Methods for providing magnetic storage elements with high magneto-resistance using Heusler alloys

Information

  • Patent Grant
  • 9042057
  • Patent Number
    9,042,057
  • Date Filed
    Thursday, May 29, 2014
    9 years ago
  • Date Issued
    Tuesday, May 26, 2015
    9 years ago
Abstract
Methods for providing magnetic storage elements with high magneto-resistance using Heusler alloys are provided. One such method includes depositing a substrate including NiFe, depositing a seed layer on the substrate, depositing a buffer layer on the seed layer, and growing, epitaxially, an upper layer on the buffer layer, the upper layer including a Heusler alloy.
Description
FIELD

The present invention relates generally to read sensors for magnetic disk drives, and more specifically to methods for providing magnetic storage elements with high magneto-resistance using Heusler alloys.


BACKGROUND

Magnetic disk drives are used to store and retrieve data for digital electronic apparatuses such as computers. In FIGS. 1 and 2, a magnetic disk data storage system 10 includes a sealed enclosure 12, a disk drive motor 14, and a magnetic disk, or media, 16 supported for rotation by a drive spindle 17 of motor 14. Also included are an actuator 18 and an arm 20 attached to an actuator spindle 21 of actuator 18. A suspension 22 is coupled at one end to the arm 20 and at another end to a read/write head 24. The suspension 22 and the read/write head 24 are commonly collectively referred to as a head gimbal assembly (HGA). The read/write head 24 typically includes an inductive write element and a magneto-resistive read element that are held in a very close proximity to the magnetic disk 16. As the motor 14 rotates the magnetic disk 16, as indicated by the arrow R, an air bearing is formed under the read/write head 24 causing the read/write head to lift slightly off of the surface of the magnetic disk 16, or, as it is commonly termed in the art, to “fly” above the magnetic disk 16. Data bits can be written or read along a magnetic “track” of the magnetic disk 16 as the magnetic disk 16 rotates past the read/write head 24. The actuator 18 moves the read/write head 24 from one magnetic track to another by pivoting the arm 20 and the suspension 22 in an arc indicated by arrows P. The design of magnetic disk data storage system 10 is well known to those skilled in the art.



FIG. 3 shows a cross-sectional view of a read/write head 24. The read/write head 24 includes a write element 30 for writing data bits to the magnetic disk and a read element 32 for reading the data bits. The write element 30 includes a yoke 34 and one or more layers of electrically conductive coils 36 wound around the yoke 34. In operation, an electric current is passed through the coils 36 to induce a magnetic field in the yoke 34. The yoke 34 includes a lower pole 38 connected to an upper pole 40 by a back gap 42 at a back gap end. The lower and upper poles 38, 40 oppose each other across a write gap 44 at an air bearing end. The yoke 34 is commonly formed of ferromagnetic materials.


The read element 32 includes a first shield 46, a second shield 48, a read insulation layer 50 disposed between the first shield 46 and the second shield 48, and a read sensor 52 disposed within the read insulation layer 50 and exposed at an air bearing surface (ABS). In some designs, often referred to as “merged head” designs, second shield 48 and lower pole 38 are the same layer. In other designs, such as the one shown in FIG. 3, a thin insulating layer 54 separates the second shield 48 from the lower pole 38.


In existing read sensors (e.g., current perpendicular to plane or “CPP” giant magneto-resistance or “GMR” film stack read sensors) with conventional magnetic material such as CoFe and CoFeB, the read signal is small with limited CPP GMR ratio (less than 2% as usual) that does not meet requirements for large signal to noise ratio (SNR) applications. For those with Heusler alloy material based read sensor elements, a large CPP GMR ratio up to tens of percentage is available but with bulky stack design and epitaxial growth of films on crystalline oriented MgO(100) substrates. These read sensors are not suitable for hard drive and magneto-resistive random access memory (MRAM) applications in terms of requirements on small shield to shield spacing and improved performance of devices using such read sensors for high areal density recording.


