Number | Name | Date | Kind |
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4509990 | Vasudev | Apr 1985 | |
4837172 | Mizuno et al. | Jun 1989 | |
4885257 | Matsushita | Dec 1989 |
Number | Date | Country |
---|---|---|
0162828 | Dec 1981 | JPX |
0180028 | Oct 1983 | JPX |
0161726 | Jul 1986 | JPX |
Entry |
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Jianmig Li, "A New Semiconductor Substrate Formation by Hydrogen Ion Implantation into Silicon", Chinese Journal of Semiconductors, vol. 9, No. 4, 1988. |