Number | Date | Country | Kind |
---|---|---|---|
1-337171 | Dec 1989 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4445125 | Scifres et al. | Apr 1984 | |
4445126 | Tsukada | Apr 1984 | |
4554561 | Daniele et al. | Nov 1985 | |
4796038 | Allen et al. | Jan 1989 | |
4945423 | Takanashi et al. | Jul 1990 |
Entry |
---|
"Dynamic Micromechanics on Silicon: Techniques and Devices", IEEE Trans. on Electron Devices, vol. ED-25, No. 10, Oct., 1978. |