Embodiments of the present disclosure relate generally to removing debris from a surface. More particularly, embodiments of the present disclosure relate to using electromagnetic propulsion to remove debris from the surface.
Electromagnetic waves are electromagnetic energy that propagates through a medium and carry energy. Often, electromagnetic waves are used for long-range communication and direction finding, such as for communication by mobile phones and radar systems. Because electromagnetic waves have energy, they may exert a force upon other objects when the two collide.
In one example, an apparatus for electromagnetically removing particles from a surface is described. The apparatus includes a first electronic device having a surface. The apparatus also includes a signal generator configured to generate a skewed signal configured to cause a movement of particles on the surface of the first electronic device. Additionally, the apparatus includes an antenna coupled to the signal generator, where the antenna is configured to receive the skewed signal from the signal generator and radiate the skewed signal as electromagnetic energy proximate to the surface of the first electronic device.
In another example, a method of electromagnetically removing particles from a surface is described. The method includes generating a skewed signal configured to cause a movement in the particles. The method further includes feeding the skewed signal to an antenna. Additionally, the method includes radiating, from the antenna, the skewed signal proximate to the surface.
In another example, another method of electromagnetically removing particles from a surface is described. The method includes determining a size of the particles. The method also includes generating a skewed signal configured to cause a movement in the particles based, at least in part, on the determined size. Additionally, the method includes feeding the skewed signal to an antenna. The method also includes radiating, from the antenna, the skewed signal proximate to the surface.
The features, functions, and advantages that have been discussed can be achieved independently in various embodiments or may be combined in yet other embodiments further details of which can be seen with reference to the following description and drawings.
Example novel features believed characteristic of the illustrative embodiments are set forth in the appended claims. The illustrative embodiments, however, as well as a preferred mode of use, further objectives and descriptions thereof, will best be understood by reference to the following detailed description of an illustrative embodiment of the present disclosure when read in conjunction with the accompanying drawings, wherein:
Disclosed embodiments will now be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all of the disclosed embodiments are shown. Indeed, several different embodiments may be described and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are described so that this disclosure will be thorough and complete and will fully convey the scope of the disclosure to those skilled in the art.
Removing particulate debris from surfaces may pose a difficult challenge in some circumstances. For example, man-made objects in space may collect space dust or other particles on their surface. Similarly, when fabricating silicon wafers, dust or other particles may collect on the surface. Removing these particles without the need for a mechanical removal system may be desirable. A mechanical removal system may be complicated, expensive, damage the surface, and may not be reasonable with small particle sizes, such as a few molecules up to 0.1 micrometers.
The present system may be used for removing particles from a surface, such as a sensor surface or a surface protecting a sensor. Unlike conventional mechanical particle-removing devices and methods, the present disclosure is directed toward using electromagnetic energy to remove particles from the surface. Additionally, some conventional particle-removing system use corona discharge or high-energy plasma for particle removal. The high energy and field levels created by both corona discharge and high-energy plasma may be undesirable for some applications, including applications where power is limited and/or electronic components are sensitive.
Rather than relying on a physical removal of particles, such as through brushing, the present disclosure uses at least one antenna and transmitting a specially-designed waveform to remove the particles from the surface using the Lorentz force. The particles may be pushed by the Lorentz force in the direction of the electromagnetic propagation. Moreover, the waveform may be created to push a wide range of particles with velocities that exceed the velocity that would be achieved by a conventional sinusoidal signal. The antenna may be located proximate to the surface and be configured to transmit electromagnetic energy in a direction of the surface. In some examples, the antenna may be configured to transmit the electromagnetic energy parallel to and across the surface.
In some examples, the surface may have undesired particles or ions located on it, such as dust or other debris. In these examples, the particles may be ionized (i.e., they have a charge and/or are ions). When the electromagnetic energy strikes the charged particle, the electromagnetic energy may impart a force on the particle and cause it to move. In another example, the particle may not inherently have a charge. In this example, a laser (or other device) may impart a charge on the particle to ionize it before the electromagnetic energy causes the particle to move. In yet another example, a laser may be used for laser ablation to remove material from the surface. The electromagnetic energy may be used to move the particles that have been removed from the surface.
