Method of manufacturing arc tube

Information

  • Patent Grant
  • 6672923
  • Patent Number
    6,672,923
  • Date Filed
    Friday, July 7, 2000
    24 years ago
  • Date Issued
    Tuesday, January 6, 2004
    20 years ago
Abstract
A method of manufacturing an arc tube having a light emitting tube portion, a first pinch seal portion, and a second pinch seal portion, all formed on a quartz glass tube. The first and second pinch seal portions are disposed on both sides of the light emitting tube portion. The quartz glass is provided almost vertically with the first pinch seal portion down. A thermal insulating plate is provided in a boundary position between the light emitting tube portion and a portion to be pinch-sealed in an outer peripheral space of the quartz glass tube. Liquid nitrogen is jetted from a cooling nozzle provided obliquely below the light emitting tube portion toward the same, thereby cooling the light emitting tube portion. The portion to be pinch-sealed is heated with a burner, and pinch-sealed with a pincher immediately thereafter.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to a method of manufacturing an arc tube to be used as a light source such as a headlamp for vehicles.




2. Description of the Related Art




In recent years, an arc tube has often been used as a light source such as a headlamp for vehicles because it can carry out high-intensity irradiation.




As shown in

FIG. 5

, an arc tube to be used as the headlamp for vehicles generally comprises an arc tube body


114


made of quartz glass in which pinch seal portions


114




b




1


and


114




b




2


are provided on both sides of a light emitting tube portion


114




a


forming a discharge space


112


, and a pair of electrode assemblies


116


A and


116


B pinch-sealed with the pinch seal portions


114




b




1


and


114




b




2


such that tip portions thereof are protruded toward the discharge space


112


.




The arc tube is manufactured by forming the light emitting tube portion


114




a


on a quartz glass tube and sequentially forming the pinch seal portions


114




b




1


and


114




b




2


on both sides thereof. At each pinch-sealing step, a portion to be pinch-sealed is pinch-sealed with a pincher immediately after it is heated with a burner. Consequently, the pinch seal portions


114




b




1


and


114




b




2


are formed.




As shown in

FIGS. 6A and 6B

, it is necessary to fill the discharge space


112


with a liquefied inert gas at a second pinch-sealing step (that is, a step of forming the second pinch seal portion


114




b




2


on a quartz glass tube


114


′ provided with the light emitting tube portion


114




a


and the first pinch seal portion


114




b




1


). Therefore, the light emitting tube portion


114




a


is cooled. As shown in

FIG. 6A

, the cooling operation has conventionally been carried out by jetting liquid nitrogen from a cooling nozzle


104


provided on the side of the light emitting tube portion


114




a


toward the light emitting tube portion


114




a


in a state in which a thermal insulating plate


102


is provided in a boundary position between the light emitting tube portion


114




a


and the portion


114




b




2


′ to be pinch-sealed in the outer peripheral space of the quartz glass tube


114


′ provided almost vertically with the first pinch seal portion


114




b




1


provided in a lower part.




In the conventional manufacturing method, however, the cooling nozzle


104


is provided laterally in the vicinity of the lower part of the thermal insulating plate


102


. Therefore, the liquid nitrogen is vaporized in the early stage through heat transfer from the thermal insulating plate


102


and a burner


106


. Consequently, the light emitting tube portion


114




a


is cooled insufficiently. Depending on the circumstances, the liquefied inert gas filled in the discharge space


112


is vaporized (expanded), and the light emitting tube portion


114




a


bursts immediately after the pinch-sealing operation using a pincher


108


so that the inert gas leaks as shown in FIG.


6


B.




SUMMARY OF THE INVENTION




The present invention has been made in consideration of the above-mentioned circumstances and has an object to provide a method of manufacturing an arc tube which can increase the cooling efficiency of the light emitting tube portion through the jet of the liquid nitrogen, thereby preventing the light emitting tube portion from bursting at the second pinch-sealing step.




The object of the present invention is achieved by devising the arrangement of the cooling nozzle.




