Number | Date | Country | Kind |
---|---|---|---|
2737209 | Aug 1977 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
2618565 | Nicholson | Nov 1952 | |
3503798 | Yoshioka et al. | Mar 1970 | |
3520722 | Scott | Jul 1970 | |
3928662 | Kaneko et al. | Dec 1975 |
Entry |
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Milek, John T., Silicon Nitride for Microelectronic Applications, 1971. |