In some examples, the surface may be the surface of an electronic device, such as a solid state wafer, a sensor, or other electrical component where removing debris is desirable. In another example, the surface may be a covering or a protective layer on top of a sensor, such as a lens or coating on top of an optical sensor.
The antenna system of the present disclosure may be a single antenna or it may be an array of antennas. The array of antennas may be able to steer a direction of the transmission of electromagnetic energy. Further, in some examples, the antenna system may be able to change a polarization of the transmitted electromagnetic energy. Additionally, the beam from the antennas may be directed in a way where energy transmitted into the electronic device may be minimized.
In some examples, the present system may be triggered to perform the particle-movement operations at predetermined time intervals. In another example, the present system may be triggered to perform the particle-movement operations based on an indication of debris on the surface. The indication may be provided by a camera, a sensor measurement (such as the impairment of a sensor), or a measurement of electrical properties of the surface (as particles may cause a change in the electrical measurements of the surface). In yet another example, the present system may be triggered manually.
Referring now to the figures,
The antenna 102 may be coupled to a signal generator 106. The signal generator 106 may be a piece of hardware that outputs an electromagnetic signal. In some examples, the signal generator 106 may receive an input that specifies parameters of the signal that the signal generator should output. The signal generator 106 may be configured to generate a skewed signal for transmission by the antenna 102. In some examples, the signal generator 106 may include a signal amplifier (not shown) as well. The signal amplifier may be configured to amplify a signal created by the signal generator 106 to a desired transmission power.
Additionally, the antenna 102 or the signal generator 106 may include a filter (not shown). In some other examples, the filter may be a discrete component. The filter may be a tunable filter. The filter may be configured to prevent the antenna from transmitting certain frequencies. The filter may prevent the antenna from transmitting frequencies that can interfere with other components of the system, include a sensor having the surface (or located below the surface), frequencies with which the system communications, or frequencies with which the system makes measurements. Other example frequencies are possible as well. Additionally, in some examples a tunable filter may be controlled by a processor of the system to control which frequencies the filter blocks or passes.
The signal generator 106 may be coupled to a signal controller 108. The signal controller 108 may be a computing device configured to determine the skewed signal. As such, the signal controller 108 may include one or more processors, and instructions stored on non-transitory computer readable medium that are executable by the one or more processors to perform functions of the signal controller 108 described herein. In some examples, the signal controller 108 may be omitted and the signal generator 106 may be able to generate a skewed signal on its own. In another example, the signal controller 108 may be combined with the signal generator 106. In yet another example, the signal controller 108 may be coupled to a camera (not shown). The camera may be used to help determine a particle size.
The signal controller 108 may generate a skewed signal based in part on a size, density, or material properties of the particles. The signal controller 108 may instruct the signal generator 106 with parameters designed to move the particles. For example, the signal controller 108 may specify a waveform or coefficients for a waveform that the signal generator 106 may use to generate the signal for transmission by the antenna 102.
Each antenna from the plurality of antennas may be coupled to a respective signal generator. Antenna 152A may be coupled to a signal generator 156A, antenna 152B may be coupled to a signal generator 156B, and antenna 152X may be coupled to a signal generator 156X. Although the signal generators are shown as separate signal generators, in some examples, there may be one or more signal generators configured to feed multiple antennas.
Each signal generator may be configured to generate a skewed signal for transmission by respective antenna coupled to the signal generator. As previously discussed, the signal generators may include a respective signal amplifier (not shown) as well. The signal amplifier may be configured to amplify a signal created by the signal generator to a desired transmission power.
The signal generators may be coupled to a signal controller 158. The signal controller 158 may be a computing device configured to determine the skewed signal for transmission by each antenna of the plurality of antennas. In some examples, the signal controller 158 may be omitted and the one or more signal generators may be able to generate a skewed signal on their own. In another example, the signal controller 158 may be combined with the plurality of signal generators as a single unit. In yet another example, the signal controller 158 may be coupled to a sensing component (not shown) such as a camera, an electromagnetic probe, or compact radar. The camera may be used to help determine a particle size. The particle size and amount may also be measured indirectly (for example, by measuring the energy generated by e.g., the photovoltaic system that we want to protect).