The present invention provides a method of manufacturing an arc tube including pinch seal portions on both sides of a light emitting tube portion in which a second pinch seal portion is formed on a quartz glass tube provided with the light emitting tube portion and a first pinch seal portion, the method comprising the steps of:




providing the quartz glass tube almost vertically with the first pinch seal portion positioned in a lower part and providing a thermal insulating plate in a boundary position between the light emitting tube portion and a portion to be pinch-sealed in an outer peripheral space of the quartz glass tube;




jetting liquid nitrogen from a cooling nozzle provided obliquely below the light emitting tube portion toward the light emitting tube portion, thereby cooling the light emitting tube portion in this state, and heating the portion to be pinch-sealed with a burner; and




pinch-sealing the portion to be pinch-sealed with a pincher immediately thereafter.




If the “cooling nozzle” is provided obliquely below the light emitting tube portion and serves to jet the liquid nitrogen toward the light emitting tube portion, a specific structure including the number of the cooling nozzles to be provided and a liquid nitrogen jet angle is not restricted particularly.




With the above-mentioned structure, in the method of manufacturing an arc tube according to the present invention, liquid nitrogen is jetted from the cooling nozzle provided obliquely below the light emitting tube portion toward the light emitting tube portion in order to cool the light emitting tube portion at the second pinch-sealing step. Therefore, the cooling nozzle is set somewhat apart from the thermal insulating plate. In that case, moreover, the thermal insulating plate as well as the light emitting tube portion can be cooled through the jet of the liquid nitrogen to be carried out obliquely upward. Consequently, the cooling nozzle is not easily influenced by heat transferred from the thermal insulating plate and the burner. For this reason, the liquid nitrogen jetted from the cooling nozzle is vaporized slowly so that the light emitting tube portion is fully cooled. Accordingly, the liquefied inert gas filled in the discharge space is not vaporized (expanded) for a while after the pinch-sealing operation. Consequently, the light emitting tube portion can be prevented from bursting to leak the inert gas.




According to the present invention, thus, the cooling efficiency of the light emitting tube portion which is obtained through the jet of the liquid nitrogen can be increased at the second pinch-sealing step. Consequently, it is possible to prevent the light emitting tube portion from bursting to leak the inert gas.




In the present invention, furthermore, the liquid nitrogen is jetted obliquely upward. Therefore, the thermal insulating plate as well as the light emitting tube portion can be cooled. Consequently, it is possible to prevent the thermal insulating plate itself from being deteriorated.




According to the present invention, moreover, the burner and the cooling nozzle are positioned sufficiently apart from each other. Therefore, it is possible to prevent the burner from being cooled through the cooling nozzle to reduce a thermal efficiency thereof.




With the above-mentioned structure, if a portion of the thermal insulating plate in the vicinity of the outer periphery of a quartz glass tube is formed like an upward taper, a cooling space formed around the light emitting tube portion can be reduced and the liquid nitrogen can be prevented from being scattered in such a direction as not to contribute to the cooling operation of the light emitting tube portion. Consequently, the cooling efficiency can be enhanced still more.




While the specific structure of the cooling nozzle is not particularly restricted as described above, it is preferable, for the following reasons, that the liquid nitrogen jet angle is set upwardby 10° to 60° with respect to a horizontal plane.




More specifically, the cooling nozzle is heated through heat transfer from the thermal insulating plate at an angle of less than 10° so that the light emitting tube portion is often cooled insufficiently. On the other hand, if the angle exceeds 60°, the liquid nitrogen is jetted upward from a clearance between the thermal insulating plate and the quartz glass tube. Consequently, the heating temperature of the lower end of the portion to be pinch-sealed is dropped so that insufficient melting operation is often carried out. The angle is not set to 10 to 60° but preferably 20° to 50°, and more preferably


30


to 45°.




With the above-mentioned structure, it is preferable, for the following reasons, that the inside diameter of the tip portion of the cooling nozzle should be set to 3 mm or less and the distance between the tip surface of the cooling nozzle and the outer surface of the light emitting tube portion should be set to 40 mm or less.




When the inside diameter of the tip portion of the cooling nozzle exceeds 3 mm, a large amount of liquid nitrogen is thus jetted in an unnecessary direction other than the light emitting tube portion. Consequently, the liquid nitrogen is wasted. In the case in which the inside diameter of the tip portion of the cooling nozzle is set to 3 mm or less and the distance between the tip surface of the cooling nozzle and the outer surface of the light emitting tube portion exceeds 40 mm, a portion of the quartz glass tube against which the liquid nitrogen hits is greatly changed due to a fluctuation in the discharge pressure of a gas cylinder for supplying the liquid nitrogen. Consequently, the light emitting tube portion is often cooled insufficiently.




