Claims
- 1. A method of manufacturing a liquid crystal display panel comprising steps of:forming terminal electrodes by selectively forming a first metal film on a transparent substrate; forming an inter-layer insulating film with a terminal contact hole reaching the first metal film; selectively forming a second metal film, which is a single-layer film of aluminum or an alloy thereof or a laminate film including an uppermost layer of aluminum or an alloy thereof, in the terminal contact hole; and forming a protective insulating film with a terminal contact hole reaching the second metal film.
- 2. A method of manufacturing of a liquid crystal display panel comprising steps of:forming terminal electrode by selectively forming a first metal film on a transparent substrate; forming an inter-layer insulating film with a terminal contact hole reaching the first metal film ; selectively forming a second metal film which is a single-layer film of aluminum or an alloy thereof or a laminate film including an uppermost layer of aluminum or an alloy thereof and an insulating film which is an aluminum oxide film or a laminate film of aluminum oxide and aluminum hydroxide thereon in the terminal contact hole, and forming a protective insulating film and an insulating film with a terminal contact hole reaching the second metal film.
- 3. A method of manufacturing of a liquid crystal display panel comprising steps of:forming terminal electrodes by selectively forming a first metal film on a transparent substrate; forming an inter-layer insulating film with a terminal contact hole reaching the first metal film ; and selectively forming a second metal film, which is a single-layer film of aluminum or an alloy thereof or a laminate film including an uppermost layer of aluminum or an alloy thereof, in the terminal contact hole, forming an insulating film, which is an aluminum oxide film or a laminate film of aluminum oxide and aluminum hydroxide, to cover the surfaces of uppermost layer lead lines and electrodes.
Priority Claims (1)
Number |
Date |
Country |
Kind |
10-008718 |
Jan 1998 |
JP |
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Parent Case Info
This is a divisional of appplication Ser. No. 09/233,961 (Confirmation Number not yet assigned) filed Jan. 20, 1999 now U.S. Pat. No. 6,259,495, the disclosure of which is incorporated herein by reference.
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