Method of packaging a sensor

Information

  • Patent Grant
  • 8732938
  • Patent Number
    8,732,938
  • Date Filed
    Wednesday, May 19, 2010
    14 years ago
  • Date Issued
    Tuesday, May 27, 2014
    10 years ago
Abstract
An improved method of packaging a sensor is provided. The method includes the step of affixing a tuning fork to a platform. The tuning fork includes tines comprising one or more surfaces, with each tine further comprising an electrode and a piezoelectric material. An application specific integrated circuit (ASIC) is affixed to the platform. Electrical communication between the ASIC and the electrode of each tine is established for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork. A protective layer is applied to cover the platform and a portion of the tuning fork while maintaining a portion of a surface of each tine free from the protective layer such that the surface can displace the fluid in contact therewith.
Description
TECHNICAL FIELD

The present invention relates generally to the assembly of sensing devices, and more particularly to the packaging of fluid condition sensors such as for the sensing of synthetic or natural petroleum fluids.


BACKGROUND

U.S. Provisional Application No. 60/419,404, (entitled “Machine Fluid Sensor and Method”; filed Oct. 18, 2002) (hereby incorporated by reference) discloses improved machine fluid sensors and methods. There is a need for the ability to package sensing devices so that they can withstand their operating conditions. Exemplary applications in which these sensors may be used in engines in general, automobiles, heavy machinery, military equipment, airplane parts, oil drilling, exploration and production well logging, oil refining, pipeline and quality control applications, marine transportation, sub-sea exploration and aerospace related equipment, or any other fluid containing application. In general, sensors for these applications will include very small components that need to be able to withstand harsh operating environment conditions. The ability to assemble such devices efficiently using automated materials handling equipment is also important.


SUMMARY OF THE INVENTION

In general, the present invention meets the above needs by providing an improved method that generally includes the steps of:


providing a coated or uncoated sensor element having an exposed sensing surface;


attaching the sensor element to a platform so that the exposed sensing surface is spaced from the platform; and


optionally applying a protective layer over the platform and/or sensor while maintaining the exposed sensing surface.


A highly preferred sensor of the present invention includes a resonator, and more preferably a tuning fork resonator.


Among other advantages, the present invention affords the ability to provide improved sensor assemblies for a number of different applications. The sensor assemblies of the present invention thus preferably include at least one and more preferably a combination of two or more of the following:

    • operates for long periods of time (e.g., at least 3 months, and more preferably at least 1 year or longer) over a temperature range of −40° C. to 170° C. and more preferably −60° C. to 300° C., without compromise to the material sensor performance characteristics;
    • provides protection to fragile components that are typically small (e.g., smaller than 5 mm, and in some instances having a smallest dimension that is smaller than 1 mm), in harsh environments such as environments that include corrosive media, abrasive media, or combinations thereof;
    • provides a packaged device that is compact (e.g., smaller than about 15 cm3, having a footprint of less than about 40 cm2, and more preferably smaller than about 10 cm3, having a footprint of less than about 20 cm2), which can be used alone or combined with other components, such as an application specific integrated circuit (ASIC) onto a common platform (e.g., a lead frame or the like);
    • includes individual or modular components that can be readily handled by automated materials handling equipment, such as components including a flat surface for handling by “pick and place” robots; or
    • includes structure that permits for calibration of the sensor against a material having a known characteristic or for initializing the sensor upon introduction of a new fluid.


Accordingly, it can be seen that the present invention provides a solution for a number of competing technological challenges; notably, for example, the preparation of an assembly in which a sensor having a free portion with a sensing surface is incorporated onto a platform, components of the sensor are physically shielded from harsh operating conditions, the requisite space is maintained between the free portion of the sensor and the platform, and the sensing surface of the sensor remains exposed for sensing.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a side section view of a sensor of the present invention taken from the assembly of FIG. 2, wherein the sensor is enveloped by an optional Faraday cage;



FIG. 2 is a perspective view of the sensor of FIG. 2 with the Faraday cage removed for clarity and depicting an illustrative housing configuration;



FIG. 3
a-3b illustrate (with side sectional views) of a sensor of the present invention, shown coupled with another component and sharing a common platform, and also including an optional protective layer;



FIG. 4 is a top sectional view of an assembly in accordance with the present invention to illustrate the use of a removable barrier for temporary use while applying a protective layer to components of a sensor in accordance with the present invention;



FIGS. 5
a-5d illustrate (with side sectional views) a sequence of steps employed for applying a protective layer to components of a sensor in accordance with the present invention, in which a consumable barrier is employed;



FIGS. 6
a-6e illustrate (with side sectional views) a sequence of steps employed for assembling another sensor in accordance with the present invention;



FIG. 7 illustrates a side view of a sensor of the present invention attached directly to an ASIC device; and



FIG. 8
a-8d illustrate (with side sectional views) a sequence of steps employed for assembling yet another sensor in accordance with the present invention.





DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention is predicated upon the discovery of methods for assembling a sensor that includes a sensing element that requires exposure over at least a portion of its outer surface to ambient conditions. More particularly, the present invention is predicated upon the discovery of methods for assembling a fluid sensor that includes a resonator sensing element that requires exposure over at least a portion of its outer surface to the fluid it is sensing.


One preferred method of the present invention generally includes the steps of:


providing a coated or uncoated sensor element having an exposed sensing surface;


attaching the sensor element to a platform so that the exposed sensing surface is spaced from the platform; and


optionally applying a protective layer over the platform and/or sensor while maintaining the exposed sensing surface.


In a particularly preferred embodiment, which is illustrated herein by description of a tuning fork resonator as the sensing element, a coated or uncoated tuning fork resonator is provided and has tines that are free to resonate upon application of an input signal (e.g., a varying frequency input signal). The resonator is attached to a platform in a manner that maintains the tines spaced from the platform. Optionally, a protective layer is applied over the resonator (other than over the tines) and the platform. It should be appreciated that even though the present invention is illustrated with reference to a tuning fork resonator (e.g., having two, three or more tines), the invention is not so limited. For example, the features herein may be employed with respect to any of a number of types of sensors, including for example, cantilevers, unimorphs, bi-morphs, membrane resonators, torsional resonators, or other mechanical resonators. The invention may also have suitable application with respect to thickness shear mode resonators, surface acoustic wave devices, pressure sensing devices, or ultrasonic transducers.


Examples of resonators and the manner of using them for sensing characteristics of a fluid are taught, for example, in U.S. Pat. Nos. 6,336,353 and 6,182,499, hereby expressly incorporated by reference.



FIG. 1 illustrates one example of an approach to packaging a resonator to form an assembly 10 in accordance with the present invention. The assembly 10 includes a resonator 12 having a free portion 14. A base platform 16 supports the resonator, by way of a suitable support 18, which may be formed as part of the base platform 16, added as a separate layer (e.g., a layer of dielectric material (e.g., a polymer, a ceramic or combination thereof), an adhesive such as an epoxy, or the like) or otherwise provided so that the free portion is spaced from the base platform over at least a portion of the length of the resonator. The assembly is preferably provided with a suitable structure adapted for receiving a signal. For example, in one embodiment, a conductive path 20 joins a contact 22 with the resonator (e.g., via a bonded or soldered joint with an electrode (not shown) associated with the resonator.


