The present invention relates generally to the assembly of sensing devices, and more particularly to the packaging of fluid condition sensors such as for the sensing of synthetic or natural petroleum fluids.
U.S. Provisional Application No. 60/419,404, (entitled “Machine Fluid Sensor and Method”; filed Oct. 18, 2002) (hereby incorporated by reference) discloses improved machine fluid sensors and methods. There is a need for the ability to package sensing devices so that they can withstand their operating conditions. Exemplary applications in which these sensors may be used in engines in general, automobiles, heavy machinery, military equipment, airplane parts, oil drilling, exploration and production well logging, oil refining, pipeline and quality control applications, marine transportation, sub-sea exploration and aerospace related equipment, or any other fluid containing application. In general, sensors for these applications will include very small components that need to be able to withstand harsh operating environment conditions. The ability to assemble such devices efficiently using automated materials handling equipment is also important.
In general, the present invention meets the above needs by providing an improved method that generally includes the steps of:
providing a coated or uncoated sensor element having an exposed sensing surface;
attaching the sensor element to a platform so that the exposed sensing surface is spaced from the platform; and
optionally applying a protective layer over the platform and/or sensor while maintaining the exposed sensing surface.
A highly preferred sensor of the present invention includes a resonator, and more preferably a tuning fork resonator.
Among other advantages, the present invention affords the ability to provide improved sensor assemblies for a number of different applications. The sensor assemblies of the present invention thus preferably include at least one and more preferably a combination of two or more of the following:
Accordingly, it can be seen that the present invention provides a solution for a number of competing technological challenges; notably, for example, the preparation of an assembly in which a sensor having a free portion with a sensing surface is incorporated onto a platform, components of the sensor are physically shielded from harsh operating conditions, the requisite space is maintained between the free portion of the sensor and the platform, and the sensing surface of the sensor remains exposed for sensing.
a-3b illustrate (with side sectional views) of a sensor of the present invention, shown coupled with another component and sharing a common platform, and also including an optional protective layer;
a-5d illustrate (with side sectional views) a sequence of steps employed for applying a protective layer to components of a sensor in accordance with the present invention, in which a consumable barrier is employed;
a-6e illustrate (with side sectional views) a sequence of steps employed for assembling another sensor in accordance with the present invention;
a-8d illustrate (with side sectional views) a sequence of steps employed for assembling yet another sensor in accordance with the present invention.
The present invention is predicated upon the discovery of methods for assembling a sensor that includes a sensing element that requires exposure over at least a portion of its outer surface to ambient conditions. More particularly, the present invention is predicated upon the discovery of methods for assembling a fluid sensor that includes a resonator sensing element that requires exposure over at least a portion of its outer surface to the fluid it is sensing.
One preferred method of the present invention generally includes the steps of:
providing a coated or uncoated sensor element having an exposed sensing surface;
attaching the sensor element to a platform so that the exposed sensing surface is spaced from the platform; and
optionally applying a protective layer over the platform and/or sensor while maintaining the exposed sensing surface.
In a particularly preferred embodiment, which is illustrated herein by description of a tuning fork resonator as the sensing element, a coated or uncoated tuning fork resonator is provided and has tines that are free to resonate upon application of an input signal (e.g., a varying frequency input signal). The resonator is attached to a platform in a manner that maintains the tines spaced from the platform. Optionally, a protective layer is applied over the resonator (other than over the tines) and the platform. It should be appreciated that even though the present invention is illustrated with reference to a tuning fork resonator (e.g., having two, three or more tines), the invention is not so limited. For example, the features herein may be employed with respect to any of a number of types of sensors, including for example, cantilevers, unimorphs, bi-morphs, membrane resonators, torsional resonators, or other mechanical resonators. The invention may also have suitable application with respect to thickness shear mode resonators, surface acoustic wave devices, pressure sensing devices, or ultrasonic transducers.
Examples of resonators and the manner of using them for sensing characteristics of a fluid are taught, for example, in U.S. Pat. Nos. 6,336,353 and 6,182,499, hereby expressly incorporated by reference.
The structure of the conductive path and the contact is not critical, and it is possible to combine the two into a single structure. For example, it is possible that the conductive path may include a wire that is attached to an electrode of the resonator. Alternatively, using techniques common in the manufacture of semiconductor devices, a via may be formed in the base platform 16 and filled with a wire or conductive metal. The contact may be a wire. It may also be a conductive trace applied by a suitable metallization process (e.g., plating, physical vapor deposition, chemical vapor deposition, plasma deposition, coating, spraying, or the like). It may also be possible to laminate with or without an adhesive.
Though
In
In another embodiment, an assembly including a resonator, such as the assembly in
Also shown in
Secondary components may be included on the common platform with the resonator. Besides temperature sensors (e.g. thermistors, RTDs, semiconductor bandgap or the like), other sensors may be utilized. Beside ASICs, other more general integrated circuits may be used. Also, integrated circuits that combine the functionality several devices or sensors may be used; for example, an integrated circuit that measures temperature as well operates the resonator may be suitable. A variety of passive and/or active components may be used to assist in the operation of the integrated circuit and/or resonator. For example, resistors (e.g. thin film resistors) and capacitors (e.g. ceramic capacitors) may be utilized as passive components. Examples of active components include amplifiers and/or filters. Also suitable for a use as a secondary component is a field programmable gate array. The conductive path may also be considered another device that may be included on the common platform with the resonator. In addition, a calibration unit may be utilized. Of course, various combinations of these other devices may also be used on a common platform with the resonator.
