METHOD OF MANUFACTURING INK JET RECORDING HEAD

Abstract

A method of manufacturing an ink jet recording head includes the steps of: forming an adhesive layers and the side walls of a flow path on a substrate; pasting a dry film, which is a part of a flow path forming member, on the side walls; and forming discharge ports in the layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic perspective view showing an ink jet recording head manufactured by an embodiment of the method of manufacturing an ink jet recording head of the present invention.

FIG. 2 is a schematic sectional view of the ink jet recording head manufactured by the embodiment of the method of manufacturing an ink jet recording head of the present invention.

FIGS. 3A, 3B, 3C, 3D, 3E, 3F and 3G are schematic sectional views showing an example of the method of manufacturing an ink jet recording head of the present invention.

FIGS. 4A, 4B, 4C, 4D, 4E and 4F are schematic sectional views showing the processes of a conventional method of manufacturing an ink jet recording head.

FIGS. 5A, 5B and 5C are schematic sectional views showing an example of the method of manufacturing an ink jet recording head of the present invention.

FIGS. 6A, 6B, 6C and 6D are schematic sectional views showing an example of the method of manufacturing an ink jet recording head of the present invention.

Claims

1. A method of manufacturing an ink jet recording head including a substrate equipped with an energy generating element for generating energy to discharge ink, and a supply port for supplying the ink to said energy generating element; a discharge port for discharging the ink, said discharge port formed in the substrate; and a flow path forming member for forming a flow path to make said discharge port communicate with said supply port, said method comprising the steps of: forming side walls of said flow path on said substrate;pasting a layeron said side walls, said layerbeing a part of said flow path forming member; andforming said discharge port in said dry film.

2. The method of manufacturing an ink jet recording head according to claim 1, wherein said layer is made of a photosensitive material, andsaid discharge port is formed by exposing and developing said photosensitive material.

3. The method of manufacturing an ink jet recording head according to claim 1, wherein an adhesive layer is formed between said flow path forming member and said substrate.

4. The method of manufacturing an ink jet recording head according to claim 3, wherein said step of forming said adhesive layer and said side walls of said flow path includes the steps of:laminating an adhesive material for forming said adhesive layer on said substrate;laminating a photosensitive material containing a photosensitive resin on said adhesive material and performing exposure and development to form said side walls of said flow path; andpatterning said adhesive material using said side walls as masks to form said adhesive layer.

5. The method of manufacturing an ink jet recording head according to claim 3, wherein said adhesive material contains a polyether amide resin.

6. The method of manufacturing an ink jet recording head according to claim 3, wherein said adhesive material is formed of a cured material of an epoxy resin.

7. The method of manufacturing an ink jet recording head according to claim 3, wherein said patterning is performed by dry etching.

8. The method of manufacturing an ink jet recording head according to claim 3, wherein said step of forming said adhesive layer and said side walls of said flow path includes the steps of: laminating an adhesive material having photosensitivity for forming said adhesive layer on said substrate;laminating a photosensitive material for forming said side walls of said flow path on said adhesive material; andpatterning said adhesive material and said photosensitive material all at one time to form said adhesive layer and said side walls.

9. The method of manufacturing an ink jet recording head according to claim 3, wherein said adhesive material is a photosensitive material including a polyether amide resin.

10. The method of manufacturing an ink jet recording head according to claim 3, wherein said adhesive material is a photosensitive material including an epoxy resin.

11. The method of manufacturing an ink jet recording head according to claim 1, wherein said layer formed with the discharge port is formed of a material having the same composition as those of said side walls.