Conventional efforts utilizing Heusler alloy materials in CPP GMR devices have explored widely the potential and possibility for enhanced output signal and largely improved SNR. However, the output signal from such devices remains on the low side, in particular for small shield to shield spacing form factors. The major challenges lie on the fact that crystal structure of Heusler alloy multi-layers need to be modulated such that they are compatible with L21/B2 ordering to realize half metallicity and large spin polarization with epitaxial growth of thin films. Accordingly, what is needed is an improved magnetic storage element that provides improved electrical performance while providing small shield to shield spacing on a NiFe substrate.


SUMMARY

Aspects of the invention relate to methods for providing magnetic storage elements with high magneto-resistance using Heusler alloys. In one embodiment, the invention relates to a method for manufacturing a magnetic storage element, the method including depositing a substrate including NiFe, depositing a seed layer on the substrate, depositing a buffer layer on the seed layer, and growing, epitaxially, an upper layer on the buffer layer, the upper layer including a Heusler alloy.


In another embodiment, the invention relates to a magnetic storage element including a substrate including NiFe, a seed layer on the substrate, a buffer layer on the seed layer, and an upper layer on the buffer layer, the upper layer including a Heusler alloy grown epitaxially.


In one embodiment, the substrate has a first crystalline structure, and the seed layer and the buffer layer are configured to provide a foundation structure for the Heusler alloy of the upper layer that is different from the first crystalline structure.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a partial cross sectional view of a magnetic data storage system in accordance with the prior art.



FIG. 2 is a partial cross sectional view taken along line 2-2 of FIG. 1 in accordance with the prior art.



FIG. 3 is a cross sectional view of a read/write head in accordance with the prior art.



FIG. 4 is a cross sectional view of a magnetic storage element with high magneto-resistance in a top spin valve configuration with seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention.



FIG. 5 is a cross sectional view of a magnetic storage element with high magneto-resistance in a bottom spin valve configuration with seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention.



FIG. 6 is a cross sectional view of a magnetic storage element with high magneto-resistance in a pseudo spin valve configuration with seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention.



FIG. 7 is a flowchart of a process for forming a magnetic storage element with high magneto-resistance having seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention.





DETAILED DESCRIPTION

Referring now to the drawings, embodiments of methods for providing magnetic storage elements with high magneto-resistance using Heusler alloys are illustrated. The systems include a substrate made of NiFe, a seed layer on the substrate, a buffer layer on the seed layer, and an upper layer on the buffer layer, where the upper layer includes a Heusler alloy grown epitaxially. The seed and buffer layers are configured to facilitate the epitaxial growth of the Heusler alloy with a crystalline structure that is substantially independent of that of the NiFe substrate. In many embodiments, the systems can include additional layers (e.g., free layer, reference layer, spacer layer, and/or capping layer) in various configurations to form a top spin valve, a bottom spin valve, or a pseudo spin valve magnetic storage element. The methods include processes for forming these magnetic storage elements.


In several embodiments, the Heusler alloy has a L21/B2 ordering and/or includes a Co2FexMn1-xSi or CFMS alloy, where x is between 0 and 1. The improved magnetic storage elements can provide enhanced electrical characteristics such as high magneto-resistance and signal output while also providing enhanced physical characteristics such as thin Heusler layer stacking that results in small shield to shield spacing.



FIG. 4 is a cross sectional view of a magnetic storage element 100 with high magneto-resistance in a top spin valve configuration with seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention. The magnetic storage element 100 includes a multi-layer stacked structure with a bottom shield layer 102, a substrate 104 on the bottom shield layer 102, a seed layer 106 on the substrate 104, a buffer layer 108 on the seed layer 106, a free layer 110 on the buffer layer 108, a spacer layer 112 on the free layer 110, a sub-reference layer 114 on the spacer layer 112, an interlayer coupling layer 116 on the sub-reference layer 114, a pinned layer 118 on the interlayer coupling layer 116, an anti-ferromagnetic (AFM) pinning layer 120 on the pinned layer 118, a capping layer 122 on the AFM pinning layer 120, and a top shield layer 124 on the capping layer 122.


