The present description relates to methods and systems for generating high peak power laser pulses particularly intended for laser shock. The present description is applicable, for example, in laser peening, laser shock spectroscopy, laser ultrasound generation or laser cleaning of components.
Laser shock surface treatment applications, i.e., with plasma formation, require pulses with very high peak power, typically of approximately 10 megawatts (MW) or more, i.e., typically pulses with a duration of the order of a few tens of nanoseconds or less and that have energy levels of more than one hundred millijoules. These pulses, which are typically focused on areas of a few mm2, allow energy densities to be achieved of the order of tens of Joules per square centimeter for forming laser shocks. These applications include, for example, laser shock spectroscopy, laser cleaning, laser ultrasound generation, for example, for analyzing the crystalline structure of a material and laser shock peening for improving the lifetime and the mechanical strength of parts.
Laser peening is described, for example, in patents U.S. Pat. No. 6,002,102 [Ref. 1] and EP 1528645 [Ref. 2]. A first thin absorbent layer is deposited onto the part to be treated. During operation, the high peak power laser pulses vaporize the absorbent layer, which generates a hot plasma. The expansion of the plasma leads to an intense compression wave that allows deep prestresses to be generated in the material of the part to be treated. A second layer, called confinement layer, that is transparent to radiation, for example, water or a material transparent to the length of the incident radiation, for example, quartz, helps the shock wave to expand toward the inside of the surface to be treated. This method, called laser peening, allows the mechanical strength of the parts to be increased to cyclic fatigue. This method is generally carried out by conveying the beam in free space up to the zone to be treated.
However, conveying high-power laser beams in free space generates safety problems and makes accessibility to confined or hostile locations (for example, submerged environments) very complex.
In order to access surfaces located in confined or hostile environments, optical fibers appear to be well suited tools. Nevertheless, some of the methods described above, such as laser peening or surface laser cleaning, are generally carried out in dusty industrial environments and the damage thresholds of the input and output surfaces of the fibers are significantly lower. Moreover, apart from the cleanliness aspects, for pulsed lasers with a pulse duration of less than 1 μs, the peak power level that can be injected into a fiber is limited by the dielectric damage threshold of the material forming the core of the fiber. Thus, for pulses from 10 ns to 1,064 nm, the damage threshold of the air-silica interface is approximately 1 GW/cm2.
In order to limit the risks of damage during injection and during propagation, the use of waveguides with large core diameters is preferred. However, the large cores (typically greater than 1 mm) are not very flexible and excessively large bends create evanescent wave losses that can damage the fiber.
A set of optical fibers (or “bundle”) can be used, as described, for example, in patent U.S. Pat. No. 6,818,854 [Ref. 3]. However, in order to limit any losses during injection and during propagation in this type of component, it is preferable for the light energy to be injected into each fiber individually, which makes the injection complex and expensive; moreover, a high-aperture focusing optical system needs to be provided at the output of the component, which makes the optical system complex, expensive and bulky.
Therefore, a requirement exists for generating high peak power nanosecond pulses by means of a system with a fiber-based device comprising a fiber with a single core, and which allows the damage thresholds of the fibers to be increased and improves the flexibility of the fiber-based device in order to prevent its optical deterioration by mechanical stresses.
In patent application WO 2019/233899 [Ref. 4], the applicant particularly proposed a system for generating high peak power laser pulses comprising a light source for emitting nanosecond laser pulses, a fiber-based device for conveying laser pulses comprising a multimode fiber with a single core and an optical amplifier arranged at the output of the fiber-based device for optically amplifying the laser pulses. The system thus described allows very high peak powers to be available for the incident pulses on the material in which laser shocks are intended to be generated, while safeguarding the input and output interfaces of the fiber-based device. It allows a limited diameter multimode fiber to be used, that is typically below 1 mm, or even below 300 μm, which provides the fiber-based device with significant flexibility, and as a result easier access to confined environments.
In patent application WO 2019/233900 [Ref. 5], the applicant also proposed a module for temporally shaping laser pulses, arranged upstream of the fiber-based device, and configured to reduce the power spectral density (PSD) by reducing the temporal coherence of the first pulses. Reducing the PSD to quasi-constant energy or with a low energy reduction allows any overintensities attributed to “speckle” (also called “flicker”) to be limited, the injection into the fiber-based device to be safeguarded and the nonlinear effects to be limited. As in the previously described patent application [Ref. 4], it is then possible to use a small diameter multimode fiber.
