This is a divisional application of copending Application No. 09/045,853, filed Mar. 23, 1998.
Number | Name | Date | Kind |
---|---|---|---|
5170092 | Tomii et al. | Dec 1992 | |
5214347 | Gray | May 1993 | |
5246879 | Hsu et al. | Sep 1993 | |
5266155 | Gray | Nov 1993 | |
5382185 | Gray et al. | Jan 1995 | |
5457355 | Fleming et al. | Oct 1995 | |
5584740 | Hsu et al. | Dec 1996 | |
5587588 | Kim | Dec 1996 | |
5769679 | Park et al. | Jun 1998 | |
5779514 | Cheng et al. | Jul 1998 | |
5780318 | Hirano et al. | Jul 1998 | |
5864147 | Konuma | Jan 1999 | |
5910701 | Takemura | Jun 1999 | |
6036566 | Baldi et al. | Mar 2000 |
Entry |
---|
Fleming, J.G., et al. “Fabrication and Testing of Vertical Metal Edge Emitters with Well Defined Gate to Emitter Separation,” J. Vac. Sci. Technol., B14(3), May/Jun. 1996, pp. 1958-1962. |
Hsu et al., “Conformal Chemical Beam Deposition of Thin Metal Film for Fabricating High Density Trench Capacitor Cells,” Appl. Phys. Lett., 63(2), Jul. 12, 1993, pp. 159-161. |
Chou, et al., “Imprint Lithography with 25-Nanometer Resolution,” Science, vol. 272, Apr. 5, 1996, pp. 85-87. |
Number | Date | Country | |
---|---|---|---|
09/045853 | Mar 1998 | US |