The structure of the conductive path and the contact is not critical, and it is possible to combine the two into a single structure. For example, it is possible that the conductive path may include a wire that is attached to an electrode of the resonator. Alternatively, using techniques common in the manufacture of semiconductor devices, a via may be formed in the base platform 16 and filled with a wire or conductive metal. The contact may be a wire. It may also be a conductive trace applied by a suitable metallization process (e.g., plating, physical vapor deposition, chemical vapor deposition, plasma deposition, coating, spraying, or the like). It may also be possible to laminate with or without an adhesive.


Though FIG. 1 depicts a structure by which the conductive path extends through a base, it will be appreciated that the invention is not so limited, and the path can extend through or around any wall, e.g., wall 24 of the assembly. The wall may be any suitable material, and preferably is a material similar in electrical characteristics to the material of the base platform 16 (e.g., a ceramic, a polymer or a combination thereof).


In FIG. 2, there is shown an example of a more complete housing structure in which the assembly 10 includes a plurality of walls 24 that substantially surround the resonator. Though shown as generally orthogonally disposed continuous, flat walls, of course, the invention is not so limiting, the walls can assume any shape as desired. They may include discontinuities, e.g., grooves, wells, apertures, slits, windows or some other surface irregularity. The walls may be curved, be configured as a polygon other than a rectangle, or combinations thereof. In a preferred embodiment, there is a cut-out defined in the housing structure so that at least the free portion 14 of the resonator 12 is exposed. For example, as seen in FIG. 2, a top wall may be omitted from covering all or a portion of an upper portion of the housing structure to render at least a portion of the resonator exposed to ambient.


In another embodiment, an assembly including a resonator, such as the assembly in FIG. 1 may be combined with one or more other devices, and be carried together by a common platform. For example, it is contemplated that a resonator assembly may be packaged in combination with an ASIC and be carried by a common platform. With reference to FIG. 3a, there is shown one such example in which an assembly 110, including a resonator 112 having a free portion 114. A base platform 116 having a conductive path (which in this illustration is shown connected with a contact 122, but need not be, as described above) forms a surface upon which a support 118 may be disposed for the resonator 112. A wall 124 substantially surrounds the resonator 112, while at least partially exposing at least a portion of the resonator to ambient.


Also shown in FIG. 3a is an additional electronic component 126 (e.g., an ASIC). Shown in FIG. 3b is an additional electronic component 126 (e.g., an ASIC) and a secondary component 130 (e.g. a temperature sensor). Furthermore, the one or more devices on the platform may or may not be surrounded by a wall, which is shown in FIG. 3a, but absent from FIG. 3b.


Secondary components may be included on the common platform with the resonator. Besides temperature sensors (e.g. thermistors, RTDs, semiconductor bandgap or the like), other sensors may be utilized. Beside ASICs, other more general integrated circuits may be used. Also, integrated circuits that combine the functionality several devices or sensors may be used; for example, an integrated circuit that measures temperature as well operates the resonator may be suitable. A variety of passive and/or active components may be used to assist in the operation of the integrated circuit and/or resonator. For example, resistors (e.g. thin film resistors) and capacitors (e.g. ceramic capacitors) may be utilized as passive components. Examples of active components include amplifiers and/or filters. Also suitable for a use as a secondary component is a field programmable gate array. The conductive path may also be considered another device that may be included on the common platform with the resonator. In addition, a calibration unit may be utilized. Of course, various combinations of these other devices may also be used on a common platform with the resonator.


In a preferred embodiment, the electrical connection between the resonator and the integrated circuit as short as possible to help lessen signal distortions, interferences and parasitic effect that may affect measurement accuracy.


In both FIGS. 3a and 3b, there is also shown an optional protective layer 128 that may be applied to encapsulate at least a portion of the assembly. It will be appreciated that a similar protective layer may be employed over the various other alternative assemblies of the present invention as well, such as over the assembly 10 of FIG. 1. It is not only limited to the assembly 110 of FIGS. 3a and 3b.


The protective layer 128 may be any suitable protective layer. For example, it may be a coating that is sprayed, brushed or otherwise applied over the assembly; it may also include an overmolded plastic layer, a layer that is laminated, or combinations of two or more of coatings, overmolded layers, or laminated layers may also be employed.


It is found that in instances where it is desired to employ a protective layer, and the need remains to maintain the free portion of the resonator exposed to ambient, there is a need to selectively apply the protective layer to the assembly so that components needing protection from harsh environments will be coated, while still keeping the free portion of the resonator exposed. Also, the protective layer may be selectively applied to the one or more components on the assembly. For example, the protective layer may be selectively applied to the temperature sensor (item 130 in FIG. 3b) so that a portion of the temperature sensor remains exposed to ambient, while the protective layer fully coats the additional electronic component. In the alternative, the protective layer may fully coat the temperature sensor if it has a thermal conductivity.


In order to accomplish this, any of a number of suitable selective application techniques may be employed, such as the employment of a removable protective barrier to prevent protective layer materials from contacting the free portion of the resonator. The removable protective barrier is thus positioned over the assembly to block the portions of the assembly requiring the protective layer from the portions that do not require the layer. The protective layer is then applied and the barrier is removed.


The protective barrier may take any suitable configuration, but preferably is selected from a re-usable barrier or a consumable barrier. For example, it might be possible to employ a photoresist over a portion of the assembly, selectively remove portions thereof, apply the protective material and then remove remaining photoresist.



FIG. 4 is a top sectional view of a resonator assembly 210 in which a re-usable barrier 250 is employed to surround a resonator 212 over a free portion 214, while a protective layer 228 is applied. The re-usable barrier may be any suitable material. However, preferably it is a relatively soft material that will not plastically deform the resonator if it contacts the resonator. It may include one or more knife edges 252, membranes, walls or the like at any suitable location (e.g., a knife edge seal along an inner periphery) to help sealingly surround the resonator during application of the protective layer. It should be appreciated that though the barrier of this embodiment may be re-usable, it need not be, particularly if to do so would compromise the quality of the resulting assembly. The re-usable barrier may be manually handled, or handled by an automated instrument for placement purposes. In a variation within this embodiment, one or a plurality of the barriers may be placed on a robot arm, which precisely brings the barrier (or barriers) into proper position relative to the resonator.



FIGS. 5
a-5d illustrate a sequence of steps that may be employed, pursuant to which the removable protective barrier is a consumable barrier. In FIG. 5a there is shown an assembly 310, that includes a resonator 312 having tines defining a free portion 314. The resonator sits on a platform. In FIG. 5b, a consumable barrier layer 350 is applied over the resonator of the assembly of FIG. 5a. In the step depicted in FIG. 5c, a protective layer 328 is applied over the consumable barrier layer 350. In FIG. 5d, the consumable layer has been removed. Leaving the protective layer 328 in spaced relation from the resonator 312.