In a preferred embodiment, the electrical connection between the resonator and the integrated circuit as short as possible to help lessen signal distortions, interferences and parasitic effect that may affect measurement accuracy.
In both
The protective layer 128 may be any suitable protective layer. For example, it may be a coating that is sprayed, brushed or otherwise applied over the assembly; it may also include an overmolded plastic layer, a layer that is laminated, or combinations of two or more of coatings, overmolded layers, or laminated layers may also be employed.
It is found that in instances where it is desired to employ a protective layer, and the need remains to maintain the free portion of the resonator exposed to ambient, there is a need to selectively apply the protective layer to the assembly so that components needing protection from harsh environments will be coated, while still keeping the free portion of the resonator exposed. Also, the protective layer may be selectively applied to the one or more components on the assembly. For example, the protective layer may be selectively applied to the temperature sensor (item 130 in
In order to accomplish this, any of a number of suitable selective application techniques may be employed, such as the employment of a removable protective barrier to prevent protective layer materials from contacting the free portion of the resonator. The removable protective barrier is thus positioned over the assembly to block the portions of the assembly requiring the protective layer from the portions that do not require the layer. The protective layer is then applied and the barrier is removed.
The protective barrier may take any suitable configuration, but preferably is selected from a re-usable barrier or a consumable barrier. For example, it might be possible to employ a photoresist over a portion of the assembly, selectively remove portions thereof, apply the protective material and then remove remaining photoresist.
a-5d illustrate a sequence of steps that may be employed, pursuant to which the removable protective barrier is a consumable barrier. In
In yet another embodiment it may be possible to employ a hybrid approach to the approach of
It is preferable that any consumable barrier material that is used be relatively inert to the material of the resonator and any associated hardware so that no damage arises as a result of the method. In this regard, any of a number of different materials may be employed as the consumable layer. For example, the material of the consumable barrier may be a material that can be dissolved, decomposed or otherwise broken down into particles for removal from the volume of space between the resonator and any resulting protective layer. Thus, the consumable barrier material may be selected from polymers (synthetic, biological, thermoplastic, thermoset, or combinations thereof), starches, waxes, salts or other dissolvable crystals, low melting point metals, or another sacrificial material that is capable of withstanding in its solid state the processing conditions for applying the protective layer, and thereafter being removable from the assembly without physically deforming or otherwise contaminating the resonator.
Turning now to the embodiment shown in
According to
Turning now to
In
Thereafter, the resulting assembly can be further handled (e.g., for placement on a common platform with an ASIC, for placement on an ASIC (as in
As discussed in the above, in certain embodiments of the present invention it is preferable that a spacing be maintained between the free portion of any resonator and any adjacent structure. The amount of such spacing is not critical, and may vary depending upon the nature of the particular application. However, in the context of a preferred embodiment employing a tuning fork resonator, in order to help avoid the potential for electrical interference with the operation of the resonator, it is preferred that the spacing be at least one width of a tine of the tuning fork.
In any of the embodiments discussed herein, it is also possible that one or more additional structures are added to the assembly in order to help improve performance or functionality of the resulting device. For example, in one embodiment, the assembly includes a well or other suitable passage that is in direct fluid communication with the resonator and into which a calibration fluid can be introduced for the purpose of calibrating the sensor. It is also contemplated that the assembly may include a structure that substantially envelops the resonator for assisting to preserve electrical characteristics. For example, a wire mesh 25 or other like cover may be provided about the resonator as a Faraday cage, as illustrated schematically in
It should be appreciated that the functions that are described herein may be performed as part of a single integrated package, or they may be spread over a plurality of different components that may or may not be supported by a common platform.
Further, the present invention also contemplates the incorporation of one or more additional sensors apart from the resonator sensors described herein. For example, one embodiment contemplates the inclusion in an assembly of a sensor or other device for monitoring temperature, such as a thermistor, an RTD or other such temperature sensor (
It should be recognized that the present invention contemplates not only the methods employed for fabricating the assemblies of the present invention, but also the assemblies themselves, independent of the methods employed for fabrication. Thus the present invention contemplates sensor assemblies that include a resonator having a free portion with a sensing surface is incorporated onto a platform, wherein components of the sensor are physically shielded from harsh operating conditions, a spacing is maintained between the free portion of the resonator and the platform, and the sensing surface of the resonator is exposed for sensing.
The assemblies of the present invention may also be provided with suitable hardware for securing the assembly to another component, such as hardware for securing the assembly in an automotive vehicle engine or within a conduit, tank, or other structure for carrying a fluid.
It should also be recognized that even if not described in connection with one of the above embodiments, it is possible to combine steps from one of the embodiments shown with the other embodiments shown. For example, for each of the embodiments, it is contemplated that a protective layer may be applied over at least a portion of the resulting assemblies. This can be done by overmolding, coating or other art-disclosed techniques for protecting delicate hardware from the effects of intended operating conditions. Additionally, even if not shown, each of the embodiments might be further assembled onto a platform alone or with other components using art-disclosed attachment techniques (e.g., via welding, adhesive bonding, wire bonding or the like).
It should also be recognized that single layers shown herein may be split into additional layers to form more than the number of layers shown, or combined with other layers to form less than the number of layers shown. All such variations are contemplated within the scope of the present invention.