The two patent applications [Ref. 4] and [Ref. 5] mentioned above also describe the possibility of spatially shaping the beam in order to evenly distribute the spatial power density of the pulses at the input of the fiber-based device. An even distribution of the spatial power density allows the overintensities in the fiber to be limited that are related to the Gaussian intensity distribution of a beam, for example. Thus, a module is described, for example, for spatially shaping the pulses, allowing pulses to be formed with square or “top hat” type spatial intensity distribution, i.e., with spatial variation of the low intensity that is typically limited to +/−10%. Top hat type spatial shaping also allows the light beam formed by said first pulses to be adapted to the dimension of the core of the multimode fiber.
Such a spatial shaping module can comprise a diffractive optical element (or “DOE”) associated with an optical system, for example, an optical lens, for carrying out spatial shaping adapted to the size and the geometry of the multimode optical fiber intended for conveying nanosecond pulses. In practice, spatially shaping the beam in a Fourier plane (for example, the image focal plane) of the optical system corresponds to the spatial Fourier transform of the phase mask stipulated by the DOE convoluted with the spatial Fourier transform of the spatial intensity distribution of the beam on the DOE. Thus, the phase mask stipulated by the DOE can be computed such that the result of this convolution forms a given intensity distribution on the input face of the fiber, for example, a “top hat” type intensity distribution, with the diameter of the beam on the input face of the fiber being proportional to the focal length of the optical system. The DOE associated with an optical lens type optical system is therefore particularly advantageous for spatially shaping nanosecond pulses within the context of conveying high peak power pulses since, by selecting the parameters of the DOE, a laser beam, independently of its spatial distribution at the source output, can be injected into a single-core fiber while complying with the size of the waveguide and its numerical aperture.
However, the applicant has highlighted the appearance of overintensities or “hot spots” associated with the presence of a DOE, with said overintensities or “hot spots” being able to induce local damage of the input surface of the fiber due to an excessively high local light density. The applicant has particularly demonstrated that the most intense hot spots can have a peak power that is up to 6 times greater than the average power of a pulse injected into the fiber.
By way of an example,
An aim of the present description is a method and a system for generating high peak power pulses (typically of approximately 10 MW or above), allowing safer injection into a single-core fiber-based device, and ensuring safe propagation over long distances, while making the use of flexible fibers possible.
In the present description, the term “comprise” means the same as “include” or “contain”, and is inclusive or open and does not exclude other elements that are not described or shown.
Furthermore, in the present description, the term “approximately” or “substantially” is synonymous (means the same as) with a margin that is less than and/or greater than 10%, for example, 5%, of the respective value.
According to a first aspect, the present description relates to a system for generating high peak power laser pulses comprising:
According to the present description, the input face of the multimode fiber is substantially coincident with a Fourier plane of said optical system.
The Fourier plane is a plane where a Fourier transform of the electric field is formed and corresponds, for example, in the case of a collimated beam, to an image focal plane of a lens or of a mirror.
According to one or more embodiments, the optical system comprises one or more lenses configured to form a converging optical system and/or one or more reflective optical elements, for example, a converging spherical mirror or an off-axis parabolic mirror. In general, the optical system can comprise one or more optical elements allowing light to be focused in order to generate a Fourier plane.
It should be noted that the DOE can be produced on a face of one of the optical elements of the optical system, for example, etched on a concave (or parabolic) mirror forming said optical system.
A square or “top hat” type spatial intensity distribution according to the present description is a substantially uniform spatial intensity distribution, with a spatial variation of the low intensity that is typically limited to +/−10%.
The applicant has demonstrated that such a system, by virtue of the shaping module, allowed the contrast of the high-frequency component resulting from speckle type interference to be reduced, by virtue of the reduction of the spatial coherence of the pulses thus shaped.
According to one or more embodiments, said spatial shaping module is arranged upstream of said optical system. This arrangement allows the spatial shaping module to receive a laser beam formed by said substantially collimated pulses. However, the spatial shaping module can be arranged downstream or upstream the DOE.
According to one or more embodiments, said spatial shaping module comprises a polarization scrambler, configured to transform a first electric field into a second electric field formed by a sum of two components along two orthogonal axes, with the two components having a variable phase shift along a given axis.
