Number | Name | Date | Kind |
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4172005 | Muraoka et al. | Oct 1979 | |
5228878 | Komatsu | Jul 1993 | |
5394006 | Liu | Feb 1995 | |
5401676 | Lee | Mar 1995 | |
5506476 | Lee et al. | Apr 1996 |
Number | Date | Country |
---|---|---|
174087 | Dec 1991 | TWX |
Entry |
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Busta "Vacuum microelectronics-1992" Journal of Micromechanics and Microengineering vol. 2, No. 2, pp. 54-56 (1992). |