In yet another embodiment it may be possible to employ a hybrid approach to the approach of FIGS. 4 and 5a-5d. For example, a shell may be formed in situ to surround the resonator. Upon conclusion of application of the protective layer, the shell may be removed, such as by breaking it at a weakened region (e.g., a scored location).


It is preferable that any consumable barrier material that is used be relatively inert to the material of the resonator and any associated hardware so that no damage arises as a result of the method. In this regard, any of a number of different materials may be employed as the consumable layer. For example, the material of the consumable barrier may be a material that can be dissolved, decomposed or otherwise broken down into particles for removal from the volume of space between the resonator and any resulting protective layer. Thus, the consumable barrier material may be selected from polymers (synthetic, biological, thermoplastic, thermoset, or combinations thereof), starches, waxes, salts or other dissolvable crystals, low melting point metals, or another sacrificial material that is capable of withstanding in its solid state the processing conditions for applying the protective layer, and thereafter being removable from the assembly without physically deforming or otherwise contaminating the resonator.


Turning now to the embodiment shown in FIGS. 6a-6e, there is shown another approach to the fabrication of an assembly 410 in accordance with the present invention. In the resulting assembly of this embodiment, a resonator 412 has a free portion 414 that extends away from a multi-layer holder 460. A first layer 462 is provided as shown in FIG. 6a. A trench 461 is formed in or on the first layer, as seen in FIG. 6b, using any suitable material removal or material build-up technique (e.g., etching, machining or the like for removal, or plating, physical vapor deposition, chemical vapor deposition, plasma deposition, coating, spraying, laminating with or without adhesive or the like, for build-up of spaced walls (not shown) for defining a trench).


According to FIG. 6c, the resonator 412 is placed in the trench so that the free portion projects away from the first layer 462. Though it may be possible to mechanically fasten the resonator into the trench, or to adhesively bond it in place, FIG. 6d illustrates the placement of a second layer 464 over at least a portion of the first layer 462. The second layer may be fabricated on the first layer using any suitable technique such as attaching a preformed layer, such as by laminating with or without an adhesive, plating, physical vapor deposition, chemical vapor deposition, plasma deposition, coating, spraying, or the like. At this point the multi-layer holder 460 is complete and may be implemented into a further assembly. In FIG. 6e, there is shown one illustration of how the holder 460 may be incorporated into a further assembly, such as by attachment (e.g., via welding, adhesive bonding, wire bonding or the like). In the embodiment of FIG. 6e, a shield device 466 is fabricated to include a protective shield for the free portion of the resonator, while still maintaining the free portion 414 exposed for sensing. Thus, a lower portion 468 is assembled with an upper portion 470 about the resonator 412. Either or both of the lower portion 468 or the upper portion 470 may include a window that exposes the free end for sensing. The lower portion 468, the upper portion 470 or both may be pre-fabricated to include a suitable cavity 472 for receiving the resonator. The lower portion 468 and the upper portion 470 might also be fabricated separately, or as a single unit (e.g., as a molded plastic clam-shell type package). Though shown in FIG. 6e as being carried by a common platform 418, the holder 460 and shield device 466 may be maintained upon separate support surfaces.



FIG. 7 illustrates a side view of an assembly 510 in which a sensor 570 including a resonator is attached directly to another device, particularly an ASIC device 572. Though shown mounted on an outer surface 574 of the ASIC device 572, the sensor may penetrate through such an outer surface to an interior of the ASIC device. Attachment of the sensor to the ASIC device may be by any suitable technique, such as (without limitation) via welding, adhesive bonding, wire bonding or the like. The sensor 570 may simply include a resonator, or it may also be an assembly that includes additional packaging, such as that depicted in the various other embodiments as shown herein (e.g., as in FIGS. 1-6d and 8a-8d).


Turning now to FIGS. 8a-8d, there is shown yet another embodiment of the present invention in which an assembly 610 includes a first portion 680 and a second portion 682 that are attached together in a later-stage assembly step to enclose the assembly while leave a free portion 614 of resonator 612 exposed for sensing. It should be realized that a suitable shield device, such as shown in FIG. 6e may likewise be employed with the present assembly 610. As seen in FIG. 8a, preferably at least one (or both) of the first or second portions will be configured to include a well 616 for receiving components. Optionally, it may also have a suitable wall structure for defining a opening 618, through or on which the resonator 612 may be placed.


In FIG. 8b a first internal component 620 is placed in the well 616. In the step shown in FIG. 8c, a second internal component 622 (which may be pre-attached to or otherwise integrated into the first component, or omitted altogether) is placed in the well 616. Optionally, an electrical conductor 624 (e.g., wires, traces or otherwise) is attached to either or both of the first or second internal components. Pursuant to FIG. 8d, the resonator is connected with the electrical conductor, the second portion 682 is secured to the first portion (e.g., mechanically, by welding, by adhesive bonding or otherwise), and the well is optionally filled with an inert substance 684 (e.g., a gas, a gel, a liquid or otherwise).


Thereafter, the resulting assembly can be further handled (e.g., for placement on a common platform with an ASIC, for placement on an ASIC (as in FIG. 7) or otherwise), such as for attachment to a platform or to hardware for securing it in place in the intended sensing environment. It should be recognized that either of the first or second components might be an ASIC component.


As discussed in the above, in certain embodiments of the present invention it is preferable that a spacing be maintained between the free portion of any resonator and any adjacent structure. The amount of such spacing is not critical, and may vary depending upon the nature of the particular application. However, in the context of a preferred embodiment employing a tuning fork resonator, in order to help avoid the potential for electrical interference with the operation of the resonator, it is preferred that the spacing be at least one width of a tine of the tuning fork.


In any of the embodiments discussed herein, it is also possible that one or more additional structures are added to the assembly in order to help improve performance or functionality of the resulting device. For example, in one embodiment, the assembly includes a well or other suitable passage that is in direct fluid communication with the resonator and into which a calibration fluid can be introduced for the purpose of calibrating the sensor. It is also contemplated that the assembly may include a structure that substantially envelops the resonator for assisting to preserve electrical characteristics. For example, a wire mesh 25 or other like cover may be provided about the resonator as a Faraday cage, as illustrated schematically in FIG. 1. Other alternative structures may also be employed, such as the metallization of a region that at least partially surrounds the resonator. This can be employed in any of the above embodiments, including for example the embodiments of FIGS. 1-3 that employ a housing structure, or the embodiments of FIGS. 6a-6e and 8a-8d that might employ a shield device (which shield device, of course, may also be adapted for employment with a housing such as in FIGS. 1-3).


It should be appreciated that the functions that are described herein may be performed as part of a single integrated package, or they may be spread over a plurality of different components that may or may not be supported by a common platform.


Further, the present invention also contemplates the incorporation of one or more additional sensors apart from the resonator sensors described herein. For example, one embodiment contemplates the inclusion in an assembly of a sensor or other device for monitoring temperature, such as a thermistor, an RTD or other such temperature sensor (FIG. 3b). In this manner, it is contemplated that all of the data necessary for a calculation of viscosity, for example, can be obtained in a single assembly, which in turn can be interfaced with a suitable microprocessor.