Further, the disclosure herein of a particular shape or orientation of a component is not intended as limiting. Though it is expected that many embodiments will employ relatively thin and flat structures, the components may also be fabricated or arranged so that the resulting structure has a curvature, a relatively thick profile, or a combination thereof (e.g., an assembly including a resonator and protective carrier structure that has a ratio of its largest to its smallest dimension of about 1:1 to about 4:1).
Finally, the omission herein in any particular embodiment of any discussion of electrical connections or other hardware for signally connecting the assemblies herein with other electronic components is not intended as limiting. It should be recognized that a variety of art-disclosed hardware configurations may be employed in each instance, such as the use of wires, traces, conductive metal filled vias, combinations thereof or the like.
As discussed above, the sensor may be a mechanical resonator, such as is disclosed for example in U.S. Pat. No. 7,210,332 incorporated by reference herein. The mechanical resonator has a resonator portion for resonating in a fluid and an electrical connection between the resonator portion and a source of a signal input. The resonator portion, the electrical connection or both include a base material and a performance-tuning material. The base material may include quartz, lithium niobate, zinc oxide, lead zirconate titanate (PZT), gallo-germanates (e.g., Langanite (La.3Ga.5SiO.14), Langanite, or Langatate), diomignite (lithium tetraborate), bismuth germanium oxide gallium phosphate, gallium nitride, aluminum nitride or combinations thereof. The performance-tuning material may include polymers, ceramics, metals, metal carbides or nitrides, diamond, diamond-like carbon, and combinations thereof.
The mechanical resonator may be connected to a measuring system that sends a variable frequency input signal, such as a sinusoidal wave, that sweeps over a predetermined frequency range, preferably less than about 100 kHz (e.g., in the 25-30 kHz range) for a tuning fork resonator and in a higher range for the TSM resonator. The resonator response over the frequency range is then monitored to determine selected physical and electrical properties of the fluid. Absolute values may be obtained if desired, as may relative, comparative or index values. Additionally, it is possible also that the system may be employed with determining whether a certain threshold criteria is met in the fluid being analyzed.
The hardware for the present measuring system may be any suitable hardware. It may include, for example, art-disclosed network analyzers, see, e.g., U.S. Pat. No. 6,336,353 (Matsiev, et al.) (“Method And Apparatus For Characterizing Materials By Using A Mechanical Resonator”); and U.S. Pat. No. 6,182,499 (McFarland, et al.) and U.S. Pat. No. 7,302,830, hereby incorporated by reference. The hardware might also be part of an application specific integrated circuit (ASIC), such as is disclosed for example in U.S. Pat. No. 7,043,969, hereby incorporated by reference, as disclosed in U.S. Pat. No. 6,873,916, hereby incorporated by reference, as disclosed in the application entitled “Resonator Sensor Assembly” (published as U.S. Pat. App. No. 20040250622 (now abandoned), as disclosed in the application entitled “Environmental Control System Fluid Sensing System And Method” (published International Patent Application No. US03/32983) or as disclosed in U.S. Pat. No. 7,210,332. All of the foregoing are hereby incorporated by reference.
Generally, the hardware for measuring system provides a versatile fluid sensing system. More specifically, the hardware provides a fluid sensing system for machines that rely upon the presence, condition or both of a fluid to maintain efficient operation, such as (without limitation) a synthetic or natural engine oil. In an automotive application, the user is provided with the ability to determine the actual condition (e.g. or the relative deviation of the state of the engine oil from its initial or virgin state) of the engine oil at any particular time, including during operation. Alternatively, in conjunction with assessing fluid condition, the hardware may also determine the amount of fluid remaining in a reserve of an assembly. This advantageously allows machine operators to extend the duration between fluid service events, while helping to assure continued operational integrity of a machine.
Any dynamic assembly that depends on fluids to operate (e.g., where friction and heat are of a concern), will benefit from hardware capable sensing the state of a fluid. For instance, the ability to dynamically monitor fluid condition, process data obtained from the monitoring, and report characteristics of the fluid to an interface or operator can have many applications. Assemblies that may benefit from the defined embodiments of the present invention are many, and can include without limitation, engines in general, automobiles, heavy machinery, military equipment, airplane parts, oil drilling, exploration and production well logging, oil refining, pipeline and quality control applications, marine transportation, sub-sea exploration and aerospace related equipment, or any other fluid containing application. In addition, contemplated methods include a step of assembling the hardware into a device that is incorporated into engines in general, automobiles, heavy machinery, military equipment, airplanes, oil drilling, exploration and production well logging equipment, oil refining, pipeline and quality control equipment, marine transportation equipment, sub-sea exploration and aerospace related equipment, or any other equipment that utilizes fluids for operations.
In the automotive field, numerous components require lubrication, which is not limited to engine oil. For example, other automotive components may include the transmission, the transfer case, the differential, etc. Still further, the sensing system may further be used to determined the quality and amount of other fluids which are not necessarily used predominantly as a lubricant, including: brake fluids, steering fluids, antifreeze fluids, refrigerant fluids, windshield washer fluids, or any other fluid located in an automotive system.
In one embodiment of suitable hardware, an oil sensing system is used to determine the component characteristics and amount of engine oil. In an automotive application, the oil sensing system will provide a user, at a minimum, with a warning as to the need to change the oil (such as owing to the presence of contaminants, a breakdown or loss of useful ingredients or otherwise). In such an application, the warning is essentially informing the user of the automobile that the engine oil has reaches a quality level or condition that is lower than that recommend by the automobile's manufacturer (or set by the oil manufacturer).