In several embodiments, the sub-reference layer 114, the interlayer coupling layer 116, and the pinned layer 118 are collectively referred to as the reference layer. In several embodiments, the AFM pinning layer 120 is an optional layer.


The bottom and top shield layers (102, 124) are made of suitable shield materials known in the art. The substrate 102 is made of NiFe and other suitable materials. The seed layer 106 can be made of a multi-layer structure that includes one or more materials such as NiFe, Ta, Ti, amorphous CoFeB, CoFe, a material including a magnetic CFMS Heusler alloy, and combinations thereof. In one embodiment, the seed layer 106 is made of a bottom NiFe layer that is about 2 nanometers (nm) thick, a CoFeB layer that is about 2 nm thick, and a CoFe layer that is about 4.5 nm thick. In other embodiments, other suitable layers and thicknesses can be used. The buffer layer 108 can be made of a multi-layer structure that includes one or more materials such as Ta, Ti, Cr, Ru, Cu, Ag, Al, W, a Ta alloy, a Cr alloy, a Ru alloy, a Cu alloy, a Ag alloy, a W alloy, a NiAl alloy, and combinations thereof.


In one embodiment, buffer layer 108 is made of a bottom Cr layer that is about 1 nm thick and a Ag layer that is about 1 nm thick. In such case, the seed layer 106 can be made of a bottom NiFe layer that is about 2 nanometers (nm) thick, a CoFeB layer that is about 2 nm thick, and a CoFe25 layer that is about 4.5 nm thick. In such case, the NiFe layer of the seed layer 106 provides a contact layer for wafer substrate 104 for adhesion and stress adjustment. The CoFeB provides an amorphous platform upon which the CoFe25 layer is grown to form a body-centered cubic (BCC) like structure. On the top of these seed layers 106, the buffer layer 108 of Cr/Ag is grown to provide (110) orientated texture and lattice match with Heusler alloy layers (e.g., free layer 110) that are to be grown epitaxially.


The free layer 110 can be a single or multi-layer structure made of one or more Heusler alloys grown epitaxially on the buffer layer 108. The Heusler alloys can have a L21/B2 ordering and/or include a Co2FexMn1-x Si or CFMS alloy, where x is between 0 and 1. The spacer layer 112 can be made of suitable materials known in the art. The sub-reference layer 114 can be a single or multi-layer structure made of Co, Fe, CoFe, and/or one or more Heusler alloys grown epitaxially on the spacer layer 112. The Heusler alloys can have a L21/B2 ordering and/or include a CFMS alloy. The interlayer coupling layer 116 can be made of Ru, Cr, Cu, Ta, Ag, and/or other suitable materials known in the art. The pinned layer 118 can be made of Co, Fe, CoFe, one or more Heusler alloys, and/or other suitable ferromagnetic materials. The AFM pinning layer 120 can be made of anti-ferromagnetic materials such as IrMn, FeMn, PtMn, and/or other suitable materials known in the art. The capping layer 122 can be made of Ru, Ta, Ti, and/or other suitable materials known in the art.


In several embodiments, the seed layer 106 and buffer layer 108 are configured to facilitate an epitaxial growth of the Heusler alloy of the free layer 110. More specifically, the seed layer 106 can be configured to substantially obstruct a transfer of a first crystalline structure of the substrate 104 to the buffer layer 108 and the free layer 110, thereby preventing the transfer of the first crystalline structure to the Heusler alloy of the free layer 110. In several embodiments, the seed layer 106 is configured to provide a second crystalline structure different from the first crystalline structure of the NiFe substrate 104. In such case, the buffer layer 108 is configured to substantially maintain the second crystalline structure of the seed layer 106, and a crystalline structure of the free layer 110 (e.g., Heusler alloy) grown epitaxially on the buffer layer 106 should substantially match the second crystalline structure of the buffer layer 108 and the seed layer 106. In one embodiment, the first crystalline structure has a face-centered cubic (FCC) structure, and the second crystalline structure has a structure that is about body-centered cubic (BCC).