With the above-mentioned structure, in the case in which the liquid nitrogen is repeatedly jetted through the cooling nozzle in a plurality of stations, it is preferable that the liquid nitrogen jet angle of the cooling nozzle in each of the stations should be set to have an almost equal value in order to cool the light emitting tube portion efficiently.




With the above-mentioned structure, in the case in which heating operation is repeatedly carried out through the burner in a plurality of stations, it is preferable, for the following reasons, that the heating power of the burner in each of the stations should be set to be gradually increased every movement to a new one of the stations.




That is, it is preferable that the heating power of the burner should be maximized immediately before the pinch-sealing operation in order to carry out the pinch-sealing operation reliably. If the heating power is increased from the beginning, the quartz glass tube is unnecessarily melted and the cooling efficiency of the light emitting tube portion is reduced.











BRIEF DESCRIPTION OF THE DRAWINGS





FIG. 1

is a side sectional view showing a discharge valve incorporating an arc tube to be an object of a manufacturing method according to an embodiment of the present invention;





FIGS. 2A

to


2


C are side sectional views showing a second pinch-sealing step of the manufacturing method;





FIG. 3

is an enlarged view showing the portion III in

FIG. 2B

;





FIG. 4

is a plan view showing an index table on which the second pinch-sealing step is carried out;.





FIG. 5

is a sectional view showing a main part, illustrating the general structure of the arc tube; and





FIGS. 6A and 6B

are views similar to

FIG. 2

, illustrating a conventional example.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS




A preferred embodiment of the present invention will be described below with reference to the drawings.





FIG. 1

is a side sectional view showing a discharge valve


10


incorporating an arc tube


16


to be an object of a manufacturing method according to an embodiment of the present invention.




As shown, the discharge valve


10


is a light source valve attached to a headlamp for vehicles and comprises an arc tube unit


12


extended in a longitudinal direction and an insulating plug unit


14


for fixedly supporting the rear end of the arc tube unit


12


.




The arc tube unit


12


is provided with an arc tube


16


and a shroud tube


18


surrounding the arc tube


16


which are formed integrally.




The arc tube


16


includes an arc tube body


20


obtained by processing a quartz glass tube, and a pair of longitudinal electrode assemblies


22


A and


22


B buried in the arc tube body


20


.




In the arc tube body


20


, an almost elliptical spherical light emitting tube portion


20




a


is formed in the center, and pinch seal portions


20




b




1


and


20




b




2


are formed on both sides longitudinally. An almost elliptical spherical discharge space


24


extended in the longitudinal direction is formed in the light emitting tube portion


20




a,


and is filled with mercury, a xenon gas and a metal halide.




The electrode assemblies


22


A and


22


B are coupled and fixed to bar-shaped tungsten electrodes


26


A and


26


B through lead wires


28


A and


28


B and molybdenum foils


30


A and


30


B, and are pinch-sealed with the arc tube body


20


in the pinch seal portions


20




b




1


and


20




b




2


. In that case, both the molybdenum foils


30


A and


30


B are buried in the pinch seal portions


20




b




1


and


20




b




2


, while the tungsten electrodes


26


A and


26


B are protruded into the discharge space


24


with the tip portions thereof opposed to each other on the both longitudinal sides.




The arc tube


16


is manufactured by forming the light emitting tube portion


20




a


on the quartz glass tube and sequentially forming the pinch seal portions


20




b




1


and


20




b




2


on both sides thereof.





FIGS. 2A

to


2


C are a side sectional view showing a second pinch-sealing step (that is, a step of forming the second pinch seal portion


20




b




2


on a quartz glass tube


20


′ provided with the light emitting tube portion


20




a


and the first pinch seal portion


20




b




1


), and

FIG. 3

is an enlarged view showing a III portion.

FIG. 4

is a plan view showing an index table


50


on which the second pinch-sealing step is carried out.




At the second pinch-sealing step, as shown in

FIGS. 2A and 2B

, a portion


20




b




2


′ to be pinch-sealed in the quartz glass tube


20


′ provided almost vertically with the first pinch seal portion


20




b




1


positioned in a lower part is heated through a burner


52


and is pinch-sealed with a pincher


54


immediately thereafter as shown in

FIG. 2C

so that the pinch seal portion


20




b




2


is formed.