The fluid sensing system preferably uses a mechanical resonator as the fluid sensor in accordance with the present invention. The mechanical resonator is at least partially contained in the fluid under-test. To monitor the condition of the fluid under-test (i.e., engine oil), the mechanical resonator is provided with electrical energy through a frequency generator. The frequency generator is designed to apply a frequency signal (to the mechanical resonator) that is swept over a predetermined frequency range. Electronics are then used to detect the response signal from the mechanical resonator and process the signal to ascertain characteristics of the fluid under-test. In an embodiment of the fluid sensing system, the electronics are provided in the form of an application specific integrated circuit (ASIC). In addition, the hardware might also be part of or include a field programmable gate array (FPGA).
In the foregoing description, numerous specific details are set forth in order to provide a thorough understanding of the fluid sensing system, hardware and mechanical resonator that may be used with the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well known process steps have not been described in detail in order not to unnecessarily obscure the present invention.
The manner of operating the resonators and sensors of the present invention may vary. In one embodiment, the sensor is operated continuously. In another, it may be intermittently operated. It is possible that the sensor may be operated only in preselected conditions, such as prior to starting vehicle operation, upon starting vehicle operation, during vehicle operation upon concluding vehicle operation, while the vehicle travels at a substantially constant velocity, while the vehicle accelerates or decelerates, or otherwise.
It should be understood that various alternatives to the embodiments of the invention described herein may be employed in practicing the invention. It is intended that the following claims define the scope of the invention and that the methods and apparatus within the scope of these claims and their equivalents be covered thereby. To the extent that the particular combinations of steps and materials covered by the following claims are not disclosed in the specification, the combinations of steps and materials are incorporated by reference into the specification.
Number | Date | Country | Kind |
---|---|---|---|
WO2004/086003 | Mar 2003 | WO | international |
This application is a divisional of co-pending U.S. patent application Ser. No. 10/550,075 entitled RESONATOR SENSOR ASSEMBLY, which application is a U.S. national stage of International Application No. PCT/US04/08552, filed Mar. 19, 2004, which application further claims the benefit of U.S. Provisional Application No. 60/456,517 entitled RESONATOR SENSOR ASSEMBLY, filed on Mar. 21, 2003, the entire contents of all of which are herein incorporated by reference for all purposes.
Number | Name | Date | Kind |
---|---|---|---|
3273377 | Testerman et al. | Sep 1966 | A |
3622968 | Silverman | Nov 1971 | A |
3710275 | Tanaka et al. | Jan 1973 | A |
3718032 | Gray | Feb 1973 | A |
3762197 | Roof et al. | Oct 1973 | A |
3778757 | Houston | Dec 1973 | A |
3902365 | Knauth | Sep 1975 | A |
3903732 | Rork et al. | Sep 1975 | A |
3921622 | Cole | Nov 1975 | A |
3926271 | Patashnick | Dec 1975 | A |
4103224 | Taro et al. | Jul 1978 | A |
4145922 | Estrada, Jr. et al. | Mar 1979 | A |
4312228 | Wohltjen | Jan 1982 | A |
4342936 | Marcus et al. | Aug 1982 | A |
4349881 | November et al. | Sep 1982 | A |
4361026 | Muller et al. | Nov 1982 | A |
4370662 | Hou et al. | Jan 1983 | A |
4391338 | Patashnick et al. | Jul 1983 | A |
4526480 | Ward | Jul 1985 | A |
4535620 | Cunningham | Aug 1985 | A |
4543829 | Lerch | Oct 1985 | A |
4549427 | Kolesar, Jr. | Oct 1985 | A |
4596697 | Ballato | Jun 1986 | A |
4602498 | Glikberg et al. | Jul 1986 | A |
4602505 | Kanda et al. | Jul 1986 | A |
4624129 | Haynes | Nov 1986 | A |
4644803 | Ward | Feb 1987 | A |
4696181 | Rupprecht et al. | Sep 1987 | A |
4721874 | Emmert | Jan 1988 | A |
4729237 | Suzuki et al. | Mar 1988 | A |
4734609 | Jasmine | Mar 1988 | A |
4741200 | Hammerle | May 1988 | A |
4757228 | Kalinoski et al. | Jul 1988 | A |