In some embodiments, the seed layer 106 includes a first magnetic sub-layer with an amorphous structure and a second magnetic sub-layer with the second crystalline structure that is about body-centered cubic. In such case, the second crystalline structure is developed through a process for changing the amorphous structure of the first magnetic sub-layer, where the process is an annealing process, a phase change process, a re-crystallization process, a combination of those processes, and/or another suitable process known in the art.


In a number of embodiments, the seed layer 106 and the buffer layer 108 are configured to provide a foundation structure for the Heusler alloy of the free layer 110 (e.g., upper layer) that is different from the first crystalline structure of the NiFe substrate 104. In several embodiments, the seed layer 106 has substantially magnetic characteristics, and the buffer layer 108 has substantially non-magnetic characteristics.


In one embodiment, the buffer layer 108 includes one or more materials selected from the group consisting of Cu2CrAl, Cu2AlSi, a material including a non-magnetic Heusler alloy, and combinations thereof. In several embodiments, the magnetic storage element 100 is a current perpendicular to plane (CPP) giant magneto-resistance (GMR) reader. In some embodiments, the substrate 104 and the seed layer 106 can act as a shield layer for the GMR reader. In some embodiments, one or both of shield layers (102, 124) are omitted.


In a number of embodiments, magnetic seed layers, buffer layers and their combined structure provide a platform and base on which the Heusler alloy multi-layers and stacks are grown expitaxially to maximize the crystalline structure match and enhance L21/B2 ordering and stoichiometric homogeneity. In one such case, the magnetic seed layers can also act as part of the shielding and the use of which can be optional for MRAM applications but preferable for hard drive applications.


In one embodiment, the total Heusler alloy layers are less than 15 nm in thickness. In one embodiment, the maximum CPP GMR ratio is about 9.0 and 13.0% for a device, corresponding to a maximum change in RA of about 4.5 and 7.0 mΩμm2, respectively. In one embodiment, the maximum CPP GMR of 13.0% and change in RA of about 9.0 mΩμm2 are obtained for a CPP GMR device.


In another embodiment, the reference/pinned layers have multi-layer structures. They consist of two ferromagnetic layers anti-ferromagentically coupled by nonmagnetic coupling metal layers. The FM layers are made of Co, Fe, or Ni or their alloy or Heusler alloy layers. The interlayer coupling layers can be nonmagnetic metals (their alloys) such as Ru, Cr, Cu, Ta, and Ag. An optional intermediate layer can be included as a thin interfacial layer of less than 20 Angstroms in thickness can be inserted in between the ferromagnetic and interlayer coupling layer. The intermediate layers are preferably made of magnetic metals or alloys that can enhance interlayer coupling and set forth texture and crystalline structures of the magnetic Heusler alloy layers and other magnetic layers.


In one embodiment, the epitaxial growth of the stacking layers (e.g., Fe/Cr SAF pinned layers) up to the top Heusler layer CFMS follows the orientation relationship of CFMS (110) [001], Ag (110) [111], CFMS (110) [111] for a CPP GMR device. In such case, a resultant modulated crystalline structure with homogeneity in stoichiometry, of the device utilizing the Fe/Cr SAF pinned layers, improves homogeneity in the long-range ordering, and eventually the CPP GMR and device performance.


In several embodiments, the magnetic storage elements provide for large spin polarization and CPP GMR in magnetic elements utilizing Heusler systems, and the signal output on such devices is achieved with highly ordered L21/B2 Heusler phase using low temperature processes. With the improved epitaxial growth of CPP GMR films and modulated Heusler alloy composition, the magnetic ordering temperature is reduced for maximizing GMR and device performance for thin stack designs, while having scalability of device design to increase recording density.


In several embodiments, the magnetic storage elements provide for reduced shield-to-shield spacing (e.g., reduced by up to 10 nm as compared to conventional magnetic storage elements) and GMR gain up to two times conventional gain. In several embodiments, the large output signal and amplitude are available at low bias applied on the device, facilitating noise reduction including those from the spin transfer torque (STT) effect, and enhancement of SNR. In several embodiments, the improved magnetic storage elements can be used with MRAM device development and manufacturing in addition to hard drive applications.



