Claims
- 1. A method of producing an anti-corrosion member having a base member made of a metal in which aluminum is included, ceramics in which aluminum element is included, or a composite member constructed by a metal in which aluminum is included and ceramics, and an anti-corrosion film formed on the base member, comprising the steps of:
setting the base member in a container in which a solid fluorine compound is filled; heating the container at a temperature higher than a decomposition temperature of the fluorine compound to generate a decomposed gas of the fluorine compound and to subject the base member to a heat treatment with the decomposed gas of the fluorine compound; and forming an anti-corrosion film made of a fluoride on a surface of the base member.
- 2. The method according to claim 1, wherein the container is a sealed container.
- 3. The method according to claim 1, wherein the heat treatment is performed at a temperature 0-200° C. higher than the decomposition temperature of the fluorine compound.
- 4. The method according to claim 1, wherein the decomposition temperature of the fluorine compound is 100-300° C.
- 5. The method according to claim 4, wherein the fluorine compound is selected from NaHF2, KHF2 and NH4HF2.
- 6. The method according to claim 1, wherein the fluorine compound does not include a metal element.
- 7. The method according to claim 1, wherein the fluoride at least includes a crystal phase of aluminum fluoride.
- 8. A method of producing an anti-corrosion member having a base member made of a metal in which aluminum is included and an anti-corrosion film formed on the base member, comprising the steps of:
setting the base member in a container in which a solid fluorine compound is filled; heating the container at a temperature higher than a decomposition temperature of the fluorine compound to generate a decomposed gas of the fluorine compound and to subject the base member to a heat treatment with the decomposed gas of the fluorine compound, so that an intermediate film is formed on a surface of the base member; subjecting the base member and the intermediate film to a heat treatment to react the base member and intermediate film with each other; and forming an anti-corrosion film made of a fluoride.
- 9. The method according to claim 8, wherein the heat treatment of the base member and the intermediate film is performed under an atmosphere in which oxygen and inert gas are included.
- 10. The method according to claim 8, wherein the container is a sealed container.
- 11. The method according to claim 8, wherein the fluorine compound is a solid fluorine compound which does not include a metal element at room temperature.
- 12. The method according to claim 11, wherein the fluorine compound is NH4 HF2.
- 13. The method according to claim 8, wherein the intermediate film includes aluminum fluoride ammonium.
- 14. The method according to claim 13, wherein part of the aluminum in the aluminum fluoride ammonium is substituted by another metal.
- 15. A method of producing an anti-corrosion member having a base member made of a metal in which aluminum is included and an anti-corrosion film formed on the base member, comprising the steps of:
subjecting the base member and aluminum fluoride ammonium to a heat treatment under a condition such that the base member is contacted to the aluminum fluoride ammonium to react the base member and the aluminum fluoride ammonium with each other; and forming an anti-corrosion film made of a fluoride.
- 16. The method according to claim 15, wherein part of the aluminum in the aluminum fluoride ammonium is substituted by another metal.
- 17. The method according to claim 15, wherein the heat treatment is performed under a condition such that powders of the aluminum fluoride ammonium are contacted to a surface of the base member.
- 18. The method according to claim 17, wherein the heat treatment is performed under a condition such that the base member is embedded in the powders of the aluminum fluoride ammonium.
- 19. The method according to claim 17, wherein a formed film, in which powders of the aluminum fluoride ammonium are included, is arranged on the base member, and then the formed film and the base member are subjected to a heat treatment.
- 20. The method according to claim 15, wherein the heat treatment for the base member and the aluminum fluoride ammonium is performed under an atmosphere in which oxygen and inert gas are included.
Priority Claims (3)
Number |
Date |
Country |
Kind |
11-023,926 |
Feb 1999 |
JP |
|
11-141,240 |
May 1999 |
JP |
|
11-322,687 |
Nov 1999 |
JP |
|
CROSS REFRENCE TO RELATED APPLICATION
[0001] This application is a division of U.S. application Ser. No. 09/494,987 filed Jan. 31, 2000, the entirety of which is incorporated herein by reference.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09494987 |
Jan 2000 |
US |
Child |
10116426 |
Apr 2002 |
US |