Claims
- 1. A method of manufacturing a transformer comprising the steps of:
- arranging a plurality of first wirings each having first and second ends along a desired virtual line on a semiconductor substrate so that said first wirings intersect with said virtual line;
- forming an inter-layer insulating film which covers a substrate surface on which said first wirings are formed;
- forming holes through said insulating film which correspond to contact points at each said first and second ends of said first wirings, said virtual line being disposed between said contact points;
- applying a photoresist at least over said holes;
- removing portions of the photoresist at points corresponding to the contact points by exposure and development;
- arranging a plurality of second-layer wirings each having first and second ends so that each of said second layer wirings intersects said virtual line, said first ends of said second layer wirings being respectively connected to said first ends of said first wirings at said contact points, said second ends of said second layer wirings being connected to second ends of different first wirings;
- providing an air gap between said first wirings and said second-layer wirings;
- providing a magnetic core within said air gap; and
- forming primary and secondary electrodes at predetermined points.
- 2. A method of manufacturing an inductor comprising the steps of:
- arranging a plurality of first wirings each having first and second ends along a desired virtual line on a semiconductor substrate so that said first wirings intersect with said virtual line;
- forming an inter-layer insulating film which covers a substrate surface on which said first wirings are formed;
- forming holes through said insulating film which correspond to contact points at each said first and second ends of said first wirings, said virtual line being disposed between said contact points;
- applying a photoresist over said holes;
- removing portions of the photoresist at points corresponding to the contact points by exposure and development; and
- arranging a plurality of second-layer wirings each having first and second ends so that each of said second layer wirings intersects said virtual line, said first ends of said second layer wirings being respectively connected to said first ends of said first wirings at said contact points, said second ends of said second layer wirings being connected to second ends of different first wirings;
- providing an air gap between said first wirings and said second-layer wirings; and
- providing a magnetic core within said air gap.
Priority Claims (2)
Number |
Date |
Country |
Kind |
3-129669 |
May 1991 |
JPX |
|
3-129673 |
May 1991 |
JPX |
|
Parent Case Info
This is a continuation of application Ser. No. 07/866,357, filed on Apr. 10, 1992, which was abandoned upon the filing hereof.
US Referenced Citations (4)
Foreign Referenced Citations (4)
Number |
Date |
Country |
3418379 |
Nov 1984 |
DEX |
3423139 |
Jan 1985 |
DEX |
3346659 |
Jul 1985 |
DEX |
3927181 |
Mar 1990 |
DEX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
866357 |
Apr 1992 |
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