4760351 | Newell et al. | Jul 1988 | A |
4767719 | Finlan | Aug 1988 | A |
4779451 | Ezawa et al. | Oct 1988 | A |
4782332 | Cipris et al. | Nov 1988 | A |
4783987 | Hager et al. | Nov 1988 | A |
4802370 | EerNisse et al. | Feb 1989 | A |
4802384 | Schwarz et al. | Feb 1989 | A |
4812698 | Chida et al. | Mar 1989 | A |
4862384 | Bujard | Aug 1989 | A |
4890480 | Young | Jan 1990 | A |
4893496 | Bau et al. | Jan 1990 | A |
4904978 | Barth et al. | Feb 1990 | A |
4910523 | Huguenin et al. | Mar 1990 | A |
4922745 | Rudkin et al. | May 1990 | A |
4945634 | Kumada | Aug 1990 | A |
4970492 | King | Nov 1990 | A |
5006845 | Calcar et al. | Apr 1991 | A |
5037779 | Whalley et al. | Aug 1991 | A |
5179028 | Vali et al. | Jan 1993 | A |
5191791 | Gerardi et al. | Mar 1993 | A |
5201215 | Granstaff et al. | Apr 1993 | A |
5204529 | Diatschenko | Apr 1993 | A |
5224174 | Schneider et al. | Jun 1993 | A |
5235844 | Bonne et al. | Aug 1993 | A |
5243756 | Hambergen et al. | Sep 1993 | A |
5253530 | Letcher, III | Oct 1993 | A |
5283037 | Baer et al. | Feb 1994 | A |
5296374 | Culshaw et al. | Mar 1994 | A |
5306644 | Myerholtz et al. | Apr 1994 | A |
5325704 | Mariani et al. | Jul 1994 | A |
5332961 | Hammerle | Jul 1994 | A |
5334900 | Kawashima | Aug 1994 | A |
5338416 | Mlcak et al. | Aug 1994 | A |
5357964 | Spivey et al. | Oct 1994 | A |
5361632 | Magnani | Nov 1994 | A |
5375470 | Matsushima et al. | Dec 1994 | A |
5405808 | Rostoker et al. | Apr 1995 | A |
5408876 | Macy | Apr 1995 | A |
5421190 | Brandle et al. | Jun 1995 | A |
5434650 | Nakahara et al. | Jul 1995 | A |
5435170 | Voelker et al. | Jul 1995 | A |
5445008 | Wachter et al. | Aug 1995 | A |
5454045 | Perkins et al. | Sep 1995 | A |
5455475 | Josse et al. | Oct 1995 | A |
5464509 | Mlcak et al. | Nov 1995 | A |
5469369 | Rose-Pehrsson et al. | Nov 1995 | A |
5477726 | Stabinger et al. | Dec 1995 | A |
5488866 | Ravel et al. | Feb 1996 | A |
5524477 | Wajid | Jun 1996 | A |
5524636 | Sarvazyan et al. | Jun 1996 | A |
5531091 | Gademann et al. | Jul 1996 | A |
5533402 | Sarvazyan et al. | Jul 1996 | A |
5559291 | Hasegawa | Sep 1996 | A |
5571401 | Lewis et al. | Nov 1996 | A |
5592130 | Ikeda et al. | Jan 1997 | A |
5604441 | Freese et al. | Feb 1997 | A |
5610335 | Shaw et al. | Mar 1997 | A |
5622223 | Vasquez | Apr 1997 | A |
5653939 | Hollis et al. | Aug 1997 | A |
5661233 | Spates et al. | Aug 1997 | A |
5670709 | Gallagher | Sep 1997 | A |
5693884 | Kato | Dec 1997 | A |
5698089 | Lewis et al. | Dec 1997 | A |
5705399 | Larue | Jan 1998 | A |
5734098 | Kraus et al. | Mar 1998 | A |
5741961 | Martin et al. | Apr 1998 | A |
5744902 | Vig | Apr 1998 | A |
5770038 | Iwama et al. | Jun 1998 | A |
5776359 | Schultz et al. | Jul 1998 | A |
5777210 | Voelker et al. | Jul 1998 | A |
5789665 | Voelker et al. | Aug 1998 | A |
5792938 | Gokhfeld | Aug 1998 | A |
5798452 | Martin et al. | Aug 1998 | A |
5818731 | Mittal et al. | Oct 1998 | A |
5827952 | Mansure et al. | Oct 1998 | A |
5852229 | Josse et al. | Dec 1998 | A |
5877411 | Namerikawa et al. | Mar 1999 | A |
5885849 | DiStefano et al. | Mar 1999 | A |
5889351 | Okumura et al. | Mar 1999 | A |
5915499 | Few | Jun 1999 | A |
5918354 | Ikegami et al. | Jul 1999 | A |
5939631 | Moore | Aug 1999 | A |
5959247 | Armstrong et al. | Sep 1999 | A |
5959297 | Weinberg et al. | Sep 1999 | A |
5985356 | Schultz et al. | Nov 1999 | A |
6023961 | Discenzo et al. | Feb 2000 | A |
6034775 | McFarland et al. | Mar 2000 | A |
6041642 | Duncan | Mar 2000 | A |
6044694 | Anderson et al. | Apr 2000 | A |
6047590 | Namerikawa et al. | Apr 2000 | A |
6082894 | Batko et al. | Jul 2000 | A |
6126311 | Schuh | Oct 2000 | A |
6151123 | Nielsen | Nov 2000 | A |
6155098 | Shapiro et al. | Dec 2000 | A |
6157449 | Hajduk | Dec 2000 | A |
6175409 | Nielsen et al. | Jan 2001 | B1 |
6176131 | Hecht et al. | Jan 2001 | B1 |
6176323 | Weirich et al. | Jan 2001 | B1 |
6182499 | McFarland et al. | Feb 2001 | B1 |
6196057 | Discenzo | Mar 2001 | B1 |
6223589 | Dickert et al. | May 2001 | B1 |
6231811 | Namerikawa et al. | May 2001 | B1 |
6247354 | Vig et al. | Jun 2001 | B1 |
6260407 | Petro et al. | Jul 2001 | B1 |
6260408 | Vig et al. | Jul 2001 | B1 |
6265226 | Petro et al. | Jul 2001 | B1 |
6269686 | Hahn et al. | Aug 2001 | B1 |