It should be recognized that the present invention contemplates not only the methods employed for fabricating the assemblies of the present invention, but also the assemblies themselves, independent of the methods employed for fabrication. Thus the present invention contemplates sensor assemblies that include a resonator having a free portion with a sensing surface is incorporated onto a platform, wherein components of the sensor are physically shielded from harsh operating conditions, a spacing is maintained between the free portion of the resonator and the platform, and the sensing surface of the resonator is exposed for sensing.


The assemblies of the present invention may also be provided with suitable hardware for securing the assembly to another component, such as hardware for securing the assembly in an automotive vehicle engine or within a conduit, tank, or other structure for carrying a fluid.


It should also be recognized that even if not described in connection with one of the above embodiments, it is possible to combine steps from one of the embodiments shown with the other embodiments shown. For example, for each of the embodiments, it is contemplated that a protective layer may be applied over at least a portion of the resulting assemblies. This can be done by overmolding, coating or other art-disclosed techniques for protecting delicate hardware from the effects of intended operating conditions. Additionally, even if not shown, each of the embodiments might be further assembled onto a platform alone or with other components using art-disclosed attachment techniques (e.g., via welding, adhesive bonding, wire bonding or the like).


It should also be recognized that single layers shown herein may be split into additional layers to form more than the number of layers shown, or combined with other layers to form less than the number of layers shown. All such variations are contemplated within the scope of the present invention.


Further, the disclosure herein of a particular shape or orientation of a component is not intended as limiting. Though it is expected that many embodiments will employ relatively thin and flat structures, the components may also be fabricated or arranged so that the resulting structure has a curvature, a relatively thick profile, or a combination thereof (e.g., an assembly including a resonator and protective carrier structure that has a ratio of its largest to its smallest dimension of about 1:1 to about 4:1).


Finally, the omission herein in any particular embodiment of any discussion of electrical connections or other hardware for signally connecting the assemblies herein with other electronic components is not intended as limiting. It should be recognized that a variety of art-disclosed hardware configurations may be employed in each instance, such as the use of wires, traces, conductive metal filled vias, combinations thereof or the like.


As discussed above, the sensor may be a mechanical resonator, such as is disclosed for example in U.S. Pat. No. 7,210,332 incorporated by reference herein. The mechanical resonator has a resonator portion for resonating in a fluid and an electrical connection between the resonator portion and a source of a signal input. The resonator portion, the electrical connection or both include a base material and a performance-tuning material. The base material may include quartz, lithium niobate, zinc oxide, lead zirconate titanate (PZT), gallo-germanates (e.g., Langanite (La.3Ga.5SiO.14), Langanite, or Langatate), diomignite (lithium tetraborate), bismuth germanium oxide gallium phosphate, gallium nitride, aluminum nitride or combinations thereof. The performance-tuning material may include polymers, ceramics, metals, metal carbides or nitrides, diamond, diamond-like carbon, and combinations thereof.


The mechanical resonator may be connected to a measuring system that sends a variable frequency input signal, such as a sinusoidal wave, that sweeps over a predetermined frequency range, preferably less than about 100 kHz (e.g., in the 25-30 kHz range) for a tuning fork resonator and in a higher range for the TSM resonator. The resonator response over the frequency range is then monitored to determine selected physical and electrical properties of the fluid. Absolute values may be obtained if desired, as may relative, comparative or index values. Additionally, it is possible also that the system may be employed with determining whether a certain threshold criteria is met in the fluid being analyzed.


The hardware for the present measuring system may be any suitable hardware. It may include, for example, art-disclosed network analyzers, see, e.g., U.S. Pat. No. 6,336,353 (Matsiev, et al.) (“Method And Apparatus For Characterizing Materials By Using A Mechanical Resonator”); and U.S. Pat. No. 6,182,499 (McFarland, et al.) and U.S. Pat. No. 7,302,830, hereby incorporated by reference. The hardware might also be part of an application specific integrated circuit (ASIC), such as is disclosed for example in U.S. Pat. No. 7,043,969, hereby incorporated by reference, as disclosed in U.S. Pat. No. 6,873,916, hereby incorporated by reference, as disclosed in the application entitled “Resonator Sensor Assembly” (published as U.S. Pat. App. No. 20040250622 (now abandoned), as disclosed in the application entitled “Environmental Control System Fluid Sensing System And Method” (published International Patent Application No. US03/32983) or as disclosed in U.S. Pat. No. 7,210,332. All of the foregoing are hereby incorporated by reference.


Generally, the hardware for measuring system provides a versatile fluid sensing system. More specifically, the hardware provides a fluid sensing system for machines that rely upon the presence, condition or both of a fluid to maintain efficient operation, such as (without limitation) a synthetic or natural engine oil. In an automotive application, the user is provided with the ability to determine the actual condition (e.g. or the relative deviation of the state of the engine oil from its initial or virgin state) of the engine oil at any particular time, including during operation. Alternatively, in conjunction with assessing fluid condition, the hardware may also determine the amount of fluid remaining in a reserve of an assembly. This advantageously allows machine operators to extend the duration between fluid service events, while helping to assure continued operational integrity of a machine.


Any dynamic assembly that depends on fluids to operate (e.g., where friction and heat are of a concern), will benefit from hardware capable sensing the state of a fluid. For instance, the ability to dynamically monitor fluid condition, process data obtained from the monitoring, and report characteristics of the fluid to an interface or operator can have many applications. Assemblies that may benefit from the defined embodiments of the present invention are many, and can include without limitation, engines in general, automobiles, heavy machinery, military equipment, airplane parts, oil drilling, exploration and production well logging, oil refining, pipeline and quality control applications, marine transportation, sub-sea exploration and aerospace related equipment, or any other fluid containing application. In addition, contemplated methods include a step of assembling the hardware into a device that is incorporated into engines in general, automobiles, heavy machinery, military equipment, airplanes, oil drilling, exploration and production well logging equipment, oil refining, pipeline and quality control equipment, marine transportation equipment, sub-sea exploration and aerospace related equipment, or any other equipment that utilizes fluids for operations.


In the automotive field, numerous components require lubrication, which is not limited to engine oil. For example, other automotive components may include the transmission, the transfer case, the differential, etc. Still further, the sensing system may further be used to determined the quality and amount of other fluids which are not necessarily used predominantly as a lubricant, including: brake fluids, steering fluids, antifreeze fluids, refrigerant fluids, windshield washer fluids, or any other fluid located in an automotive system.


In one embodiment of suitable hardware, an oil sensing system is used to determine the component characteristics and amount of engine oil. In an automotive application, the oil sensing system will provide a user, at a minimum, with a warning as to the need to change the oil (such as owing to the presence of contaminants, a breakdown or loss of useful ingredients or otherwise). In such an application, the warning is essentially informing the user of the automobile that the engine oil has reaches a quality level or condition that is lower than that recommend by the automobile's manufacturer (or set by the oil manufacturer).


