Number | Date | Country | Kind |
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4-121802 | May 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4851295 | Brors | Jul 1989 | |
5130266 | Huang et al. | Jul 1992 |
Entry |
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"Simplified Production Process of WSi.sub.2 by CVD," IBM Technical Disclosure Bulletin, vol. 31, No. 6, Nov. 1988, pp. 308-309. |
Yamazaki et al: Advanced Metallization for ULSI Applications, Materials Research Society, 1992, pp. 299-304, "CVD-WSi.sub..chi. Barrier Technology for Blanket W Contact Filling". |