As previously discussed with respect to
Additionally, the signal controller 158 may be configured to instruct the one or more signal generators to provide a relative phasing for each of the plurality of antennas. By providing a relative phasing, a beam transmitted by an array comprising the plurality of antennas may be controlled. For example, by dynamically adjusting the phasing, the beam of radiated electromagnetic energy may be steered across surface 104. In some examples, the beam may be steered to a specific location on the surface 104 where a particle to be moved is located. In other examples, the beam may be steered to sweep across all of or a portion of the surface 104 to move particles.
As shown in
In some examples, the laser may also include a polarizer. When using ionizing lasers (for example, an ultraviolet laser), a polarizer may be located in front of the laser and the laser may be angled at Brewster angle, with respect to the surface. By angling the laser, it may cause the laser light to reflect from the surface and not penetrate (or refract) into the electronics or apertures that form (or are located under) the surface.
As previously discussed with respect to
Shown in
There may be a particle 308 located on the surface 306. The particle 308 may be an undesired particle, such as dust or debris, or a particle from the surface 306 itself, such as particle formed from laser ablation of the surface 306. When transmitted electromagnetic energy from the antenna 202 strikes the particle, it may cause a movement of the particle 308 via an electromagnetic force. Thus, the electromagnetic energy from the antenna 202 may remove particles from the surface 306.
In some examples, the electromagnetic energy from the antenna 202 may move the particle 308 toward a collection unit 310. The collection unit 310 may have an electrostatic charge designed to hold the particles that are pushed toward it. Thus, the collection unit may be used to store the undesired particles to keep them from going back onto the surface 306. In various examples, the position of the collection unit 310 may vary depending on an angle at which the electromagnetic energy will move the particle.
The maximum amount of charge that a particle may accumulate depends on the charging time, the particle size, the dielectric constant of the particle, its work function, and the performance of ionization method, for example the magnitude of the received cosmic radiation or electric field or the intensity of the impinging laser used for ionization. For a particle on a surface, the amount of charge that a particle accumulates may be simplified and assumed homogeneous based on the capacitance of the particle, or homogeneous charge density, as defined by Equation 1, where r equals the approximate radius of the particle. The charge is then given by Equation 2, where V is the voltage on the particle.
C=4πεr Equation 1
q=CV Equation 2
The force on a particle is given by Equation 3, where F is the force, q is the charge, E is the electric field strength, v is the velocity of the particle and B is the magnetic field. The electric field and the magnetic field are those from the skewed signal transmitted by the antenna.
F=q(E+v×B) Equation 3
The impinging electromagnetic fields transmitted by antenna 202 moves charged particles in two orthogonal directions. One direction parallel to the E field and the other one perpendicular to the B field. Assuming that the B and E fields are constant in an infinitesimally small time interval, the charged particle is forced to undergo a helical trajectory.
Benefiting from the orthogonality of the E and B fields, the formula governing instantaneous pseudo-circular motion becomes:
where r is the radius of circular motion in the direction parallel to the B field or radial direction, q and m are the charge amount and the mass of the particle, vr is the component of the particle speed in radial direction (parallel to the instantaneous field B). The operator ∂/∂t, is partial derivative operator with respect to time and signifies temporal variation of operand parameters.
The B field component described above displaces the particles radially, or may act to loosen the particles' bonding with the surface. Similarly, we may derive the formula for particle migration in the axial direction parallel to the E field (or perpendicular to the B field). This is the main component which sweeps the particles away from the target surface. Similarly the axial component derived from equation 3 results in an instantaneous axial speed defined by Equation 5:
Therefore the instantaneous axial speed appears independent of the polarity of the electromagnetic field, and magnitude and the sign of the charged particles. Note that the term
signifies particle acceleration with a mass m, and together, translate to the forces on the particles, as shown in Equation 6:
For a constant power antenna system, and based on equation 6 and the impulse-momentum change theorem, we can maximize the impinging force by maximizing the temporal variation of electromagnetic field maintaining constant power. This would result in a family of skewed waveforms as exemplified.
