METHOD OF FORMING CARBON FIBERS USING METAL-ORGANIC CHEMICAL VAPOR DEPOSITION

Abstract

A method of forming carbon fibers at a low temperature below 450° C. using an organic-metal evaporation method is provided. The method includes: heating a substrate and maintaining the substrate at a temperature of 200 to 450° C. after loading the substrate into a reaction chamber; preparing an organic-metal compound containing Ni; forming an organic-metal compound vapor by vaporizing the organic-metal compound; and forming carbon fibers on the substrate by facilitating a chemical reaction between the organic-metal compound vapor and a reaction gas containing ozone in the reaction chamber.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings in which:

FIG. 1 is a schematic drawing illustrating a process of forming carbon fibers according to an embodiment of the present invention;

FIGS. 2A and 2B are respectively a scanning electron microscope (SEM) image and a cross-sectional view of carbon fibers grown on a substrate using the process of forming carbon fibers of FIG. 1;

FIG. 3 is a Raman spectrum of the carbon fibers shown in FIG. 2;

FIGS. 4A through 4I are cross-sectional views illustrating a method of forming carbon fibers according to an embodiment of the present invention.

Claims

1. A method of forming carbon fibers comprising: heating a substrate and maintaining the substrate at a temperature of 200 to 450° C. after loading the substrate into a reaction chamber;preparing an organic-metal compound containing Ni;forming an organic-metal compound vapor by vaporizing the organic-metal compound; andforming carbon fibers on the substrate by facilitating a chemical reaction between the organic-metal compound vapor and a reaction gas containing ozone in the reaction chamber.

2. The method of claim 1, wherein the organic-metal compound is a material selected from the group consisting of Ni(C5H5)2, Ni(CH3C5H4), Ni(C5H7O2)2, Ni(C11H19O2)2, Ni(C7H16NO), and Ni(C7H17NO)2.

3. The method of claim 2, wherein the organic-metal compound is provided as a solution comprising n-heptane as a solvent.

4. The method of claim 3, wherein the concentration of the organic-metal compound in n-heptane is 0.05 to 0.5M.

5. The method of claim 4, wherein the vaporization temperature of the organic-metal compound is maintained at 140 to 200° C.

6. The method of claim 1, wherein ozone is supplied at a flow rate of 150 g/m3 or greater.

7. The method of claim 1, wherein the carbon fibers are grown vertically.

8. The method of claim 1, wherein the substrate is a glass substrate, a sapphire substrate, a plastic substrate, or a silicon substrate.

9. Carbon fibers formed using the method of claim 1.

10. A method of manufacturing a field emission device, comprising: providing a substrate;sequentially forming a stacked structure comprising a cathode disposed on a surface of the substrate, an insulating layer disposed on a surface of the cathode opposite the substrate, and a gate electrode disposed on a surface of the insulating layer opposite the cathode;forming at least one emitter hole that exposes the cathode by patterning the insulating layer and the gate electrode;coating a photoresist on the entire exposed surface of the stacked structure comprising the cathode, the insulating layer, and the gate electrode;removing the portion of the photoresist coated on the portion of the cathode in the emitter hole;maintaining the temperature of the substrate at 200 to 450° C.;preparing an organic-metal compound that includes Ni;forming an organic-metal compound vapor by vaporizing the organic-metal compound;forming carbon fibers in the emitter hole on the cathode by facilitating a chemical reaction between the organic-metal compound vapor and a reaction gas containing ozone in the emitter hole; andremoving the photoresist from the stacked structure.

11. The method of claim 10, wherein the organic-metal compound is a material selected from the group consisting of Ni(C5H5)2, Ni(CH3C5H4), Ni(C5H7O2)2, Ni(C11H19O2)2, Ni(C7H16NO), and Ni(C7H17NO)2.

12. The method of claim 11, wherein the organic-metal compound is provided as a solution comprising n-heptane as a solvent.

13. The method of claim 12, wherein the concentration of the organic-metal compound in the n-heptane is 0.05 to 0.5M.

14. The method of claim 13, wherein the vaporization temperature of the organic-metal compound is maintained at 140 and 200° C.

15. The method of claim 10, wherein ozone is supplied at a flow rate of 150 g/m3 or greater.

16. The method of claim 10, wherein the carbon fibers are grown vertically.

17. The method of claim 10, wherein the substrate is a glass substrate, a sapphire substrate, a plastic substrate, or a silicon substrate.

18. A field emission device formed using the method of claim 10.