Claims
- 1. A method for manufacturing a formed article of semiconductor material comprising the steps of:
fabricating a mandrel with a forming surface conforming to the desired shape of said article, keeping said forming surface in continuous motion with respect to a thermal spray apparatus, supplying said thermal spray apparatus with a powered form of said semiconductor material, depositing with said thermal spray apparatus a continuous layer of said semiconductor material on said forming surface until said formed article is complete, and separating said formed article from said mandrel.
- 2. A method for manufacturing a formed article according to claim 1, said step of depositing comprising maintaining said continuous layer at not more than about 400 degrees Centigrade.
- 3. A method for manufacturing a formed article according to claim 1, said step of depositing comprising maintaining said continuous layer at not more than about 200° C.
- 4. A method for manufacturing a formed article according to claim 3, said mandrel being fabricated of materials having a higher coefficient of thermal expansion than said semiconductor material within the temperature range of about room temperature to about 200° C., said step of separating further comprising thermally contracting said forming surface of said mandrel away from said formed article.
- 5. A method for manufacturing a formed article according to claim 1, said semiconductor material comprising silicon, said formed article comprising a tubular article.
- 6. A method for manufacturing a thin wall article according to claim 1, said step of fabricating a mandrel comprising fabricating said forming surface as an outer layer upon a mandrel spindle.
- 7. A method for manufacturing a thin wall article according to claim 1, said mandrel comprising materials having a substantially lower melting point than said formed article, said step of separating comprising melting at least said forming surface of said mandrel.
- 8. A method for manufacturing a formed article according to claim 1, said mandrel comprising soluble materials, said step of separating comprising removing by chemical reaction with suitable solvents at least said forming surface of said mandrel.
- 9. A method for manufacturing a formed article according to claim 1, said powdered form comprising particulate matter of a size preferably ranging from 50 to 100 μm mean diameter.
- 10. A method for manufacturing a formed article according to claim 1, said method conducted in a non-oxygen environment.
- 11. A method for manufacturing a formed article according to claim 10, said non-oxygen environment comprising at least one of the group consisting of nitrogen and argon.
- 12. A method for manufacturing a formed article according to claim 1, further comprising the step of
directing a stream of cooling gas on said continuous layer.
- 13. A method for manufacturing a formed article according to claim 1, said step of keeping said forming surface in continuous motion comprising rotation about the axis of said mandrel.
- 14. A method for manufacturing a formed article according to claim 1, said thermal spray apparatus being a plasma spray gun.
- 15. A method for manufacturing a polysilicon tube comprising the steps of:
fabricating a mandrel with a tubular forming surface, rotating said mandrel with respect to a thermal spray apparatus, supplying a powered form of silicon to said thermal spray apparatus, depositing on said tubular forming surface with said thermal spray apparatus a continuous layer of silicon until said polysilicon tube is complete, and separating said polysilicon tube from said mandrel.
- 16. A method for manufacturing a polysilicon tube according to claim 15, said mandrel being fabricated of materials having a higher thermal expansion than said polysilicon within the temperature range of about room temperature to about 200° C., said step of depositing further comprising maintaining said continuous layer at no more than about 200 degrees Centigrade, said step of separating comprising thermally contracting said forming surface of said mandrel away from said tube by lowering the temperature of both.
- 17. A method for manufacturing a polysilicon tube according to claim 15, said step of fabricating a mandrel comprising fabricating said forming surface as an outer layer upon a mandrel spindle, said step of separating said tube from said mandrel comprising removing said outer layer from between said tube and said mandrel spindle.
- 18. A method for manufacturing a polysilicon tube according to claim 15, said forming surface of said mandrel comprising materials having a substantially lower melting point than silicon, said step of separating comprising melting at least said forming surface of said mandrel.
- 19. A method for manufacturing a polysilicon tube according to claim 15, said forming surface comprising soluble materials, said step of separating comprising removing by chemical reaction with suitable solvents at least said forming surface of said mandrel.
- 20. A method for manufacturing a polysilicon tube according to claim 15, said powdered form comprising particulate matter ranging from about 50 to 100 μm mean diameter.
Parent Case Info
[0001] This application claims priority for all purposes to pending U.S. application Ser. No. 60/265,806, filed Jan. 31, 2001.
Provisional Applications (1)
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Number |
Date |
Country |
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60265806 |
Jan 2001 |
US |