Number | Date | Country | Kind |
---|---|---|---|
4-208213 | Aug 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4855953 | Tsukamoto et al. | Aug 1989 | |
5198386 | Gonzalez | Mar 1993 | |
5258321 | Shimizu et al. | Nov 1993 | |
5273928 | Tani | Dec 1993 |
Number | Date | Country |
---|---|---|
0076856 | May 1982 | JPX |
58-186 | Jan 1983 | JPX |
0175844 | Oct 1983 | JPX |
0287258 | Dec 1986 | JPX |
63-302536 | Dec 1988 | JPX |
0307743 | Dec 1988 | JPX |
0214142 | Aug 1989 | JPX |
Entry |
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Isolation Process Using Polysilicon Buffer Layer for Scaled MOS/VSLI, Yu-Pin Han and Ring Ma, The Electrochemical Society Extended Abstract, 1984. |