Number | Name | Date | Kind |
---|---|---|---|
4138196 | Redman | Feb 1979 | |
4727471 | Driels et al. | Feb 1988 | |
4754327 | Lippert | Jun 1988 | |
4815819 | Mayhew et al. | Mar 1989 | |
4895431 | Tsujiuchi et al. | Jan 1990 | |
4993836 | Furuhashi et al. | Feb 1991 | |
5262867 | Kojima | Nov 1993 | |
5267042 | Tsuchiya et al. | Nov 1993 | |
5283640 | Tilton | Feb 1994 | |
5604529 | Kuga et al. | Feb 1997 | |
5659195 | Kaiser et al. | Aug 1997 | |
5678089 | Bacs, Jr. et al. | Oct 1997 |
Entry |
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Overview of MEMS Activities in the U.S. by C.H. Mastrangelo, Cnt. for Integrated Sensors and Circuits Dept. of Elec. Eng. and Comp. Science, U. of Mich., Ann Arbor, MI 48109-2122, U.S.A. pp. 1-10. |