Number | Date | Country | Kind |
---|---|---|---|
2708792 | Mar 1977 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
3860783 | Schmidt et al. | Jan 1975 | |
3988564 | Garvin et al. | Oct 1976 |
Entry |
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P. G. Gloersen, "Masking for Ion Beam Etching", Solid State Technology, Apr. 1976, pp. 68-73. |
P. G. Gloersen, "Ion-Beam Etching", J. Vac. Sci. Tech., vol. 12 (1975), pp. 28-35. |
C. M. Melliar-Smith, "Ion Etching for Pattern Delineation", J. Vac. Sci. Tech., vol. 13, pp. 1008-1022 (1976). |