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96201571 | Jun 1996 | EP |
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3530441 | Ovshinsky | Sep 1970 | |
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5502315 | Chua et al. | Mar 1996 | |
5835396 | Zhang | Nov 1998 | |
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WO 9013921 | Nov 1990 | WO |
Entry |
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“Resistless High Resolution Optical Lithography on Silicon”, by N. Kramer et al, 1995 American Institute of Physics, Appl. Phys. Lett. 67 (20), Nov. 13, 1995, pp. 2989-2991. |