Method of manufacturing electronic device using ink-jet method

Abstract

The present invention relates to a manufacturing method which uses an ink jet method for forming various kinds of thin films in an electronic device such as an organic EL panel or an organic thin film transistor and ink suitably used in the method. The manufacturing method manufactures an electronic device such as an organic layer which forms a pixel portion of a hole injection layer or the like of an organic EL panel or an active layer of an organic thin film transistor using ink composition which is formed by adding tertiary-alcohol into ink which uses water as a main solvent. As the tertiary-alcohol, 3-methyl-1-butyn-3-ol may be used. An addition quantity of alcohol with respect to ink is set to a value which falls within a range from approximately 25wt % to 40wt %.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing the volatile property of water which is a main solvent of hole injection layer forming ink, tertiary-butylalcohol (tertiary-butanol), xylene and butylbenzoate which is applicable as a light emitting layer of an ink solvent;

FIG. 2 is a view showing the volatile property of water, tertiary-butylalcohol and an aqueous solution containing 30 wt % of tertiary-butylalcohol;

FIG. 3 is a view showing the volatile property of a tertiary-butylalcohol aqueous solution when an initial liquid droplet weight is set to 0.25 mg;

FIG. 4 is a cross-sectional view for explaining a structural example of the vicinity of one pixel of an organic EL panel which is manufactured in an example 1;

FIG. 5 is a view showing an example of the circuit constitution of the organic EL panel to which the present invention is applied;

FIG. 6 is a view showing an example of the cross-sectional structure of an organic thin film transistor to which the present invention is applied;

FIG. 7 is a schematic view for explaining the manner of forming a conductive layer which constitutes the organic thin film transistor explained in FIG. 6 by an ink-jet method using ink of the present invention;

FIG. 8 is a view showing the molecular structure for explaining one example of a polymer material which constitutes an electrode material of the organic thin film transistor explained in FIG. 6;

FIG. 9 is a view showing the molecular structure for explaining one example of a polymer material which forms a semiconductor layer PSI of the organic thin film transistor explained in FIG. 6;

FIG. 10 is a view showing the molecular structure for explaining one example of a polymer material which constitutes an insulation material GI of the organic thin film transistor explained in FIG. 6; and

FIG. 11A to FIG. 11C are schematic views for explaining steps in which ink clogging is generated in a nozzle of an ink jet device.

Claims

1. A manufacturing method of an electronic device which realizes the predetermined functional structure which is formed by stacking or arranging in parallel a plurality of active layers or stacking and arranging in parallel a plurality of active layers, wherein at least one layer of the plurality of active layers is formed by applying water ink which is prepared by adding tertiary-alcohol to a material which constitutes the active layer using an ink jet method.

2. A manufacturing method of an electronic device according to claim 1, wherein the tertiary-alcohol is 3-methyl-1-butyn-3-ol.

3. A manufacturing method of an electronic device according to claim 2, wherein an addition quantity of the tertiary-alcohol falls within a range from 25 wt % to 40 wt % with respect to the ink.

4. A manufacturing method of an electronic device, wherein the electronic device is an organic EL panel which is formed by arranging a large number of organic EL elements on an insulation substrate, the manufacturing method comprising the steps of forming first electrodes for respective pixels on the insulation substrate; andforming an organic material which forms a plurality of pixel portion forming layers made of an organic material which contribute to the emission of light to the first electrodes;forming second electrodes such that the second electrodes cover the pixel portion forming layers; wherebyat least one layer of the pixel portion forming layers is formed by applying water ink to which tertiary-alcohol is added by an ink jet method.

5. A manufacturing method of an electronic device according to claim 4, wherein the tertiary-alcohol is 3-methyl-1-butyn-3-ol.

6. A manufacturing method of an electronic device according to claim 5, wherein an addition quantity of the tertiary-alcohol falls within a range from 25 wt % to 40 wt % with respect to the ink.

7. A manufacturing method of an electronic device according to claim 5, wherein at least one layer of the pixel portion forming layers is a hole injection layer.

8. A manufacturing method of an electronic device, wherein the electronic device is an organic thin film transistor which forms source electrodes, drain electrodes, semiconductor layers and gate electrodes on an insulation substrate, wherein at least any one of the source electrodes, the drain electrodes and the gate electrodes is formed by applying water ink into which tertiary-alcohol is added by an ink jet method.

9. A manufacturing method of an electronic device according to claim 8, wherein the tertiary-alcohol is 3-methyl-1-butyn-3-ol.

10. A manufacturing method of an electronic device according to claim 9, wherein an addition quantity of the tertiary-alcohol falls within a range from 25 wt % to 40 wt % with respect to the ink.