At the second pinch-sealing step, it is necessary to fill the discharge space


24


with a liquefied xenon gas (inert gas). Therefore, the light emitting tube portion


20




a


is cooled. This cooling operation is carried out by jetting liquid nitrogen from a plurality of cooling nozzles


58


toward the light emitting tube portion


20




a


with a thermal insulating plate


56


provided in a boundary position between the light emitting tube portion


20




a


and the portion


20




b




2


′ to be pinch-sealed in the outer peripheral space of the quartz glass tube


20


′.




As shown in

FIG. 3

in detail, the thermal insulating plate


56


is formed of an annular member made of stainless steel, and a portion of the thermal insulating plate


56


in the vicinity of the outer periphery of the quartz glass tube


20


′ is formed like an upward taper. More specifically, the thermal insulating plate


56


includes an outer peripheral plane portion


56




a


formed horizontally, an upward taper portion


56




b


conically rising from the inner peripheral edge of the outer peripheral plane portion


56




a


, and an inner peripheral plane portion


56




c


extended horizontally from the upper end of the upward taper portion


56




b


toward the inner peripheral side and provided with an insertion hole


56




d


for inserting the quartz glass tube


20


′ in a central part thereof. The outer peripheral plane portion


56




a


is formed comparatively thickly, the upward taper portion


56




b


gradually reduces a thickness from a lower end toward an upper end, and the inner peripheral plane portion


56




c


is formed comparatively thinly.




Each cooling nozzle


58


is provided obliquely below the light emitting tube portion


20




a


, and a liquid nitrogen jet angle θ is set upward by 10 to 60° (for example, approximately 45°) with respect to a horizontal plane. Moreover, an inside diameter


d


of the tip portion of the cooling nozzle


58


is set to 3 mm or less (for example, approximately 1.5 mm), and a distance L between the tip surface of the cooling nozzle


58


and the outer surface of the light emitting tube portion


20




a


is set to 40 mm or less (for example, approximately 15 mm). Furthermore, a liquid nitrogen discharge pressure of the cooling nozzle


58


is set to 0.3 to 1.5 kg/m


2


(for example, approximately 1 kg/m


2


).




The burner


52


is provided on both sides of the portion


20




b




2


′ to be pinch-sealed in the quartz glass tube


20


′, and serves to irradiate a flame toward the portion


20




b




2


′ to be pinch-sealed. In that case, the burner


52


is provided with a lower end surface thereof positioned below the upper surface of the inner peripheral plane portion


56




c


of the thermal insulating plate


56


such that the flame reliably reaches the lower end of the portion


20




b




2


′ to be pinch-sealed.





FIG. 3

shows, in a two-dotted chain line, the arrangement (on one of sides) of a thermal insulating plate


102


, a cooling nozzle


104


and a burner


106


at a conventional second pinch-sealing step.




As shown in

FIG. 4

, the operation for jetting liquid nitrogen from the cooling nozzle


58


and the heating operation of the burner


52


are repeatedly carried out in a plurality of stations allocated onto the index table


50


.




More specifically, the liquid nitrogen is jetted through the cooling nozzle


58


from a station S


1


earlier by several stations than a pinch seal station S


6


at which the pinch-sealing operation is carried out to the pinch seal station S


6


, that is, in the stations S


1


to S


6


. In each of the stations, the arrangement of the cooling nozzle


58


is almost the same, and the liquid nitrogen jet angle of the cooling nozzle


58


and the liquid nitrogen discharge pressure thereof are set to have almost equal values, respectively.




On the other hand, the heating operation of the burner


52


is carried out from the station S


3


at which the liquid nitrogen has been started to be jetted to the station S


5


immediately before the pinch seal station S


6


, that is, in the stations S


3


to S


5


. In each of the stations, the arrangement of the burner


52


is almost the same, while the heating power of the burner


52


is set to be gradually increased every movement to a new one of the stations, that is, S


3


→S


4


→S


5


.




Next, the function and effect of the present embodiment will be described.