The fluid sensing system preferably uses a mechanical resonator as the fluid sensor in accordance with the present invention. The mechanical resonator is at least partially contained in the fluid under-test. To monitor the condition of the fluid under-test (i.e., engine oil), the mechanical resonator is provided with electrical energy through a frequency generator. The frequency generator is designed to apply a frequency signal (to the mechanical resonator) that is swept over a predetermined frequency range. Electronics are then used to detect the response signal from the mechanical resonator and process the signal to ascertain characteristics of the fluid under-test. In an embodiment of the fluid sensing system, the electronics are provided in the form of an application specific integrated circuit (ASIC). In addition, the hardware might also be part of or include a field programmable gate array (FPGA).


In the foregoing description, numerous specific details are set forth in order to provide a thorough understanding of the fluid sensing system, hardware and mechanical resonator that may be used with the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well known process steps have not been described in detail in order not to unnecessarily obscure the present invention.


The manner of operating the resonators and sensors of the present invention may vary. In one embodiment, the sensor is operated continuously. In another, it may be intermittently operated. It is possible that the sensor may be operated only in preselected conditions, such as prior to starting vehicle operation, upon starting vehicle operation, during vehicle operation upon concluding vehicle operation, while the vehicle travels at a substantially constant velocity, while the vehicle accelerates or decelerates, or otherwise.


It should be understood that various alternatives to the embodiments of the invention described herein may be employed in practicing the invention. It is intended that the following claims define the scope of the invention and that the methods and apparatus within the scope of these claims and their equivalents be covered thereby. To the extent that the particular combinations of steps and materials covered by the following claims are not disclosed in the specification, the combinations of steps and materials are incorporated by reference into the specification.

Claims
  • 1. A method of packaging a sensor, the method comprising: affixing a tuning fork to a platform, the tuning fork having tines comprising one or more surfaces, each tine further comprising an electrode and a piezoelectric material, and wherein the electrodes of the tines are positioned to apply electric fields to the piezoelectric materials in the respective tines to move the tines relative to the platform to displace a fluid in contact with the tines;affixing an application specific integrated circuit (ASIC) to the platform;providing electrical communication between the ASIC and the electrode of each tine for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork; andapplying a protective layer covering the platform and a portion of the tuning fork while maintaining a portion of a surface of each tine free from the protective layer such that the surface can displace the fluid in contact therewith.
  • 2. The method of claim 1, wherein the protective layer is selectively applied by spraying, brushing, over molding, laminating or by combinations thereof.
  • 3. The method of claim 2, further comprising blocking the surface with a removable protective barrier prior to applying the protective layer.
  • 4. The method of claim 3, wherein the removable protective barrier is a consumable barrier that comprises a polymer, starch, wax, salt or other dissolvable crystal, low melting point metal, a photoresist, or another sacrificial material.
  • 5. The method of claim 3 wherein the removable protective barrier is a reusable barrier that comprises a relatively soft material that will not plastically deform the tuning fork if it contacts the tuning fork.
  • 6. The method of claim 1, further comprising affixing a secondary component on the platform and spaced from the ASIC, the secondary component including one or more of a temperature sensor, a field programmable gate array, a calibration unit, a resistor, a capacitor, an amplifier, and a filter.
  • 7. The method of claim 6, further comprising providing electrical communication between the ASIC and the secondary component.
  • 8. The method of claim 6, wherein the second component is one of a temperature sensor, a field programmable gate array and an amplifier.
  • 9. The method of claim 1, further comprising at least partially protecting the tuning fork from ambient or operational conditions through the use of a housing.
  • 10. The method of claim 1, further comprising operating the tuning fork at temperatures between about −60° C. and about 300° C.
  • 11. The method of claim 1, wherein the tuning fork has a length or width smaller than about 5 mm.
  • 12. The method of claim 1, wherein the platform having the tuning fork and the ASIC affixed thereto defines a package, the package having a volume of about less than about 15 cm3.
  • 13. The method of claim 1, wherein the platform having the tuning fork and the ASIC affixed thereto defines a package, the package having a footprint of about less than about 40 cm2.
  • 14. A method of assembling a fluid sensor, the method comprising: disposing a flexure resonator on a base, the flexure resonator comprising at least two prongs each having an electrode;disposing a control circuit on the base;applying a protective layer covering the base and the flexure resonator;blocking a portion of the flexure resonator with a removable protective barrier prior to applying the protective layer; andoperatively connecting the control circuit to the electrodes for at least one of transmitting a signal to and receiving a signal from the flexure resonator.
  • 15. The method of claim 14, further comprising disposing a Faraday cage around the flexure resonator.
  • 16. The method of claim 14, further comprising placing the sensor in one of an engine, a transmission, a transfer case, a differential, a brake system, a steering system, an antifreeze system, a heating and cooling system, a washer system, or combinations thereof.
  • 17. The method of claim 14, further comprising placing the sensor in one of a lubricant, a brake fluid, a steering fluid, an antifreeze fluid, a refrigerant fluid, a washer fluid, or combinations thereof.
Priority Claims (1)
Number Date Country Kind
WO2004/086003 Mar 2003 WO international
CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional of co-pending U.S. patent application Ser. No. 10/550,075 entitled RESONATOR SENSOR ASSEMBLY, which application is a U.S. national stage of International Application No. PCT/US04/08552, filed Mar. 19, 2004, which application further claims the benefit of U.S. Provisional Application No. 60/456,517 entitled RESONATOR SENSOR ASSEMBLY, filed on Mar. 21, 2003, the entire contents of all of which are herein incorporated by reference for all purposes.

