BiCMOS6WL/8HP manufactured by IBM Corporation;
emitter circuit includes, for example, a resistor having the resistance value of several tens ohms; Collector load circuit includes, for example, a resistor having the resistance value of several kilo ohms;
P0 is a FET pMOSFET of BiCMOS6WL/8HP made by IBM; base bias circuit includes, for example, a current source capable of generating a current having a value (in a range from about 10 micro amps to about 100 micro amps);
Vcc is typically in a range of 3 volts to 4 volts;
GRC—b is a signal within a range of 0 volts to Vcc;
IN is a signal having the following range of values—several micro volts to several hundred micro volts; and
Gain Recovery Source 100N generates a repair current Ibr having a value of typically several hundred micro amps.
Techniques for manufacturing the devices and other components described in the present specification or shown in figures are well within the skill in the art in view of the present specification and figures, and need not be further discussed. See, for example, VLSI Technology, by S. M. SZE, (2d Edition, ISBN 0-07-062735-5).
b) shows an embodiment of the invention for a pnp connected to a gain recovery circuit 100P and other components as shown.
c) is a more detailed schematic circuit diagram of a preferred embodiment for the embodiment of the present invention shown in
In the embodiment of
The embodiments for a pnp transistor Q1 as shown in
During the normal operation of the circuits of
The details of the recovery circuit blocks 100N, 100P, are shown in
The inverter is any conventional semiconductor inverter, in the BiCMOS Technology, and should have the following parameters or characteristics: threshold voltage set at, for example, (Vcc/2).
As shown in
As shown in
The recovery (Δβ) of current gain degradation is a function of transistor internal temperature Tj and the time (TR), and generally following equation (1):
Where Δβ is in %, k is Boltzmann constant. Ea is the thermal recovery energy and τ is the recovery time constant and both Ea and τ are determined by the device materials and detailed structure.
The transistor internal temperature Tj can be raised by the self-heating effect claimed in this invention as equation (2).
T
j
=T
am
+R
th
×I
c
×V
ce, (2)
Where Tam is the ambient temperature and Ic the transistor collector current, and Vce is the voltage between collector and emitter. Rth is the device bipolar transistor thermal resistance and determined by the detailed device structure.
For a predetermined gain recovery (Δβ) value, the recovery time and the device forward active current and voltage has following relation,
Or by the base current Ib with current gain β,
In both equations (3) and (4), the device parameters such as A, k, Ea, τ, β and Rth can be readily determined by the semiconductor manufacturer based on the semiconductor technology (e.g. BiCMOS6WL) in which the bipolar transistor and associated circuits will be manufactured and those skilled in the art in view of the present specification and drawing figures. A, for example, is a recovery factor such as 10E-4 for IBM's 6WL pnp transistor.
As shown in equation (4), by increase the forward base current Ib, we can lower the recovery time TR.
In the example of FIG. 2) for pnp device in BiCMOS 6WL technology of IBM, τ=5 sec, Ea=0.2 eV, Rth=6000 K/W, it took 30 sec at recovery collector/emitter current of 3 mA to achieve 10% gain recover. If we double the recovery collector current or base current, the recovery time will be decrease to 5 sec. Every semiconductor technology has different parameters such as A, B (discussed below), Rth. A and Rth are constants and are not variable within a particular technology such as 6WL or 8HP. A and B can be determined experimentally or empirically by those skilled in the art in view of the present specification and figures. However, these calculations demonstrate, even more particularly, further preferred relationships applicable to this method and structure to achieve the gain recovery according to the present invention.
A more simplified relation between recovery time and active power for the device is:
T
R
=A×(Δβ)
2×exp[B/(Tam+Rth×Ie×Vce)], (5).
Where parameter Δβ is the percentage of the gain recovery, Tam is the ambient temperature, Ie is the forward emitter current in A, and Vce is the voltage in volt, Vce=Veb+Vbc, and Ie is the emitter current in Amp, Rth is the self-heating thermal resistance, in K/Watt. TR is the recovery time in seconds. The parameter A is the recovery factor, and B is related to the recovery thermal energy. Parameters A, B and Rth are determined by the detailed device structures, such as material, device geometry and package density. The inventors believe they can be readily determined by the device manufacturer and supplied to circuit designers in view of the present specification and figures.
In
A, B, and Rth are fixed constants for 6WL and the relationship (5), and can be determined empirically by those skilled in the art in vew of the present specification and figures.
While the present invention has been particularly shown and described with respect to preferred embodiments thereof, it will be understood by those skilled in the art that the foregoing and other changes in forms and details may be made without departing from the spirit and scope of the present invention. It is therefore intended that the present invention not be limited to the exact forms and details described and illustrated, but fall within the scope of the appended claims.