Number | Name | Date | Kind |
---|---|---|---|
4048042 | Quinn | Sep 1977 | |
4383132 | Bentuelsen | May 1983 | |
4425382 | Tajima | Jan 1984 | |
4503284 | Minnick et al. | Mar 1985 | |
4581291 | Bongianni | Apr 1986 |
Entry |
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R. V. Stuart, Vacuum Technology, Thin Films, and Sputtering, Academic Press, New York, 1983, pp. 130-131. |
F. A. Lowenheim, Electroplating, McGraw-Hill Book Co., New York, 1978, pp. 416-420. |