According to one or more embodiments, the variable phase shift along said axis is periodic, resulting in a periodic variation of the polarization state of the electric field at the output of the polarization scrambler, and the polarization scrambler is arranged such that a spatial intensity distribution of said first electric field comprises, along said axis, a dimension that is greater than a variation period of the polarization state.
According to one or more embodiments, the light source is a longitudinal multimode source and said spatial shaping module comprises at least one first diffraction grating, configured to transform a first electric field into a second electric field formed by a sum of N components, N≥2, wherein said N components are characterized by non-collinear wave vectors.
According to one or more embodiments, N is comprised between 2 and 10.
According to one or more embodiments, said spatial shaping module comprises at least one second grating arranged downstream said first grating.
According to one or more embodiments, said spatial shaping module further comprises a polarization scrambler, with said at least one first grating being arranged upstream the polarization scrambler.
According to a second aspect, the present description relates to a method for generating high peak power laser pulses comprising:
Further advantages and features of the invention will become apparent upon reading the description, which is illustrated by the following figures:
Throughout the figures, the elements are not shown to scale for better visibility.
The system 200 comprises a light source 240 for emitting initial nanosecond laser pulses IL and a fiber-based device for conveying the laser pulses, comprising at least one first multimode fiber 210 with a single core 212 and a cladding 211.
In this example, the light source 240 comprises a laser source 241, for example, a Q-switched Nd:YAG type laser for emitting nanosecond pulses. The laser can be equipped with a frequency doubler module in order to emit at a wavelength of 532 nm. More generally, the laser source is, for example, an active or passive Q-switched solid-state laser for emitting high peak power nanosecond pulses (greater than 10 MW). This can be, for example, a Yb:YAG or even titanium sapphire laser depending on the wavelength that is intended to be used. The laser source s naturally polarized, with the polarization being able to be linear, circular or elliptical.
The light source 240 can (optionally) contain an attenuator 245 for the emission optical power, comprising, for example, a half-wave plate followed by one or more polarization filters (Brewster plate, Glan prism or Glan-Thomson prism, for example).
The system 200 further comprises a diffractive optical element (DOE) 220 and an optical system 221, with the elements 220 and 221 being arranged upstream of the fiber-based device, and being configured to generate, on an input face of said first multimode fiber 210, from each initial laser pulse, a laser pulse at the fiber input IF defined by an electric field comprising a “top hat” type spatial intensity distribution. The system 200 comprises, for example, a spatial shaping module 230 that will be described in further detail hereafter and, in this example, a filtering device 250. The filtering device 250 comprises, for example, a set of lenses 251, 253 configured to form an intermediate focal plane, in which a diaphragm 252 is arranged. Such a filtering device is configured to eliminate unwanted diffraction orders from the DOE (typically of the order 0 and all orders greater than or equal to 2).
At the output of the light source 240, each initial nanosecond laser pulse IL is defined by an initial electric field with a pulse ω0. In the case of a field propagating in a direction z and that is linearly polarized, for example, according to a vector {right arrow over (e1)}, the field of an initial laser pulse IL is written as:
{right arrow over (E)}(x,y,z,t)=E0(x,y,t)ej(ω
The field at the output of the laser has spatial coherence that can be qualified by a degree of coherence. The degree of spatial coherence of the radiation between two points (x1, y1) and (x2, y2) located in a plane perpendicular to the propagation direction z is expressed as follows:
Thus, radiation is totally spatially coherent when the degree of coherence reaches the unit value for any pair of points. Conversely, the spatial coherence tends toward 0 when the degree of coherence is low, for all pairs of points. One means for experimentally observing the degree of coherence of a source involves measuring the contrast of an interference pattern (Young's slits or speckle pattern type). The more spatially coherent the incident radiation, the greater the contrast of the interference pattern.
In practice, when a DOE is used in a pulse generation system according to the present description, the applicant has demonstrated that the coherence of the incident radiation resulted in a high contrast of the high-frequency component resulting from speckle type interference.
The DOE 220 comprises, for example, in a known manner, in the case of a transmission component, a plate of a material, for example, of silica, etched into the thickness in order to generate a spatially variable phase shift of the incident electric field in order to obtain, in a Fourier plane coincident with an input plane of the multimode fiber 210, i.e., in this example, in a focal plane of the optical system 221, an electric field with a desired amplitude.
