Number | Name | Date | Kind |
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4763177 | Paterson | Aug 1988 | |
4803176 | Bower | Feb 1989 | |
4978629 | Komori et al. | Dec 1990 | |
5010025 | Solomon | Apr 1991 |
Number | Date | Country |
---|---|---|
54-102980 | Aug 1979 | JPX |
62-136877 | Jun 1987 | JPX |
2-105576 | Apr 1990 | JPX |
3-6060 | Jan 1991 | JPX |
Entry |
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Wolf, S., et al., Silicon Processing, vol. I, Lattice Press, 1986, pp. 243-262. |