US Referenced Citations (213)
Number Name Date Kind
3273377 Testerman et al. Sep 1966 A
3622968 Silverman Nov 1971 A
3710275 Tanaka et al. Jan 1973 A
3718032 Gray Feb 1973 A
3762197 Roof et al. Oct 1973 A
3778757 Houston Dec 1973 A
3902365 Knauth Sep 1975 A
3903732 Rork et al. Sep 1975 A
3921622 Cole Nov 1975 A
3926271 Patashnick Dec 1975 A
4103224 Taro et al. Jul 1978 A
4145922 Estrada, Jr. et al. Mar 1979 A
4312228 Wohltjen Jan 1982 A
4342936 Marcus et al. Aug 1982 A
4349881 November et al. Sep 1982 A
4361026 Muller et al. Nov 1982 A
4370662 Hou et al. Jan 1983 A
4391338 Patashnick et al. Jul 1983 A
4526480 Ward Jul 1985 A
4535620 Cunningham Aug 1985 A
4543829 Lerch Oct 1985 A
4549427 Kolesar, Jr. Oct 1985 A
4596697 Ballato Jun 1986 A
4602498 Glikberg et al. Jul 1986 A
4602505 Kanda et al. Jul 1986 A
4624129 Haynes Nov 1986 A
4644803 Ward Feb 1987 A
4696181 Rupprecht et al. Sep 1987 A
4721874 Emmert Jan 1988 A
4729237 Suzuki et al. Mar 1988 A
4734609 Jasmine Mar 1988 A
4741200 Hammerle May 1988 A
4757228 Kalinoski et al. Jul 1988 A
4760351 Newell et al. Jul 1988 A
4767719 Finlan Aug 1988 A
4779451 Ezawa et al. Oct 1988 A
4782332 Cipris et al. Nov 1988 A
4783987 Hager et al. Nov 1988 A
4802370 EerNisse et al. Feb 1989 A
4802384 Schwarz et al. Feb 1989 A
4812698 Chida et al. Mar 1989 A
4862384 Bujard Aug 1989 A
4890480 Young Jan 1990 A
4893496 Bau et al. Jan 1990 A
4904978 Barth et al. Feb 1990 A
4910523 Huguenin et al. Mar 1990 A
4922745 Rudkin et al. May 1990 A
4945634 Kumada Aug 1990 A
4970492 King Nov 1990 A
5006845 Calcar et al. Apr 1991 A
5037779 Whalley et al. Aug 1991 A
5179028 Vali et al. Jan 1993 A
5191791 Gerardi et al. Mar 1993 A
5201215 Granstaff et al. Apr 1993 A
5204529 Diatschenko Apr 1993 A
5224174 Schneider et al. Jun 1993 A
5235844 Bonne et al. Aug 1993 A
5243756 Hambergen et al. Sep 1993 A
5253530 Letcher, III Oct 1993 A
5283037 Baer et al. Feb 1994 A
5296374 Culshaw et al. Mar 1994 A
5306644 Myerholtz et al. Apr 1994 A
5325704 Mariani et al. Jul 1994 A
5332961 Hammerle Jul 1994 A
5334900 Kawashima Aug 1994 A
5338416 Mlcak et al. Aug 1994 A
5357964 Spivey et al. Oct 1994 A
5361632 Magnani Nov 1994 A
5375470 Matsushima et al. Dec 1994 A
5405808 Rostoker et al. Apr 1995 A
5408876 Macy Apr 1995 A
5421190 Brandle et al. Jun 1995 A
5434650 Nakahara et al. Jul 1995 A
5435170 Voelker et al. Jul 1995 A
5445008 Wachter et al. Aug 1995 A
5454045 Perkins et al. Sep 1995 A
5455475 Josse et al. Oct 1995 A
5464509 Mlcak et al. Nov 1995 A
5469369 Rose-Pehrsson et al. Nov 1995 A
5477726 Stabinger et al. Dec 1995 A
5488866 Ravel et al. Feb 1996 A
5524477 Wajid Jun 1996 A
5524636 Sarvazyan et al. Jun 1996 A
5531091 Gademann et al. Jul 1996 A
5533402 Sarvazyan et al. Jul 1996 A
5559291 Hasegawa Sep 1996 A
5571401 Lewis et al. Nov 1996 A
5592130 Ikeda et al. Jan 1997 A
5604441 Freese et al. Feb 1997 A
5610335 Shaw et al. Mar 1997 A
5622223 Vasquez Apr 1997 A
5653939 Hollis et al. Aug 1997 A
5661233 Spates et al. Aug 1997 A
5670709 Gallagher Sep 1997 A
5693884 Kato Dec 1997 A
5698089 Lewis et al. Dec 1997 A
5705399 Larue Jan 1998 A
5734098 Kraus et al. Mar 1998 A
5741961 Martin et al. Apr 1998 A
5744902 Vig Apr 1998 A
5770038 Iwama et al. Jun 1998 A
5776359 Schultz et al. Jul 1998 A
5777210 Voelker et al. Jul 1998 A
5789665 Voelker et al. Aug 1998 A
5792938 Gokhfeld Aug 1998 A
5798452 Martin et al. Aug 1998 A
5818731 Mittal et al. Oct 1998 A
5827952 Mansure et al. Oct 1998 A
5852229 Josse et al. Dec 1998 A
5877411 Namerikawa et al. Mar 1999 A
5885849 DiStefano et al. Mar 1999 A
5889351 Okumura et al. Mar 1999 A
5915499 Few Jun 1999 A
5918354 Ikegami et al. Jul 1999 A
5939631 Moore Aug 1999 A
5959247 Armstrong et al. Sep 1999 A
5959297 Weinberg et al. Sep 1999 A
5985356 Schultz et al. Nov 1999 A
6023961 Discenzo et al. Feb 2000 A
6034775 McFarland et al. Mar 2000 A
6041642 Duncan Mar 2000 A
6044694 Anderson et al. Apr 2000 A
6047590 Namerikawa et al. Apr 2000 A
6082894 Batko et al. Jul 2000 A
6126311 Schuh Oct 2000 A
6151123 Nielsen Nov 2000 A
6155098 Shapiro et al. Dec 2000 A
6157449 Hajduk Dec 2000 A
6175409 Nielsen et al. Jan 2001 B1
6176131 Hecht et al. Jan 2001 B1
6176323 Weirich et al. Jan 2001 B1
6182499 McFarland et al. Feb 2001 B1
6196057 Discenzo Mar 2001 B1
6223589 Dickert et al. May 2001 B1
6231811 Namerikawa et al. May 2001 B1
6247354 Vig et al. Jun 2001 B1
6260407 Petro et al. Jul 2001 B1
6260408 Vig et al. Jul 2001 B1
6265226 Petro et al. Jul 2001 B1
6269686 Hahn et al. Aug 2001 B1
6275137 Doppalapudi et al. Aug 2001 B1
6286363 Discenzo Sep 2001 B1
6294388 Petro Sep 2001 B1
6296771 Miroslav Oct 2001 B1
6306358 Yamamoto Oct 2001 B1
6311549 Thundat et al. Nov 2001 B1
6327890 Galipeau et al. Dec 2001 B1
6336353 Matsiev et al. Jan 2002 B2
6371640 Hajduk et al. Apr 2002 B1
6389690 McCullough et al. May 2002 B1
6393895 Matsiev et al. May 2002 B1
6401519 McFarland et al. Jun 2002 B1
6406632 Safir et al. Jun 2002 B1
6407479 Moellendorf et al. Jun 2002 B1
6412131 Zhao et al. Jul 2002 B1
6441716 Doppalapudi et al. Aug 2002 B1
6456096 Ericson et al. Sep 2002 B1
6459995 Collister Oct 2002 B1
6490911 Namerikawa et al. Dec 2002 B1
6494079 Matsiev et al. Dec 2002 B1
6507945 Rust et al. Jan 2003 B1
6509749 Buelna et al. Jan 2003 B1
6511915 Mlcak Jan 2003 B2
6519034 Engler et al. Feb 2003 B1
6535001 Wang Mar 2003 B1
6536259 Mattes Mar 2003 B2
6536634 Berndorfer et al. Mar 2003 B2
6545392 Kawauchi et al. Apr 2003 B2
6557396 Ismail et al. May 2003 B2
6564126 Lin et al. May 2003 B1
6575020 de Charmoy Grey et al. Jun 2003 B1