FIG. 5 is a cross sectional view of a magnetic storage element 200 with high magneto-resistance in a bottom spin valve configuration with seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention. The magnetic storage element 200 includes a multi-layer stacked structure with a bottom shield layer 202, a substrate 204 on the bottom shield layer 202, a seed layer 206 on the substrate 204, a buffer layer 208 on the seed layer 206, an AFM pinning layer 220 on the buffer layer 208, a pinned layer 218 on the AFM pinning layer 220, an interlayer coupling layer 216 on the pinned layer 218, a sub-reference layer 214 on the interlayer coupling layer 216, a spacer layer 212 on the sub-reference layer 214, a free layer 210 on the spacer layer 212, a capping layer 222 on the free layer 210, and a top shield layer 224 on the capping layer 222.


In several embodiments, the sub-reference layer 214, the interlayer coupling layer 216, and the pinned layer 218 are collectively referred to as the reference layer. In several embodiments, the AFM pinning layer 220 is an optional layer.


In a number of embodiments, the materials and function of the layers of the magnetic storage element 200 can be the same, or substantially the same, as those described above for the magnetic storage element 100 of FIG. 4. In addition, the magnetic storage element 200 can also include the variations described above for the magnetic storage element 100 of FIG. 4.



FIG. 6 is a cross sectional view of a magnetic storage element 300 with high magneto-resistance in a pseudo spin valve configuration with seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention. The magnetic storage element 300 includes a multi-layer stacked structure with a bottom shield layer 302, a substrate 304 on the bottom shield layer 302, a seed layer 306 on the substrate 304, a buffer layer 308 on the seed layer 306, a free layer 310 on the buffer layer 308, a spacer layer 312 on the free layer 310, a reference layer 315 on the spacer layer 312, a capping layer 322 on the reference layer 315, and a top shield layer 324 on the capping layer 322.


In a number of embodiments, the materials and function of the layers of the magnetic storage element 300 can be the same, or substantially the same, as those described above for the magnetic storage element 100 of FIG. 4. In addition, the magnetic storage element 300 can also include the variations described above for the magnetic storage element 100 of FIG. 4.



FIG. 7 is a flowchart of a process 400 for forming a magnetic storage element with high magneto-resistance having seed and buffer layers on a NiFe substrate that are configured to support formation of one or more Heusler alloy layers in accordance with one embodiment of the invention. In particular embodiments, the process 400 can be used to form one or more of the magnetic storage elements of FIGS. 4-6. The process first deposits (402) a substrate including NiFe. In some embodiments, the substrate can be deposited on a shield. In other embodiments, the substrate can act as a shield. The process then deposits (404) a seed layer on the substrate. The process then deposits (406) a buffer layer on the seed layer. In several embodiments, the seed layer and buffer layer are configured to facilitate an epitaxial growth of a Heusler alloy about to be deposited. The process then grows (408), epitaxially, an upper layer on the buffer layer where the upper layer includes a Heusler alloy.


In some embodiments, the upper layer is (410) to be a free layer to form a top spin valve or pseudo spin valve configuration for the magnetic storage element. In such case, the process deposits (412) a spacer layer on the free layer. The process then deposits (414) a reference layer on the spacer layer where the reference layer includes a Heusler alloy. As described above, the reference layer may be a multi-layer structure. The process then deposits (416) a capping layer on the reference layer.


In some embodiments, the upper layer is (418) to be a reference layer to form a bottom spin valve configuration magnetic storage element. In such case, the process deposits (420) a spacer layer on the reference layer. The process then deposits (422) a free layer on the spacer layer where the free layer includes a Heusler alloy. The process then deposits (424) a capping layer on the free layer.


In one embodiment, the process can perform the sequence of actions in a different order. In another embodiment, the process can skip one or more of the actions. In other embodiments, one or more of the actions are performed simultaneously. In some embodiments, additional actions can be performed.