In the present embodiment, liquid nitrogen is jetted from the cooling nozzle


58


provided obliquely below the light emitting tube portion


20




a


toward the light emitting tube portion


20




a


in order to cool the light emitting tube portion


20




a


at the second pinch-sealing step. Therefore, the cooling nozzle


58


is set somewhat apart from the thermal insulating plate


56


. In that case, furthermore, the thermal insulating plate


56


as well as the light emitting tube portion


20




a


can be cooled through the jet of the liquid nitrogen carried out obliquely upward. Consequently, the cooling nozzle


58


is not easily influenced by heat transferred from the thermal insulating plate


56


and the burner


52


. For this reason, the liquid nitrogen jetted from the cooling nozzle


58


is vaporized slowly so that the light emitting tube portion


20




a


is fully cooled. Accordingly, the liquefied inert gas filled in the discharge space


24


is not vaporized (expanded) for a while after the pinch-sealing operation. Consequently, the light emitting tube portion


20




a


can be prevented from bursting to leak the inert gas.




In that case, according to the present embodiment, the liquid nitrogen jet angle θ of the cooling nozzle


58


is set upward by 10° to 60° with respect to the horizontal plane. Therefore, the light emitting tube portion


20




a


is not insufficiently cooled, and the cooling nozzle


58


is not so influenced by the heat transferred from the thermal insulating plate


56


. In addition, the liquid nitrogen is jetted upward through the cooling nozzle


58


from the clearance between the thermal insulating plate


56


and the quartz glass tube


20


′, thereby dropping the heating temperature on the lower end of the portion


20




b




2


′ to be pinch-sealed. Thus, insufficient melting can be prevented.




According to the present embodiment, thus, the cooling efficiency of the light emitting tube portion


20




a


which is obtained through the jet of the liquid nitrogen can be increased at the second pinch-sealing step. Consequently, it is possible to prevent the light emitting tube portion


20




a


from bursting to leak the inert gas.




In the present embodiment, furthermore, the liquid nitrogen is jetted obliquely upward. Therefore, the thermal insulating plate


56


as well as the light emitting tube portion


20




a


can be cooled. Consequently, it is possible to prevent the thermal insulating plate


56


itself from being deteriorated.




According to the present embodiment, moreover, the burner


52


and the cooling nozzle


58


are positioned sufficiently apart from each other. Therefore, it is possible to prevent the burner


52


from being cooled through the cooling nozzle


58


to reduce the thermal efficiency thereof.




In the present embodiment, furthermore, the portion of the thermal insulating plate


56


in the vicinity of the outer periphery of the quartz glass tube


20


′ is formed like an upward taper. Therefore, the cooling space formed around the light emitting tube portion


20




a


can be reduced to be limited on the inner peripheral side of the upward taper portion


56




b


and the liquid nitrogen can be prevented from being scattered in such a direction as not to contribute to the cooling operation of the light emitting tube portion


20




a


. Consequently, the cooling efficiency can be enhanced still more.




As shown in a two-dotted chain line in

FIG. 3

, when a burner


106


is provided in such a height as not to interfere with a thermal insulating plate


102


at the conventional second pinch-sealing step, a position in the burner


106


where a flame is irradiated is much higher than the position of the lower end of the portion


20




b




2


′ to be pinch-sealed. In order to sufficiently heat the portion


20




b




2


′ to be pinch-sealed down to


25


the lower end thereof, therefore, the expanse of a flame should be utilized. In order to implement this operation, it has been necessary to irradiate a flame with high heating power by positioning the burner


106


apart from the portion


20




b




2


′ to be pinch-sealed. For this reason, the flame has been irradiated in a direction which is not necessary for heating the portion


20




b




2


′ to be pinch-sealed. Correspondingly, energy has been wasted. Moreover, such high heating power has caused an increase in the amount of heat transfer to a cooling nozzle


104


through the thermal insulating plate


102


. Correspondingly, a cooling efficiency has been reduced.




On the other hand, in the present embodiment, the portion of the thermal insulating plate


56


in the vicinity of the outer periphery of the quartz glass tube


20


′ is formed like an upward taper. Therefore, the burner


52


can be provided such that a lower end surface thereof is positioned below the upper surface of the inner peripheral plane portion


56




c


of the thermal insulating plate


56


in the outer peripheral side space of the upward taper portion


56




b


of the thermal insulating plate


56


. Consequently, it is not necessary to utilize the expanse of the flame differently from the conventional example. Thus, the burner


52


can be provided in proximity to the portion


20




b




2


′ to be pinch-sealed. Therefore, even if the flame is not irradiated with very high heating power, the portion


20




b




2


′ to be pinch-sealed can be sufficiently heated down to the lower end thereof. Consequently, it is possible to prevent the energy from being wasted and to enhance the cooling efficiency through the cooling nozzle


58


.