6275137 | Doppalapudi et al. | Aug 2001 | B1 |
6286363 | Discenzo | Sep 2001 | B1 |
6294388 | Petro | Sep 2001 | B1 |
6296771 | Miroslav | Oct 2001 | B1 |
6306358 | Yamamoto | Oct 2001 | B1 |
6311549 | Thundat et al. | Nov 2001 | B1 |
6327890 | Galipeau et al. | Dec 2001 | B1 |
6336353 | Matsiev et al. | Jan 2002 | B2 |
6371640 | Hajduk et al. | Apr 2002 | B1 |
6389690 | McCullough et al. | May 2002 | B1 |
6393895 | Matsiev et al. | May 2002 | B1 |
6401519 | McFarland et al. | Jun 2002 | B1 |
6406632 | Safir et al. | Jun 2002 | B1 |
6407479 | Moellendorf et al. | Jun 2002 | B1 |
6412131 | Zhao et al. | Jul 2002 | B1 |
6441716 | Doppalapudi et al. | Aug 2002 | B1 |
6456096 | Ericson et al. | Sep 2002 | B1 |
6459995 | Collister | Oct 2002 | B1 |
6490911 | Namerikawa et al. | Dec 2002 | B1 |
6494079 | Matsiev et al. | Dec 2002 | B1 |
6507945 | Rust et al. | Jan 2003 | B1 |
6509749 | Buelna et al. | Jan 2003 | B1 |
6511915 | Mlcak | Jan 2003 | B2 |
6519034 | Engler et al. | Feb 2003 | B1 |
6535001 | Wang | Mar 2003 | B1 |
6536259 | Mattes | Mar 2003 | B2 |
6536634 | Berndorfer et al. | Mar 2003 | B2 |
6545392 | Kawauchi et al. | Apr 2003 | B2 |
6557396 | Ismail et al. | May 2003 | B2 |
6564126 | Lin et al. | May 2003 | B1 |
6575020 | de Charmoy Grey et al. | Jun 2003 | B1 |
6626025 | Potyrailo et al. | Sep 2003 | B2 |
6640644 | Mireles et al. | Nov 2003 | B1 |
6644095 | Van Mullekom et al. | Nov 2003 | B2 |
6658429 | Dorsett, Jr. | Dec 2003 | B2 |
6661162 | Nagai et al. | Dec 2003 | B1 |
6664067 | Hajduk et al. | Dec 2003 | B1 |
6873916 | Kolosov et al. | Mar 2005 | B2 |
6928877 | Carlson et al. | Aug 2005 | B2 |
7100427 | Kahn et al. | Sep 2006 | B2 |
7171849 | Kandler | Feb 2007 | B2 |
7210332 | Kolosov et | May 2007 | B2 |
7254990 | Matsiev et al. | Aug 2007 | B2 |
7294540 | Lee et al. | Nov 2007 | B2 |
7350367 | Matsiev et al. | Apr 2008 | B2 |
7634937 | Burdett et al. | Dec 2009 | B2 |
20010010174 | Matsiev et al. | Aug 2001 | A1 |
20020029900 | Wimberger Friedl et al. | Mar 2002 | A1 |
20020064649 | Lembke et al. | May 2002 | A1 |
20020068488 | Tuller et al. | Jun 2002 | A1 |
20020070841 | Doppalapudi et al. | Jun 2002 | A1 |
20020074897 | Ma et al. | Jun 2002 | A1 |
20020092340 | Prater et al. | Jul 2002 | A1 |
20020113596 | Horie et al. | Aug 2002 | A1 |
20020121132 | Breed et al. | Sep 2002 | A1 |
20020137348 | Mlcak | Sep 2002 | A1 |
20020148529 | Berndorfer et al. | Oct 2002 | A1 |
20020162385 | Ismail et al. | Nov 2002 | A1 |
20020178787 | Matsiev et al. | Dec 2002 | A1 |
20020178805 | DiFoggio et al. | Dec 2002 | A1 |
20020194906 | Goodwin et al. | Dec 2002 | A1 |
20030000291 | Kolosov et al. | Jan 2003 | A1 |
20030041653 | Matsiev et al. | Mar 2003 | A1 |
20030041659 | Marszalek et al. | Mar 2003 | A1 |
20030053516 | Atherton | Mar 2003 | A1 |
20030062910 | Wang et al. | Apr 2003 | A1 |
20030083825 | Berndorfer | May 2003 | A1 |
20030116497 | Carlson et al. | Jun 2003 | A1 |
20030118078 | Carlson et al. | Jun 2003 | A1 |
20030119060 | Desrosiers et al. | Jun 2003 | A1 |
20030233886 | Uramachi et al. | Dec 2003 | A1 |
20040250622 | Kolosov et al. | Dec 2004 | A1 |
20070245811 | Discenzo | Oct 2007 | A1 |
Number | Date | Country |
---|---|---|
4424422 | Jul 1994 | DE |
10014724 | Sep 2001 | DE |
0282251 | Sep 1988 | EP |
0317356 | Jan 1993 | EP |
0282251 | Feb 1993 | EP |
0676638 | Oct 1995 | EP |
0769695 | Apr 1997 | EP |
0779510 | Jun 1997 | EP |
0813236 | Dec 1997 | EP |
2067009 | Jul 1981 | GB |
2114745 | Aug 1983 | GB |
2187286 | Sep 1987 | GB |
59126931 | Jul 1984 | JP |
60018743 | Jan 1985 | JP |
60134617 | Jul 1985 | JP |
402161323 | Jun 1990 | JP |
5129874 | May 1993 | JP |
8112613 | May 1996 | JP |
11094726 | Apr 1999 | JP |
11145758 | May 1999 | JP |
9801739 | Jan 1998 | WO |
Entry |
---|
M. R. Fisch, R.P. Moeller & E. F. Carome, “Improved Acoustic Viscosimeter Technique”, 1976. |
“Sensors”, Fraunhofer Verbund Mikroelektronik, Oct. 3, 2002. |
“Smart Sensor System for Trace Organophosphorus and Organosulfur Vapor Detection Employing a Temperature-Controlled Array of Surface Acoustic Wave Sensors, Automated Sample Preconcentration, and Pattern Recognition”, American Chemical Society, 1993. |
“Measurement of Viscosity and Shear Wave Velocity of a Liquid or Slurry for On-Line Process Control”, Ultrasonics 39 (2002) 623-630, 2002. |
