Number | Name | Date | Kind |
---|---|---|---|
4397075 | Fatula, Jr. et al. | Aug 1983 | |
4853348 | Tsubouchi et al. | Aug 1989 | |
4896293 | McElroy | Jan 1990 | |
5017504 | Nishimura et al. | May 1991 | |
5064777 | Dhong et al. | Nov 1991 | |
5112771 | Ishii et al. | May 1992 | |
5213999 | Sparks et al. | May 1993 | |
5432365 | Chin et al. | Jul 1995 | |
5449630 | Lur et al. | Sep 1995 | |
5627092 | Alsmeier et al. | May 1997 | |
5629226 | Ohtsuki | May 1997 | |
5662768 | Rostoker | Sep 1997 | |
5843820 | Lu | Dec 1998 |
Entry |
---|
Ghandhi, "VLSI Fabrication Principles" 2.sup.nd ed, pub, by John Wiley & Sons, Inc, New York, pp. 741-742. |