In several embodiments, the magnetic storage elements include multi-layer stacked structures with the particular layers depicted in FIGS. 4-6. In other embodiments, additional layers can be included or some of the layers may be omitted. In several embodiments, the additional layers may include one or more intervening layers positioned between the depicted layers. In a number of embodiments, one or more layers may be formed of a Heusler alloy grown epitaxially. In one such embodiment, the Heusler alloy can have be CFMS alloy and/or have a L21/B2 ordering.


While the above description contains many specific embodiments of the invention, these should not be construed as limitations on the scope of the invention, but rather as examples of specific embodiments thereof. Accordingly, the scope of the invention should be determined not by the embodiments illustrated, but by the appended claims and their equivalents.

Claims
  • 1. A method for manufacturing a magnetic storage element, the method comprising: depositing a substrate comprising NiFe;depositing a seed layer on the substrate;depositing a buffer layer on the seed layer; andgrowing, epitaxially, an upper layer on the buffer layer, the upper layer comprising a Heusler alloy.
  • 2. The method of claim 1: wherein the substrate comprises a first crystalline structure; andwherein the seed layer is configured to substantially obstruct a transfer of the first crystalline structure to the buffer layer and the upper layer.
  • 3. The method of claim 1: wherein the substrate comprises a first crystalline structure;wherein the seed layer is configured to substantially obstruct a transfer of the first crystalline structure to the buffer layer and the upper layer;wherein the seed layer is configured to provide a second crystalline structure different from the first crystalline structure;wherein the buffer layer is configured to substantially maintain the second crystalline structure; andwherein a structure of the buffer layer substantially matches a crystalline structure of the upper layer.
  • 4. The method of claim 3, wherein the first crystalline structure comprises a face-centered cubic structure, and the second crystalline structure comprises a structure that is about body-centered cubic.
  • 5. The method of claim 3: wherein the seed layer comprises a first magnetic sub-layer with an amorphous structure and a second magnetic sub-layer with the second crystalline structure that is about body-centered cubic; andwherein the second crystalline structure is developed through a process for changing the amorphous structure of the first magnetic sub-layer, the process selected from the group consisting of an annealing process, a phase change process, a re-crystallization process, and combinations thereof.
  • 6. The method of claim 1: wherein the substrate comprises a first crystalline structure; andwherein the seed layer and the buffer layer are configured to provide a foundation structure for the Heusler alloy of the upper layer that is different from the first crystalline structure.
  • 7. The method of claim 1: wherein the Heusler alloy comprises a L21/B2 ordering; andwherein the Heusler alloy comprises a CFMS alloy.
  • 8. The method of claim 1: wherein the seed layer comprises substantially magnetic characteristics; andwherein the buffer layer comprises substantially non-magnetic characteristics.
  • 9. The method of claim 1: wherein the upper layer comprises a free layer comprising the Heusler alloy; andwherein the method further comprises: depositing a spacer on the free layer;depositing a reference layer on the spacer, the reference layer comprising a Heusler alloy; anddepositing a capping layer on the reference layer.
  • 10. The method of claim 9: wherein the Heusler alloy of the free layer comprises a L21/B2 ordering;wherein the Heusler alloy of the reference layer comprises a L21/B2 ordering;wherein the depositing the capping layer on the reference layer comprises: depositing a non-magnetic coupling layer on the reference layer;depositing an anti-ferromagnetically coupled pinned layer on the non-magnetic coupling layer, wherein the reference layer is anti-ferromagnetically coupled via the non-magnetic coupling layer;depositing an anti-ferromagnetic pinning layer on the anti-ferromagnetically coupled pinned layer; anddepositing the capping layer on the anti-ferromagnetic pinning layer; andwherein the depositing the reference layer on the spacer comprises growing, epitaxially, the Heusler alloy of the reference layer.
  • 11. The method of claim 1: wherein the upper layer comprises a reference layer, the reference layer comprising the Heusler alloy; andwherein the method further comprises: depositing a spacer on the reference layer;depositing a free layer on the spacer, the free layer comprising a Heusler alloy; anddepositing a capping layer on the free layer.
  • 12. The method of claim 11: wherein the Heusler alloy of the reference layer comprises a L21/B2 ordering;wherein the Heusler alloy of the free layer comprises a L21/B2 ordering; andwherein the depositing the free layer on the spacer comprises growing, epitaxially, the Heusler alloy of the free layer.
  • 13. The method of claim 1: wherein the seed layer comprises a multi-layer structure with one or more materials selected from the group consisting of NiFe, Ta, Ti, amorphous CoFeB, CoFe, a material comprising a magnetic CFMS Heusler alloy, and combinations thereof; andwherein the buffer layer comprises one or more materials selected from the group consisting of Ta, Ti, Cr, Ru, Cu, Ag, Al, W, a Ta alloy, a Cr alloy, a Ru alloy, a Cu alloy, a Ag alloy, a W alloy, a NiAl alloy, and combinations thereof.
  • 14. The method of claim 1: wherein the seed layer comprises a multi-layer structure with one or more materials selected from the group consisting of NiFe, Ta, Ti, amorphous CoFeB, CoFe, a material comprising a magnetic CFMS Heusler alloy, and combinations thereof; andwherein the buffer layer comprises one or more materials selected from the group consisting of Cu2CrAl, Cu2AlSi, a material comprising a non-magnetic Heusler alloy, and combinations thereof.
  • 15. The method of claim 1: wherein the magnetic storage element is a current perpendicular to plane giant magneto-resistance (GMR) reader;wherein a shield layer is selected from the group consisting of the substrate, the seed layer, and combinations thereof; andwherein the shield layer acts as a shield for the GMR reader.
CROSS REFERENCE TO RELATED APPLICATION(S)

