METHOD OF MANUFACTURING AN INFORMATION RECORDING MEDIUM

Abstract

A method of manufacturing an information recording medium includes an applied layer forming process that applies a fluid material onto a concave/convex pattern formation surface of a substrate where a concave/convex pattern is formed to form an applied layer and a smoothing process that smoothes the surface of the substrate by rubbing a smoothing member against the applied layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

These and other objects and features of the present invention will be explained in more detail below with reference to the attached drawings, wherein:

FIG. 1 is a cross-sectional view of a magnetic disk;

FIG. 2 is a cross-sectional view of a processed object on which concave/convex patterns have been formed;

FIG. 3 is a cross-sectional view of the processed object in a state where etching of a recording layer has been completed to form concave/convex patterns;

FIG. 4 is a cross-sectional view of the processed object in a state where the protective layer has been formed to cover the concave/convex patterns;

FIG. 5 is a cross-sectional view of the processed object in a state where a resin layer has been formed to cover the concave/convex patterns (i.e., the protective layer);

FIG. 6 is a cross-sectional view of the processed object and a burnishing apparatus while a smoothing process is being carried out on the resin layer;

FIG. 7 is a plan view of the processed object and the burnishing apparatus while the smoothing process is being carried out on the resin layer;

FIG. 8 is a cross-sectional view of the processed object in a state where the smoothing process has been completed;

FIG. 9 is a cross-sectional view of another magnetic disk;

FIG. 10 is a cross-sectional view of yet another magnetic disk;

FIG. 11 is a cross-sectional view of the processed object immediately after resin material has been applied (i.e., the resin layer has been formed) so as to cover the concave/convex patterns (i.e., the protective layer);

FIG. 12 is a cross-sectional view of the processed object in a state where the smoothing process on the resin layer has been completed;

FIG. 13 is a cross-sectional view of yet another magnetic disk;

FIG. 14 is a cross-sectional view of a processed object in a state where concave/convex patterns have been formed;

FIG. 15 is a cross-sectional view of a processed object in a state where the resin layer has been formed to cover concave/convex patterns;

FIG. 16 is a cross-sectional view of yet another magnetic disk;

FIG. 17 is a perspective view showing the appearance of another burnishing apparatus and a processed object;

FIG. 18 is a bottom view of a burnish head; and

FIG. 19 is a bottom view of another burnish head.

Claims

1. A method of manufacturing an information recording medium, comprising: an applied layer forming process that applies a fluid material onto a concave/convex pattern formation surface of a substrate where a concave/convex pattern is formed to form an applied layer; anda smoothing process that smoothes the surface of the substrate by rubbing a smoothing member against the applied layer.

2. A method of manufacturing an information recording medium according to claim 1, wherein a first hardening process, which hardens the applied layer so as to lower the fluidity of the fluid material compared to when the fluid material is applied, is carried out before the smoothing process, andin the smoothing process, the surface of the applied layer is polished using a dry polishing member as the smoothing member to smooth the surface of the substrate.

3. A method of manufacturing an information recording medium according to claim 2, wherein the applied layer is semihardened in the first hardening process and a second hardening process that further hardens the applied layer is carried out after the smoothing process has been carried out.

4. A method of manufacturing an information recording medium according to claim 2, wherein during the smoothing process, the surface of the applied layer is polished to expose protruding end surfaces of convex parts in the concave/convex pattern formed on the substrate from the applied layer.

5. A method of manufacturing an information recording medium according to claim 1, wherein in the smoothing process, the surface of the substrate is smoothed by rubbing the smoothing member onto the applied layer that is yet to be hardened and a third hardening process that hardens the applied layer is carried out after the smoothing process has been carried out.

6. A method of manufacturing an information recording medium according to claim 1, wherein in the applied layer forming process, the applied layer is formed by applying the fluid material onto the substrate where at least protruding end surfaces of convex parts of the concave/convex pattern are covered by a protective layer.

7. A method of manufacturing an information recording medium according to claim 1, wherein the applied layer forming process is carried out by carrying out a resin layer forming process that forms a resin layer as the applied layer by applying a resin material as the fluid material onto the concave/convex pattern formation surface.