Claims
- 1. A method of making a sensing cell for a chemically sensitive probe for measuring the properties of biological fluids in vivo, comprising the steps of
- producing a wafer comprising an ISFET with spaced source and drain regions spanned by an ion-sensitive gate portion,
- covering said source and drain regions and gate portion of said ISFET with a temporary first layer of soluble material,
- covering said temporary first layer with a second layer of relatively insoluble material,
- defining an opening in said second layer directly above said gate region, and
- removing said temporary first layer which covers the source and drain regions and the gate portion by introducing a solvent through said opening to dissolve said first layer, thus forming a sensing chamber encompassing the source and drain regions as well as the gate portion of said ISFET.
- 2. The method of claim 1, wherein said second layer is electrically conductive.
- 3. The method of claim 1, further comprising the step of forming an infusion through-hole through the wafer leading into said sensing chamber,
- whereby a known fluid can be introduced through said through-hole into said chamber for calibration in vivo.
- 4. The method of claim 1, wherein said opening formed in said second layer is narrower than said chamber formed by removing said first layer.
- 5. The method of claim 1, further comprising the step of covering said cell with a layer of hydrogel to promote biological compatability.
Priority Claims (1)
Number |
Date |
Country |
Kind |
8001420 |
Mar 1980 |
NLX |
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Parent Case Info
This is a division, of application Ser. No. 242,351, filed Mar. 10, 1981, now U.S. Pat. No. 4,478,222, issued Oct. 23, 1984.
US Referenced Citations (6)
Foreign Referenced Citations (2)
Number |
Date |
Country |
0015075 |
Sep 1980 |
EPX |
0036171 |
Sep 1981 |
EPX |
Divisions (1)
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Number |
Date |
Country |
Parent |
242351 |
Mar 1981 |
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