“On-Line Sensor for Density and Viscosity Measurements of a Liquid or Slurry for Process Control in the Food Industry”, 2004. |
“An Acoustic Automotive Engine Oil Quality Sensor”, 1977, IEEE International Frequency Control Symposium, 1997. |
J.M. Hammond, “Sensor”, 1997. |
P. Hauptmann, “Ultrasonic Sensors for Process Monitoring and Chemical Analysis, State-of-the-Art and Trends”, 1998. |
“Refrigerant Flow in Evaporators”, OEM Products, Feb. 5, 2004. |
“Applications of the Piezoelectric Crystal Detector in Analytical Chemistry”, 1890 Analytical Chemistry, vol. 49, No. 13, Nov. 1977. |
“Surface Acoustic Wave Hygrometer: Measuring Water Vapor in Earth's Atmosphere”, http://mishkin.jpl.nasa.gov/spacemicro/MWS PAPER, Mar. 6, 2002. |
“SOS Smart Oil Sensor” Impact Technologies, LLC, 2003. |
“Viscosity Sensing Using a Love-Wave Device”, Sensors and Actuators A 68 (1998) 275-281, 1998. |
“Lecture Notes on Shear and Friction Force Detection with Quartz Tuning Forks” by Khaled Karrai, Mar. 2000. |
“Network Analysis Method Applied to Liquid-Phase Acoustic Wave Sensors”, 1990 American Chemical Society, 1990. |
“Device for the Investigation of the Humidity-Related Behaviors of Materials”, Department of Physics, 1986. |
“Theory of the Vibrating Tuning Fork Fluid Density Tool”, May 7, 2003. |
“Fluid Mechanics” by L.D. Landau and E. M. Lifshitz, Addison-Wesley Publishing Company, Inc., 1959. |
“Vibratory Process Control Transducers” by R.M. Langdon, Ph.D., 2004. |
“A Remote Acoustic Engine Oil Quality Sensor”, 1997 IEEE, 1997. |
“Electromechanical Behavior of PZT—Brass Unimorphs”, 1999. |
“Operation of an Ultrasensitive 30-MHz Quartz Crystal Microbalance in Liquids” Anal. Chem 1993, 65, 1545-1551, 1993. |
“Two-Dimensional Micromechanical Bimorph Arrays for Detection of Thermal Radiation”, American Institute of Physics, Jun. 17, 1997. |
“Viscosity and Density Sensing with Ultrasonic Plate Waves”, Sensors and Actuators, A21-A23, 1990. |
“Measurement of the Viscosity and Shear Elasticity of Liquids by Means of a Torsionally Vibrating Crystal”, by W.P. Mason, Murray Hill, N.J., Jan. 29, 2004. |
“Application of Flexural Mechanical Resonators to Simultaneous Measurements of Liquid Density and Viscosity”, L.F. Matsiev, 1998. |
“Theory of Electroacoustics”, McGraw-Hill International Book Company, 1981. |
1 MHz Quartz Length Extension Resonator as a Probe for Scanning Near-Field Acoustic Microscopy, Thin Solid Films 264 (1995) 172-175, 1995. |
“Computation of Equivalent Circuit Parameters of Quartz Crystals in Contact with Liquids and Study of Liquid Properties”, American Chemical Society, 1988. |
“Viscosity Monitoring with a Piezoelectric Quartz Crystal and its Application to Determination of Endotoxin by Gelatin of Limulus Amebocyte Lysate”, Elsevier Science Publishers B.V., 1988. |
“High Throughput Experimentation for the Synthesis of New Crystalline Microporous Solids”, Microporous and Mesoporous Materials 48 (2001) 355-365, 2001. |
Electrolytic Determination of Nanomolar Concentrations of Silver in Solution with a Piezoelectric Quartz Crystal, Analytica Chimica Acta, 131 (1981) 97-102, 1981. |
“Harsh Environment Fluid Viscosity-Density Sensor”, http://www.fastlane.nsf.gov/servlet/showaward?award=0239151, Feb. 5, 2004. |
“An Accurate Non-Radioactive Fluid Density Sensor”, by Chris Nussbaum, Apr. 1, 2003. |
“Viscous Drag Measurements Utilizing Microfabricated Cantilevers”, American Institute of Physics, 1996. |
“The Lubri-Sensor Electronic Oil Quality Analyser”, http://www.pmlubricants.com.au/pm—lube—concept/lubrisensor.htm, Oct. 3, 2002. |
“Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems”, Annual Reviews, 1998. |
“Reliable Ceramics for Advanced Heat Engines”, American Ceramic Society Bulletin, vol. 74, No. 4, Apr. 1995. |
“Frequency Response of Cantilever Beams Immersed in Viscous Fluids with Applications to the Atomic Force Microscope”, Journal of Applied Physics, vol. 84, No. 1, Jul. 1, 1998. |
“A New Method Based on Acoustic Impedance Measurements for Quartz Immunosensors”, Sensors and Actuators B 43 (1997) 217-223, 1997. |
“Simultaneous Liquid Viscosity and Density Determination with Piezoelectric Unimorph Cantilevers”, Journal of Applied Physics, vol. 89, No. 2, Jan. 15, 2001. |