In the present embodiment, the inside diameter


d


of the tip portion of the cooling nozzle


58


is set to 3 mm or less. Therefore, it is possible to prevent a large amount of liquid nitrogen from being jetted in an unnecessary direction other than the light emitting tube portion


20




a


to waste the liquid nitrogen. In addition, the distance between the tip surface of the cooling nozzle


58


and the outer surface of the light emitting tube portion


20




a


is set to 40 mm or less. Consequently, it is possible to prevent the light emitting tube portion


20




a


from being cooled insufficiently due to a great change in the portion of the quartz glass tube


20


′ against which the liquid nitrogen hits through a fluctuation in the discharge pressure of the gas cylinder for supplying the liquid nitrogen.




In the present embodiment, the liquid nitrogen is repeatedly jetted through the cooling nozzle


58


in a plurality of stations S


1


to S


6


. The liquid nitrogen jet angle of the cooling nozzle


58


in each of the stations S


1


to S


6


is set to have an almost equal value. Therefore, the light emitting tube portion


20




a


can be cooled efficiently.




In the present embodiment, moreover, the heating operation of the burner


52


is repeatedly carried out in a plurality of stations S


3


to S


5


. The heating power of the burner


52


in each of the stations S


3


to S


5


is set to be gradually increased every movement to a new one of the stations, that is, S


3


→S


4


→S


5


. Therefore, the heating power of the burner


52


is maximized immediately before the pinch-sealing operation. Consequently, the pinch-sealing operation can be carried out reliably. Furthermore, it is possible to prevent the quartz glass tube


20


′ from being unnecessarily melted as in the case in which the heating power is increased from the beginning.




In the present embodiment, the arc tube


16


of the discharge valve


10


to be attached to a headlamp for vehicles has been described. For other uses, similarly, the manufacturing method according to the present embodiment can be employed to obtain the same function and effect of the present embodiment.



Claims
  • 1. A method of manufacturing an arc tube, the arc tube including a light emitting tube portion, a first pinch seal portion, and a second pinch seal portion, wherein the light emitting tube portion, the first pinch seal portion, and the second pinch seal portion are formed on a quartz glass tube, and wherein the first pinch seal portion and the second pinch seal portion are disposed on both sides of the light emitting tube portion, said method comprising the steps of:providing the quartz glass tube substantially vertically with the first pinch seal portion down; providing a thermal insulating plate in a boundary position between the light emitting tube portion and a portion to be pinch-sealed in an outer peripheral space of the quartz glass tube; jetting liquid nitrogen from a cooling nozzle provided obliquely below the light emitting tube portion toward the light emitting tube portion, thereby cooling the light emitting tube portion, and heating the portion to be pinch-sealed with a burner; and pinch-sealing the portion to be pinch-sealed with a pincher immediately thereafter, wherein the thermal insulating plate includes an upward taper at a portion in the vicinity of an outer periphery of the quartz glass tube.
  • 2. The method of manufacturing an arc tube according to claim 1, wherein the thermal insulating plate includes an inner peripheral plane portion facing the quartz glass tube, andwherein the burner is disposed with a lower end surface thereof positioned below an upper surface of the inner peripheral plane portion of the thermal insulating plate.
  • 3. The method of manufacturing an arc tube according to claim 1, wherein a liquid nitrogen jet angle of the cooling nozzle is set upward by 10° to 60° with respect to a horizontal plane.
  • 4. The method of manufacturing an arc tube according to claim 1, wherein an inside diameter of a tip portion of the cooling nozzle is set to 3 mm or less and a distance between a tip surface of the cooling nozzle and an outer surface of the light emitting tube portion is set to 40 mm or less.
  • 5. The method of manufacturing an arc tube according to claim 1, wherein the liquid nitrogen is repeatedly jetted through the cooling nozzle in a plurality of stations and the liquid nitrogen jet angle of the cooling nozzle in each of the stations is set to have the substantially same value.
  • 6. The method of manufacturing an arc tube according to claim 1, wherein the heating operation is repeatedly carried out with the burner in stations and a heating power of the burner in each of the stations is set to be gradually increased every movement to a new one of the stations.
Priority Claims (1)
Number Date Country Kind
P 11-193007 Jul 1999 JP
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