Claims
- 1. A manufacturing method of magnetic recording medium comprising the steps of forming a ferromagnetic thin film on a non-magnetic substrate, forming a hard carbon film on the ferromagnetic thin film, exposing the hard carbon film surface to glow discharge plasma by mixture gas of organic gas containing nitrogen and inorganic gas to form a modified layer, and forming a lubricant layer on the modified layer.
- 2. A manufacturing method of magnetic recording medium comprising the steps of forming a ferromagnetic thin film on a non-magnetic substrate, forming a hard carbon film on the ferromagnetic thin film, exposing the hard carbon film surface to glow discharge plasma by mixture gas of nitrogen involving organic gas, inorganic gas and hydrocarbon gas to form a modified layer, and forming a lubricant layer on the modified layer.
- 3. A manufacturing method of magnetic recording medium of claim 2, wherein the modified layer is formed by exposing to glow discharge plasma of a mixture gas of which ratio of nitrogen involving organic gas/hydrocarbon gas is gradually increased.
- 4. A manufacturing method of magnetic recording medium of claims 1 or 2, wherein the inorganic gas is at least one type selected from the group consisting of hydrogen (H.sub.2), helium (He), argon (Ar), nitrogen (N.sub.2), and ammonia (NH.sub.3).
- 5. A manufacturing method of magnetic recording medium of claims 1 or 2, wherein the partial pressure of the nitrogen involving organic gas when forming the modified layer is 20 to 90% of the total gas pressure.
Priority Claims (3)
Number |
Date |
Country |
Kind |
4-198588 |
Jul 1992 |
JPX |
|
5-85920 |
Apr 1993 |
JPX |
|
5-91014 |
Apr 1993 |
JPX |
|
Parent Case Info
This is a divisional of application Ser. No. 08/095,008, filed Jul. 23, 1993.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
4889767 |
Yokoyama et al. |
Dec 1989 |
|
Foreign Referenced Citations (8)
Number |
Date |
Country |
0538855 |
Apr 1993 |
EPX |
62-58416 |
Mar 1987 |
JPX |
63-251920 |
Oct 1988 |
JPX |
1-184722 |
Jul 1989 |
JPX |
2-126417 |
May 1990 |
JPX |
2-126418 |
May 1990 |
JPX |
4102225 |
Apr 1992 |
JPX |
4-143623 |
May 1992 |
JPX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
95008 |
Jul 1993 |
|