The optical system 221 can comprise one or more lenses configured to form a converging optical system and/or one or more reflecting optical elements, for example, a converging spherical mirror or an off-axis parabolic mirror. In general, the optical system 221 can comprise one or more optical elements allowing light to be focused in order to generate a Fourier plane.
Although shown as two separate elements in
Even though
{right arrow over (E)}t(x,y,z,t)=E0(x,y,t)ej(ω
In the Fourier plane, the electric field is provided by:
{right arrow over (E)}
out(u,v)α(u,v,t)⊗{tilde over (T)}(u,v)·{right arrow over (e1)}=S(u,v)·{right arrow over (e1)} [Math 4]
Where
are the coordinates in the Fourier space of the lens. The functions (u, v) and {tilde over (T)}(u, v) represent the spatial Fourier transforms in the focal plane of the lens of E0(x, y, t) and t(x, y).
If the field has a very high degree of spatial coherence, which is the case, for example, of TEM00 Gaussian laser pulses, the light intensity of the pulses in the Fourier plane is written as:
I
out(u,v)α|S(u,v)|2 [Math 5]
It should be noted that if the field is incident on the DOE with a wave vector {right arrow over (k′)} forming an angle θ0 with the optical axis (z), the intensity pattern will be spatially offset from the optical axis by a distance u0, with u0=f·tan(θ0).
In the preceding equations, however, it has been assumed that the DOE is “perfect”, i.e., without roughness. In practice, the method for manufacturing the DOE results in random roughness of the surface of the DOE, which is expressed on the transmission of the DOE by a random phase term ejφ
{right arrow over (Eout)}(u,v)α{tilde over (E)}0(u,v,t)⊗{tilde over (T)}(u,v){right arrow over (e1)}+∫E0(x,y,t)·ejφ
The field is thus made up of a deterministic part allowing the desired shaping to be achieved and of a random part attributed to the roughness of the DOE. The electric field thus can be written in the Fourier plane in the form of a sum of two contributions:
{right arrow over (Eout)}(u,v)=S(u,v){right arrow over (e1)}+Erand(u,v){right arrow over (e1)} [Math 7]
With
E
rand
=∫E
0(x,y,t)·ejφ
Erand thus represents a random phase term in the Fourier plane of the lens due to the roughness of the DOE.
The two contributions of the field interfere with each other, which provides the “speckled” nature of the intensity of the pulses in the Fourier plane.
More specifically, the light intensity of the pulses in the Fourier plane is written as:
I
out(u,v)=|S(u,v)|2+Erand2+2ErandS(u,v)cos (φdiff) [Math 8]
Therefore, the light intensity comprises a first low spatial frequency term of the top hat type and a random phase high spatial frequency term, which affects the shaping of the pulses in the input plane of the multimode fiber. This results in a diffraction pattern Iout (u, v) made up of “grains” of random intensity (“speckle”), as illustrated in diagram 31 (
The spatial shaping module 230 of the system 200 aims to reduce the contrast of the high-frequency component resulting from speckle-type interference on the input face of said first multimode fiber.
The contrast of the diffraction pattern Iout (u, v) can be expressed as:
Where I is the average of the light intensity of the “top hat” and σI is the standard deviation.
The applicant has shown that the selection of a spatial shaping module 230, arranged upstream of the fiber-based device, and configured to transform a first electric field into a second electric field formed h a sum of a plurality N of components, which are at least partially spatially incoherent with one another, allowed the contrast of the high-frequency component resulting from speckle-type interference at the input of the multimode fiber to be reduced and, for this reason, allowed the injection of high peak power pulses into the multimode fiber to be safeguarded.
A first polarized electric field is considered, with linear, circular or elliptical polarization at the output of the laser 241. Throughout the remainder of the description, the effect of the depolarizer, or polarization scrambler, is explained in the case of a linear polarization, illustrated by the double arrow 31 in
The polarized electric field is written according to the above equation [MATH 1]. A Cornu depolarizer includes two prisms having an angle of 45° C. The prisms are made of quartz and are brought into contact in order to form a cube. Since the quartz is a birefringent crystal, the prisms are arranged so that their fast index axis is oriented at 90°. Thus, each prism acts as a phase plate. Since the thickness of the material through which the light passes varies spatially, the phase shift of the beam varies spatially. The phase shift is provided by the formula:
Where n2 and n1 are respectively the extraordinary and ordinary index of quartz, a is the length over which the two prisms are in contact and d is the length of the depolarizer. At the output of the depolarizer, spatial shaping of the electric field in the plane (x, y) perpendicular to the propagation axis (z) of the beam was undertaken. The electric field at the output of the depolarizer is written as:
Thus, when the incident beam has a uniform linear polarization, at the output of the component, the beam will have a periodic polarization in the y direction. More specifically, each spatial coordinate of the beam has a different polarization state. In the above assumption, along the y-axis the beam will successively exhibit linear, circular and elliptical polarization states with different orientations.