6626025 Potyrailo et al. Sep 2003 B2
6640644 Mireles et al. Nov 2003 B1
6644095 Van Mullekom et al. Nov 2003 B2
6658429 Dorsett, Jr. Dec 2003 B2
6661162 Nagai et al. Dec 2003 B1
6664067 Hajduk et al. Dec 2003 B1
6873916 Kolosov et al. Mar 2005 B2
6928877 Carlson et al. Aug 2005 B2
7100427 Kahn et al. Sep 2006 B2
7171849 Kandler Feb 2007 B2
7210332 Kolosov et May 2007 B2
7254990 Matsiev et al. Aug 2007 B2
7294540 Lee et al. Nov 2007 B2
7350367 Matsiev et al. Apr 2008 B2
7634937 Burdett et al. Dec 2009 B2
20010010174 Matsiev et al. Aug 2001 A1
20020029900 Wimberger Friedl et al. Mar 2002 A1
20020064649 Lembke et al. May 2002 A1
20020068488 Tuller et al. Jun 2002 A1
20020070841 Doppalapudi et al. Jun 2002 A1
20020074897 Ma et al. Jun 2002 A1
20020092340 Prater et al. Jul 2002 A1
20020113596 Horie et al. Aug 2002 A1
20020121132 Breed et al. Sep 2002 A1
20020137348 Mlcak Sep 2002 A1
20020148529 Berndorfer et al. Oct 2002 A1
20020162385 Ismail et al. Nov 2002 A1
20020178787 Matsiev et al. Dec 2002 A1
20020178805 DiFoggio et al. Dec 2002 A1
20020194906 Goodwin et al. Dec 2002 A1
20030000291 Kolosov et al. Jan 2003 A1
20030041653 Matsiev et al. Mar 2003 A1
20030041659 Marszalek et al. Mar 2003 A1
20030053516 Atherton Mar 2003 A1
20030062910 Wang et al. Apr 2003 A1
20030083825 Berndorfer May 2003 A1
20030116497 Carlson et al. Jun 2003 A1
20030118078 Carlson et al. Jun 2003 A1
20030119060 Desrosiers et al. Jun 2003 A1
20030233886 Uramachi et al. Dec 2003 A1
20040250622 Kolosov et al. Dec 2004 A1
20070245811 Discenzo Oct 2007 A1
Foreign Referenced Citations (21)
Number Date Country
4424422 Jul 1994 DE
10014724 Sep 2001 DE
0282251 Sep 1988 EP
0317356 Jan 1993 EP
0282251 Feb 1993 EP
0676638 Oct 1995 EP
0769695 Apr 1997 EP
0779510 Jun 1997 EP
0813236 Dec 1997 EP
2067009 Jul 1981 GB
2114745 Aug 1983 GB
2187286 Sep 1987 GB
59126931 Jul 1984 JP
60018743 Jan 1985 JP
60134617 Jul 1985 JP
402161323 Jun 1990 JP
5129874 May 1993 JP
8112613 May 1996 JP
11094726 Apr 1999 JP
11145758 May 1999 JP
9801739 Jan 1998 WO
Non-Patent Literature Citations (77)
Entry
M. R. Fisch, R.P. Moeller & E. F. Carome, “Improved Acoustic Viscosimeter Technique”, 1976.
“Sensors”, Fraunhofer Verbund Mikroelektronik, Oct. 3, 2002.
“Smart Sensor System for Trace Organophosphorus and Organosulfur Vapor Detection Employing a Temperature-Controlled Array of Surface Acoustic Wave Sensors, Automated Sample Preconcentration, and Pattern Recognition”, American Chemical Society, 1993.
“Measurement of Viscosity and Shear Wave Velocity of a Liquid or Slurry for On-Line Process Control”, Ultrasonics 39 (2002) 623-630, 2002.
“On-Line Sensor for Density and Viscosity Measurements of a Liquid or Slurry for Process Control in the Food Industry”, 2004.
“An Acoustic Automotive Engine Oil Quality Sensor”, 1977, IEEE International Frequency Control Symposium, 1997.
J.M. Hammond, “Sensor”, 1997.
P. Hauptmann, “Ultrasonic Sensors for Process Monitoring and Chemical Analysis, State-of-the-Art and Trends”, 1998.
“Refrigerant Flow in Evaporators”, OEM Products, Feb. 5, 2004.
“Applications of the Piezoelectric Crystal Detector in Analytical Chemistry”, 1890 Analytical Chemistry, vol. 49, No. 13, Nov. 1977.
“Surface Acoustic Wave Hygrometer: Measuring Water Vapor in Earth's Atmosphere”, http://mishkin.jpl.nasa.gov/spacemicro/MWS PAPER, Mar. 6, 2002.
“SOS Smart Oil Sensor” Impact Technologies, LLC, 2003.
“Viscosity Sensing Using a Love-Wave Device”, Sensors and Actuators A 68 (1998) 275-281, 1998.
“Lecture Notes on Shear and Friction Force Detection with Quartz Tuning Forks” by Khaled Karrai, Mar. 2000.
“Network Analysis Method Applied to Liquid-Phase Acoustic Wave Sensors”, 1990 American Chemical Society, 1990.
“Device for the Investigation of the Humidity-Related Behaviors of Materials”, Department of Physics, 1986.
“Theory of the Vibrating Tuning Fork Fluid Density Tool”, May 7, 2003.
“Fluid Mechanics” by L.D. Landau and E. M. Lifshitz, Addison-Wesley Publishing Company, Inc., 1959.
“Vibratory Process Control Transducers” by R.M. Langdon, Ph.D., 2004.
“A Remote Acoustic Engine Oil Quality Sensor”, 1997 IEEE, 1997.
“Electromechanical Behavior of PZT—Brass Unimorphs”, 1999.
“Operation of an Ultrasensitive 30-MHz Quartz Crystal Microbalance in Liquids” Anal. Chem 1993, 65, 1545-1551, 1993.
“Two-Dimensional Micromechanical Bimorph Arrays for Detection of Thermal Radiation”, American Institute of Physics, Jun. 17, 1997.
“Viscosity and Density Sensing with Ultrasonic Plate Waves”, Sensors and Actuators, A21-A23, 1990.
“Measurement of the Viscosity and Shear Elasticity of Liquids by Means of a Torsionally Vibrating Crystal”, by W.P. Mason, Murray Hill, N.J., Jan. 29, 2004.
“Application of Flexural Mechanical Resonators to Simultaneous Measurements of Liquid Density and Viscosity”, L.F. Matsiev, 1998.
“Theory of Electroacoustics”, McGraw-Hill International Book Company, 1981.
1 MHz Quartz Length Extension Resonator as a Probe for Scanning Near-Field Acoustic Microscopy, Thin Solid Films 264 (1995) 172-175, 1995.
“Computation of Equivalent Circuit Parameters of Quartz Crystals in Contact with Liquids and Study of Liquid Properties”, American Chemical Society, 1988.
“Viscosity Monitoring with a Piezoelectric Quartz Crystal and its Application to Determination of Endotoxin by Gelatin of Limulus Amebocyte Lysate”, Elsevier Science Publishers B.V., 1988.
“High Throughput Experimentation for the Synthesis of New Crystalline Microporous Solids”, Microporous and Mesoporous Materials 48 (2001) 355-365, 2001.
