Claims
- 1. A method of manufacturing a semiconductor device having a bipolar transistor in a silicon substrate on an insulating film, which comprises
- a step of injecting a first impurity into a first region of said silicon substrate,
- a step of removing a portion of said first region,
- a step of forming an insulating layer on a remaining portion of said first region,
- a step of forming poly Si on said insulating layer,
- a step of injecting said first impurity to said poly Si and then applying heat treatment,
- a step of opening a contact hole to a second region of said silicon substrate, and
- a step of injecting a second impurity to said first region and said second region and then applying heat treatment.
- 2. A method of manufacturing a semiconductor device having a bipolar transistor in a silicon substrate on an insulating film, which comprises
- a step of injecting a first impurity to a first region of said silicon substrate,
- a step of removing a portion of said first region and a second region,
- a step of forming an insulating layer on a remaining portion of said first predetermined region,
- a step of forming poly Si on said insulating layer and said second region,
- a step of injecting said first impurity to said first region and then applying heat treatment, and
- a step of injecting a second impurity to said first region and said second region and then applying heat treatment.
Priority Claims (5)
Number |
Date |
Country |
Kind |
4-160263 |
Apr 1992 |
JPX |
|
4-112714 |
May 1992 |
JPX |
|
4-160264 |
May 1992 |
JPX |
|
4-160265 |
May 1992 |
JPX |
|
4-162306 |
May 1992 |
JPX |
|
REFERENCE TO RELATED APPLICATION
This application is a divisional of application Ser. No. 08/319,150, filed on Oct. 6, 1994, now U.S. Pat. No. 5,629,217 which is a divisional of application Ser. No. 08/245,767 filed May 18, 1994, now U.S. Pat. No. 5,580,797 which is a divisional of Ser. No. 08/051,765, filed Apr. 26, 1993 and now abandoned.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
5460982 |
Bertagnolli et al. |
Oct 1995 |
|
Divisions (3)
|
Number |
Date |
Country |
Parent |
319150 |
Oct 1994 |
|
Parent |
245767 |
May 1994 |
|
Parent |
51765 |
Apr 1993 |
|