The variation of the polarization state will be periodic along the y-axis. The variation period of the polarization is expressed as:
Thus, in order to have effective depolarization, the dimension of the incident beam advantageously will be, along the y-axis, greater than the variation period of the polarization state at the depolarizer output.
For a quartz depolarizer by Thorlabs®, for example, the spatial variation period of the polarization is 4 mm for a wavelength of 635 nm. In practice, the intention is for the dimension of the incident beam on the depolarizer to be at least equal to the polarization variation period, advantageously at least equal to twice the polarization period, in order to achieve effective depolarization and consequently a degree of polarization that tends toward zero.
A view of the effect of a depolarizer on the spatial shaping of the incident pulses is illustrated in diagrams 33, 34 of
Diagram 33 shows the polarization state at the input of the polarizer, in this example a uniform polarization (linear polarization).
Diagram 34 shows the polarization state at the output of the polarizer. A variable polarization can be seen according to the spatial coordinates (x, y) of the considered beam. By considering two points A, B of coordinates (x1, y1) and (x2, y2), respectively, a drop can be seen in the degree of normalized spatial coherence as defined by the above equation [MATH 2].
In this example, the points A and B are orthogonally polarized, thus the degree of coherence drops to 0 because the numerator corresponding to the scalar product of the fields in (x1, y1) and (x2, y2) is zero. Therefore, it can be concluded that spatially depolarizing the initial pulses induces a reduction in the degree of coherence and, as a result, will cause a reduction in the contrast of the speckle pattern. When the degree of polarization (DOP) of the beam tends toward 0, the beam is considered to be completely depolarized, and the electric field at the output of the depolarizes can be written as the sum of two orthogonally polarized, and therefore spatially incoherent, contributions.
The applicant has demonstrated that if the incident electric field on the DOE 220 is at least partially depolarized, this will have the effect of reducing the speckle contrast. In particular, as previously seen, a completely spatially depolarized field can be divided into two orthogonal polarization states that cannot interfere with one another. Each of the polarization states will generate a speckle pattern that is not spatially correlated with the other polarization state.
More specifically, in the case of an incident light made up of two independent (orthogonal) polarization states, the field of the pulses IF in the Fourier plane of the optical system 221 used for shaping can be written as:
That is,
The light intensity in the input plane of the multimode fiber 210 (
I
out(u,v)α|S(u,v)|2+Erand2+ErandEout cos (φa1)+ErandEout cos (φa2) [Math 15]
It can be seen from the above equation that the intensity profile is made up of the superposition of two independent random signals. Each of these random signals has a standard deviation of
where σI is the standard deviation of the intensity distribution without a shaping module. Thus, the intensity distribution will have a standard deviation corresponding to the root mean square of the standard deviations of the two independent signals, equal to
This results in a reduction in the speckle contrast by a factor of √{square root over (2)}.
Thus, in
The above computations show that spatially shaping the polarization state of a laser allows the degree of spatial coherence of the radiation to be reduced. When the radiation is equivalent to two orthogonal polarization states, the contrast of the speckle pattern can be reduced by a factor of √{square root over (2)}. Of course, in the case of less effective depolarization, the speckle contrast will be reduced, but by a lower factor. The above computations were carried out with a Cornu depolarizer. Of course, a demonstration of the depolarization on the contrast of the speckle would be the same with other types of depolarizer.
For example, a liquid crystal depolarizer can be configured to have a phase shift with an expression similar to that originating from a depolarizer of the Cornu type. Such liquid crystal depolarizers are described, for example, in U.S. Pat. No. 9,599,834 [Ref. 6] and comprise a thin film of liquid crystal polymer sandwiched, for example, between two glass plates, for example, N-BK7.