Electrolytic Determination of Nanomolar Concentrations of Silver in Solution with a Piezoelectric Quartz Crystal, Analytica Chimica Acta, 131 (1981) 97-102, 1981.
“Harsh Environment Fluid Viscosity-Density Sensor”, http://www.fastlane.nsf.gov/servlet/showaward?award=0239151, Feb. 5, 2004.
“An Accurate Non-Radioactive Fluid Density Sensor”, by Chris Nussbaum, Apr. 1, 2003.
“Viscous Drag Measurements Utilizing Microfabricated Cantilevers”, American Institute of Physics, 1996.
“The Lubri-Sensor Electronic Oil Quality Analyser”, http://www.pmlubricants.com.au/pm—lube—concept/lubrisensor.htm, Oct. 3, 2002.
“Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems”, Annual Reviews, 1998.
“Reliable Ceramics for Advanced Heat Engines”, American Ceramic Society Bulletin, vol. 74, No. 4, Apr. 1995.
“Frequency Response of Cantilever Beams Immersed in Viscous Fluids with Applications to the Atomic Force Microscope”, Journal of Applied Physics, vol. 84, No. 1, Jul. 1, 1998.
“A New Method Based on Acoustic Impedance Measurements for Quartz Immunosensors”, Sensors and Actuators B 43 (1997) 217-223, 1997.
“Simultaneous Liquid Viscosity and Density Determination with Piezoelectric Unimorph Cantilevers”, Journal of Applied Physics, vol. 89, No. 2, Jan. 15, 2001.
“Sinims Oil and Gas Workshop”, ICMS, Edinburgh, Mar. 11, 2002.
“Water Sorption Isotherms and Enthalpies of Water Sorption by Lysozyme using the Quartz Crystal Microbalance/Heat Conduction Calorimeter”, Biochimica et Biophysica Acta 1594 (2002) 150-159, 2002.
“A Vibrating Tuning Fork Fluid Density Tool”, Smith Institute, Feb. 5, 2004.
“Engine Oil Viscosity Sensors Using Disks of PZT Ceramic as Electromechanical Vibrators”, SAE Technical Paper Series, May 8, 1997.
“Surface Acoustic Wave (SAW) Hygrometer (Micro Weather Station)”, TAP: Gallery, Mar. 16, 2002.
“Preparation of Chemically Etched Piezoelectric Resonators for Density Meters and Viscometers”, Mat. Res. Bull., vol. 22, pp. 1267-1274, 1987.
“Crimpen-eine ausgereifte Anschlubtechnik”, F & M Elektromechanik. vol. 107, 4. 1999.
“Sensor Technology Improves Jet Engine Reliability”, http://www.afrlhorizons.com/Briefs/June01/PR0003.html, Oct. 3, 2002.
“Oil Quality Sensor” Automotive Engineering International Online, http:www.sae.org/automag/top50prod/17.htm, Feb. 5, 2004, 1 pg.
“An in vitro urea sensor using a torsion-wave crystal device”, Sensor and Actuators B, 8 (1992) 143-149, 1992.
“Viscosity Sensor Based on a Symmetric Dual Quartz Thickness Shear Resonator” 2003 IEEE.
“Elemente der Angewandten Elektronik”, Friedr. Vieweg & Sohn, Jan. 29, 2004.
“Micromachined Viscosity Sensor for Real-Time Polymerization Monitoring” Transducers '97, Jun. 1997.
“Resonance Response of Scanning Force Microscopy Cantilevers”, American Institute of Physics, Aug. 1994.
“CJV-5000 Vibro Viscometer Utilizing Tuning-Fork Technology”, Jun. 18, 2003.
“Fabrication of High Frequency Nanometer Scale Mechanical Resonators from Bulk Si Crystals”, A.N. Cleland and M. L. Roukes, American Institute of Physics, Oct. 28, 1996.
Delphi, “Sensors and Actuators Intellek Oil Condition Sensor”, 2002.
“Integrated On-Line Multisensing of Fluid Flow Using a Mechanical Resonator” Sensors and Actuators, 2000.
Electronic Devices “Epson presents the MC-30A: Reliable 32.768kHz Dedicated to Automotive Applications”, Aug. 25, 2003.
“Viscoelastic Properties of Polymers” John D. Ferry, Third Edition, John Wiley & Sons, Inc., 1980.
“Field Trials of the Viscosity & fluid Density Tool (VFD)” Nan Gall Technology, Aug. 2002.
“On-line Monitoring of the Viscosity in Dextran Fermentation Using Piezoelectric Quartz Crystal”, Biotechnology and Bioengineering, vol. 36, pp. 636-641, Mar. 12, 1990.
“Evaluation of an Equivalent Circuit Model for Thickness-Shear Mode Resonators in Liquids”, VTT, Chemical Technology, Polymer and Fibre Technology, Sep. 1996.
“Cantilever Sensor Research Tool for Science and Industry”, diScentris, 2003.
“A Precise and Robust Quartz Sensor Based on Tuning Fork Technology for (SF6)—Gas Density Control”, Sensors and Actuators 80, 2000.
“Contributions of Amplitude Measurement in QCM Sensors”, Chao Zhang and Guanping Feng, IEEE, 1996.
“Determination of Liquid Density with a Low Frequency Mechanical Sensor Based on Quartz Tuning Fork”, Sensors and Actuators B 84, 2002.
U.S. Appl. No. 09/550,549 entitled “Automated Process Control and Data management System and Methods” (Crevier et al.), Apr. 14, 2000.
“Combinatorial Chemistry—The Emperors's New Clothes?”, Microporous and Mesoporous Materials, 48 (2001), pp. 367-373.
K. Kanazawa et al., “The Oscillation Frequency of a Quartz Resonator in Contact With a Liquid”, Jun. 22, 1984.
H. Muramatsu et al., “A quartz crystal viscosity sensor for monitoring coagulation reaction and its application to a multichannel coagulation detector”, May 4, 1990.
N. Hagood IV et al., “Development of Micro-Hydraulic Transducer Technology”, Jan. 1, 2000.
A. Fleming, “The vibrating tuning fork fluid density tool”, Jan. 1, 2002.
Kavlico, “Our Sensors Are the Solution!”, available at least as of Dec. 28, 2005.
PuuMan, “Hygroscopicity Measurement Apparatus”, available at least as of Dec. 28, 2005.
Senstronics, “The Future of Pressure and Temperature Measurement”, available at least as of Dec. 28, 2005.
Related Publications (1)
Number Date Country
20100218353 A1 Sep 2010 US
Provisional Applications (1)
Number Date Country
60456517 Mar 2003 US
Divisions (1)
Number Date Country
Parent 10550075 US
Child 12783397 US