METHOD OF BLASTING PROCESS

Abstract

Disclosed is a blast processing method for removing a deposit adhered onto a surface of a ceramic heater formed of aluminum nitride by blowing a blasting material onto the surface. Abrasive grains made of silicon carbide or aluminum oxide and having a grain size of #400 to #800 are used as the blasting material, and a blast pressure as a pressure when the blasting material collides with the surface of the ceramic heater is set at 40 to 150 gf/cm2.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view showing a ceramic heater as a processing object for use in an embodiment of the present invention.

FIG. 2 is a side view showing a state of implementing blast processing for a surface of the ceramic heater.

FIG. 3 is a perspective view schematically showing a state of implementing the blast processing for the surface of the ceramic heater.

FIG. 4 is a schematic view showing a distribution range of a blasting material on the surface of the ceramic heater.

FIG. 5 is a schematic view showing a relationship between a moving route of blowing means for blowing the blasting material and the ceramic heater.

Claims

1. A blast processing method, comprising: blowing a blasting material that is abrasive grains made of silicon carbide or aluminum oxide and having a grain size of #400 to #800 onto the surface of the processing object while setting, at 40 to 150 gf/cm2, a blast pressure when the blasting material collides with the surface of the processing object,wherein the blasting material removes a deposition adhered onto a surface of a processing object formed of aluminum nitride.

2. The blast processing method according to claim 1, wherein the blast pressure is set at 60 to 100 gf/cm2.

3. The blast processing method according to claim 1, wherein a blowing amount of the blasting material per unit area on the surface of the processing object is set at 1.4 to 4.3 g/cm2.

4. The blast processing method according to claim 1, wherein a blowing amount of the blasting material per unit area on the surface of the processing object is set at 1.7 to 2.8 g/cm2.