The double prism depolarizer (respectively made up of quartz and silica) is similar to the Cornu depolarizer; however, the angle between the two prisms is much smaller (typically 2°) and only the first prism is birefringent. The second prism is made of fused silica, which has a refractive index that is very similar to quartz. The fast axis of the quartz prism is generally at 45° to the corner. The entire component is more compact than a Cornu depolarizer (for the same aperture). At the output of the component, the polarization is periodic. As the angle of the prisms is much smaller than in a Cornu depolarizer, the spatial depolarization period is greater.
A grating spatial shaping module as described in
As illustrated in
More specifically, in order to demonstrate the effect of such a spatial shaping module, an incident planar longitudinal multimode electromagnetic wave is considered hereafter on a diffraction grating with a pitch α. The wave is expressed as:
The parameter
is connected to the free spectral range of the laser cavity that is used. ϕn is a random phase term associated with each of the spectral components.
The incident wave on the grating 502 (
Where θd, θ0, and m are the diffraction angle by the grating, the angle of incidence, and the diffraction order of the grating, respectively. In the case, for example, of a grating optimized according to the order −1 to Littrow (θ0=−θd), the diffraction angle is provided by
The diffraction angle depends on the illumination wavelength and therefore on the spectrum of the laser that is used. If the laser emits a multitude of spectral lines centered around a wavelength λ0, the angular dispersion induced by the grating is provided by:
If the laser emits several lines separated by a free spectral interval,hen each line of the laser will be diffracted by the grating with an angle:
n in this case indicates the longitudinal mode emitted by the laser: (for example, n=0 corresponds to mode ν0, n=1 corresponds to mode ν0+Δν, etc.).
By way of an example, in the case of a laser having a free spectral interval (FSI), with FSI=c/2L, where L is the length of the cavity, of 250 MHz, at 1,064 nm, and for an angle of incidence of 67.7°, the angular dispersion between each mode is 1.075 μrad.
Thus, if the laser emits several longitudinal modes, the diffracted total electric field is expressed as:
Thus, for an incident field on the grating formed by N optical frequencies vn=v0+n·Δv, since each optical frequency propagates in a different direction, a drop in the degree of coherence of the optical field is observed.
More specifically,the wave vector associated with each spectral component is provided by:
The presence of a multitude of wave vectors at the output of the grating is equivalent to an angular distribution of the spectral components of the laser. The degree of spatial coherence of the source is thus reduced.
If the diffracted electric field is incident on the DOE, then there will be light intensity distribution in the Fourier plane of the lens according to the following law:
The intensity pattern in the Fourier plane therefore corresponds to a sum of diffraction patterns spatially offset in the direction u, with each spectral component being made up of the same deterministic portion and of the same random portion. Each diffraction pattern corresponding to a longitudinal mode is offset by the distance F·tan θn of the diffraction patterns corresponding to the longitudinal modes that are adjacent thereto. If the N spectral lines of the laser meet the condition
then the intensity profile will be made up of a sum of noisy profiles that are not correlated with one another. The contrast of the speckle that is observed thus will be reduced by a factor of √{square root over (N)}.
It should be noted that in the example of
The diagram 61 (
The diagram 62 (
Of course, the shaping module can equally comprise a polarization scrambler 232 and a grating device 231, as described in
In this case, the grating device 231 must be upstream of the depolarizer 232. Indeed, the diffraction can be affected h the depolarization of the incident beam. As can be seen in diagrams 71, 72, the effect of the modules 231, 232 accumulates in such a way that the contrast of the speckle transitions from 0.72 (diagram 71, without a shaping module) to 0.2 (diagram 72).
Although described through several embodiments, the methods and the devices according to the present description include various alternative embodiments, modifications and improvements that will become apparent to a person skilled in the art, with it being understood that these various alternative embodiments, modifications and improvements form part of the scope of the invention as defined by the following claims.
Ref. 1: U.S. Pat. No. 6,002,102
Ref. 2: EP 1528645
Ref. 3: U.S. Pat. No. 6,818,854
Ref. 4: WO 2019/233899
Ref. 5: W0 2019/233900
Ref. 6: U.S. Pat. No. 9,599,834
Number | Date | Country | Kind |
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FR2008512 | Aug 2020 | FR | national |
Filing Document | Filing Date | Country | Kind |
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PCT/EP2021/072100 | 8/6/2021 | WO |