Number | Date | Country | Kind |
---|---|---|---|
7-210986 | Jul 1995 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5141459 | Zimmerman | Aug 1992 | |
5203731 | Zimmerman | Apr 1993 | |
5334908 | Zimmerman | Aug 1994 | |
5720642 | Hattori | Feb 1998 |
Number | Date | Country |
---|---|---|
4310604 | Jan 1994 | DEX |
6-36682 | Feb 1994 | JPX |
6-310043 | Nov 1994 | JPX |
92 02030 | Feb 1992 | WOX |
Entry |
---|
S. Zimmerman, et al., "A Fabrication Method for the Integration of Vacuum Microelectronic Devices", IEEE Transactions on Electron Devices, 38 (1991) Oct. No. 10, pp. 2294-2303. |