Claims
- 1. In a method for fabricating nanolaminate structures having conducting and insulating layers, the improvement comprising:
forming an electrical contact with at least one conducting layer during or after deposition of the conducting and insulating layers.
- 2. The improvement of claim 1, wherein the forming of the electrical contact is carried out utilizing lithographic processing.
- 3. The improvement of claim 1, wherein the forming of the electrical contact is carried out to form a separate electrical contact with specific subsets of the conducting layers of the nanolaminate.
- 4. The improvement of claim 1, wherein forming of the electrical contact is carried out by:
depositing a layer of conducting material, patterning at least an area of the layer of conducting material, depositing a layer of insulating material on the layer of conducting material except in the patterned area so as to define a void in the layer of insulating material, and depositing a layer of conducting material on the layer of insulating material and in the void thereby producing an electric contact between the layers of conducting material.
- 5. The improvement of claim 1, additional including forming a number of electrical contacts with conducting layers of the nanolaminate structure to produce at least one interdigitated electrode.
- 6. The improvement of claim 6, additionally including providing a plurality of interdigitated electrodes on a plurality of nanolaminate structures.
- 7. A nanolaminate structure, comprising:
a number of conducting layers, a number of insulating layers, said conductive layers being intermediate adjacent insulating layers, and at least one separate electric contact operatively connected to at least one of said conducting layers.
- 8. The nanolaminate structure of claim 7, wherein said electric contact is operatively connected to a number of said conductive layers.
- 9. The nanolaminate structure of claim 7, additionally including a number of electric contacts operatively connected to a number of conducting layers.
- 10. The nanolaminate structure of claim 7, wherein said electric contact is of an interdigitated configuration.
- 11. The nanolaminate structure of claim 7, including a number of electrical conducting means defining a plurality of interdigitated electrodes.
- 12. A method for connecting individual conducting layers of a nanolaminated structure, comprising:
forming alternating layers of conducting and insulating layers, and during deposition of the conducting and insulating layer forming at least one electric contact layer so as to be in electrical contact with at least one conducting layer.
- 13. The method of claim 12, wherein forming at least one electric contact layer, is carried out utilizing lithographic processing.
Government Interests
[0001] The United States Government has rights in this invention pursuant to Contract No. W-7405-ENG-48 between the United States Department of Energy and the University of California for the operation of Lawrence Livermore National Laboratory.