The example skewed signal 400 of
A signal generator (e.g., waveform synthesizer) can be used to generate skewed waveforms. In some examples, the skewed waveforms may be generated by a synthesizer or another signal generation unit that can output a combination of sinusoids. The waveforms can also be synthesized using weighted sum of n tonal sinusoids or harmonics exemplified by Equation 8:
The signal controller (such as signal controller 108 of
In some examples, the signal controller may determine parameters for the skewed signal and provide the parameters to a signal generator to generate the skewed signal. The signal controller may communicate one or more coefficients (such as coefficients for a sinusoid) to the signal generator. The signal generator may responsively generate the skewed signal. In some examples, the skewed signal may be able to move a 10 micrometer particle at 0.2 meters per second and a 1 micrometer particle at 20 meters per second, compared to a traditional sinusoid providing movement at 0.04 meters per second and 4 meters per second respectively.
It should be understood that for this and other processes and methods disclosed herein, flowcharts show functionality and operation of one possible implementation of present embodiments. Alternative implementations are included within the scope of the example embodiments of the present disclosure in which functions may be executed out of order from that shown or discussed, including substantially concurrent or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art.
At block 602, the method 600 includes generating a skewed signal configured to cause a movement in the particles. As discussed with respect to
A processor in a signal controller may be able to determine the skewed signal based upon the particles present on the surface. In some examples, a camera or other sensor may be able to provide information about the particle(s) to the signal controller so that the signal controller may be able to generate an appropriate skewed signal. In some examples, the signal controller may determine parameters for the skewed signal and provide the parameters to a signal generator to generate the skewed signal. The signal controller may communicate one or more coefficients (such as coefficients for a sinusoid) to the signal generator. The signal generator may responsively generate the skewed signal.
Additionally, in some examples, block 602 may generate multiple skewed signals in examples where the system includes a plurality of antennas. However, in other examples with a plurality of antennas, block 602 may generate a single skewed signal. When there are multiple antennas, block 602 may also include adding a relative phasing to the skewed signals. The relative phasing may cause a beam transmitted by the plurality of antennas to adjust its angular position. The signal controller may apply a phasing across the signals in order to steer the beam to a given portion of the surface. In some examples, the signal controller may determine a location to steer the beam, such as a location of debris or a predetermined sweeping pattern, and responsively adjust the relative phasing.
At block 604, the method 600 includes feeding the skewed signal to an antenna. The skewed signal generated at block 602 may be fed to an antenna by way of an amplifier located between the signal generator and the antenna. The amplifier may increase a power level of the skewed signal to that the skewed signal has enough energy to cause a movement in the particles.
At block 606, the method 600 includes radiating, from the antenna, the skewed signal proximate to the surface. Block 606 may include radiating the skewed signal from a single antenna or from a plurality of antennas. The radiating may be performed based on a radiation pattern of the antenna (or plurality of antennas). The radiation pattern may be at an angle to mitigate a percentage of the radiated energy that strikes a sensor, but does strike particles on a surface of or near the sensor. Once the energy is radiated, it will strike at least one undesired particle on the surface and cause the particle to move. It may be desirable to cause the particle to move off the surface. In some examples, block 606 may also include electrostatically trapping the particles in a collection unit.
Additionally, as part of method 600, in conjunction with one or more of blocks 602-606, the method may include operating a laser to shine a laser beam on the surface. In some examples, the laser may operate in one of two modes. In the first mode, the laser may loosen the particles on the surface through laser ablation. In the second mode, the laser may ionize the particles on the surface. The laser may selectively operate in the two modes based on a signal from a laser controller. In some examples, the laser may operate in the first mode to loosen particles then operate in the second mode to ionize the particles it has loosened. In another example, the laser may only operate in the second mode to ionize particles present on the surface.
The description of the different advantageous arrangements has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. Further, different advantageous embodiments may describe different advantages as compared to other advantageous embodiments. The embodiment or embodiments selected are chosen and described in order to best explain the principles of the embodiments, the practical application, and to enable others of ordinary skill in the art to understand the disclosure for various embodiments with various modifications as are suited to the particular use contemplated.
Number | Name | Date | Kind |
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20170133202 | Berry, III | May 2017 | A1 |
Number | Date | Country |
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2001-242097 | Sep 2001 | JP |
Entry |
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Machine Translation of JP2001-242097 by Miyashita et al., published Sep. 7, 2001. |