“Sinims Oil and Gas Workshop”, ICMS, Edinburgh, Mar. 11, 2002. |
“Water Sorption Isotherms and Enthalpies of Water Sorption by Lysozyme using the Quartz Crystal Microbalance/Heat Conduction Calorimeter”, Biochimica et Biophysica Acta 1594 (2002) 150-159, 2002. |
“A Vibrating Tuning Fork Fluid Density Tool”, Smith Institute, Feb. 5, 2004. |
“Engine Oil Viscosity Sensors Using Disks of PZT Ceramic as Electromechanical Vibrators”, SAE Technical Paper Series, May 8, 1997. |
“Surface Acoustic Wave (SAW) Hygrometer (Micro Weather Station)”, TAP: Gallery, Mar. 16, 2002. |
“Preparation of Chemically Etched Piezoelectric Resonators for Density Meters and Viscometers”, Mat. Res. Bull., vol. 22, pp. 1267-1274, 1987. |
“Crimpen-eine ausgereifte Anschlubtechnik”, F & M Elektromechanik. vol. 107, 4. 1999. |
“Sensor Technology Improves Jet Engine Reliability”, http://www.afrlhorizons.com/Briefs/June01/PR0003.html, Oct. 3, 2002. |
“Oil Quality Sensor” Automotive Engineering International Online, http:www.sae.org/automag/top50prod/17.htm, Feb. 5, 2004, 1 pg. |
“An in vitro urea sensor using a torsion-wave crystal device”, Sensor and Actuators B, 8 (1992) 143-149, 1992. |
“Viscosity Sensor Based on a Symmetric Dual Quartz Thickness Shear Resonator” 2003 IEEE. |
“Elemente der Angewandten Elektronik”, Friedr. Vieweg & Sohn, Jan. 29, 2004. |
“Micromachined Viscosity Sensor for Real-Time Polymerization Monitoring” Transducers '97, Jun. 1997. |
“Resonance Response of Scanning Force Microscopy Cantilevers”, American Institute of Physics, Aug. 1994. |
“CJV-5000 Vibro Viscometer Utilizing Tuning-Fork Technology”, Jun. 18, 2003. |
“Fabrication of High Frequency Nanometer Scale Mechanical Resonators from Bulk Si Crystals”, A.N. Cleland and M. L. Roukes, American Institute of Physics, Oct. 28, 1996. |
Delphi, “Sensors and Actuators Intellek Oil Condition Sensor”, 2002. |
“Integrated On-Line Multisensing of Fluid Flow Using a Mechanical Resonator” Sensors and Actuators, 2000. |
Electronic Devices “Epson presents the MC-30A: Reliable 32.768kHz Dedicated to Automotive Applications”, Aug. 25, 2003. |
“Viscoelastic Properties of Polymers” John D. Ferry, Third Edition, John Wiley & Sons, Inc., 1980. |
“Field Trials of the Viscosity & fluid Density Tool (VFD)” Nan Gall Technology, Aug. 2002. |
“On-line Monitoring of the Viscosity in Dextran Fermentation Using Piezoelectric Quartz Crystal”, Biotechnology and Bioengineering, vol. 36, pp. 636-641, Mar. 12, 1990. |
“Evaluation of an Equivalent Circuit Model for Thickness-Shear Mode Resonators in Liquids”, VTT, Chemical Technology, Polymer and Fibre Technology, Sep. 1996. |
“Cantilever Sensor Research Tool for Science and Industry”, diScentris, 2003. |
“A Precise and Robust Quartz Sensor Based on Tuning Fork Technology for (SF6)—Gas Density Control”, Sensors and Actuators 80, 2000. |
“Contributions of Amplitude Measurement in QCM Sensors”, Chao Zhang and Guanping Feng, IEEE, 1996. |
“Determination of Liquid Density with a Low Frequency Mechanical Sensor Based on Quartz Tuning Fork”, Sensors and Actuators B 84, 2002. |
U.S. Appl. No. 09/550,549 entitled “Automated Process Control and Data management System and Methods” (Crevier et al.), Apr. 14, 2000. |
“Combinatorial Chemistry—The Emperors's New Clothes?”, Microporous and Mesoporous Materials, 48 (2001), pp. 367-373. |
K. Kanazawa et al., “The Oscillation Frequency of a Quartz Resonator in Contact With a Liquid”, Jun. 22, 1984. |
H. Muramatsu et al., “A quartz crystal viscosity sensor for monitoring coagulation reaction and its application to a multichannel coagulation detector”, May 4, 1990. |
N. Hagood IV et al., “Development of Micro-Hydraulic Transducer Technology”, Jan. 1, 2000. |
A. Fleming, “The vibrating tuning fork fluid density tool”, Jan. 1, 2002. |
Kavlico, “Our Sensors Are the Solution!”, available at least as of Dec. 28, 2005. |
PuuMan, “Hygroscopicity Measurement Apparatus”, available at least as of Dec. 28, 2005. |
Senstronics, “The Future of Pressure and Temperature Measurement”, available at least as of Dec. 28, 2005. |
Number | Date | Country | |
---|---|---|---|
20100218353 A1 | Sep 2010 | US |
Number | Date | Country | |
---|---|---|---|
60456517 | Mar 2003 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 10550075 | US | |
Child | 12783397 | US |