This application is a divisional of co-pending application Ser. No. 13/737,374 filed on Jan. 9, 2013 which is hereby incorporated by reference.

US Referenced Citations (624)
Number Name Date Kind
4828966 Mallary et al. May 1989 A
6016290 Chen et al. Jan 2000 A
6018441 Wu et al. Jan 2000 A
6025978 Hoshi et al. Feb 2000 A
6025988 Yan Feb 2000 A
6032353 Hiner et al. Mar 2000 A
6033532 Minami Mar 2000 A
6034851 Zarouri et al. Mar 2000 A
6043959 Crue et al. Mar 2000 A
6046885 Aimonetti et al. Apr 2000 A
6049650 Jerman et al. Apr 2000 A
6055138 Shi Apr 2000 A
6058094 Davis et al. May 2000 A
6073338 Liu et al. Jun 2000 A
6078479 Nepela et al. Jun 2000 A
6081499 Berger et al. Jun 2000 A
6094803 Carlson et al. Aug 2000 A
6099362 Viches et al. Aug 2000 A
6103073 Thayamballi Aug 2000 A
6108166 Lederman Aug 2000 A
6118629 Huai et al. Sep 2000 A
6118638 Knapp et al. Sep 2000 A
6125018 Takagishi et al. Sep 2000 A
6130779 Carlson et al. Oct 2000 A
6134089 Barr et al. Oct 2000 A
6136166 Shen et al. Oct 2000 A
6137661 Shi et al. Oct 2000 A
6137662 Huai et al. Oct 2000 A
6160684 Heist et al. Dec 2000 A
6163426 Nepela et al. Dec 2000 A
6166891 Lederman et al. Dec 2000 A
6173486 Hsiao et al. Jan 2001 B1
6175476 Huai et al. Jan 2001 B1
6178066 Barr Jan 2001 B1
6178070 Hong et al. Jan 2001 B1
6178150 Davis Jan 2001 B1
6181485 He Jan 2001 B1
6181525 Carlson Jan 2001 B1
6185051 Chen et al. Feb 2001 B1
6185077 Tong et al. Feb 2001 B1
6185081 Simion et al. Feb 2001 B1
6188549 Wiitala Feb 2001 B1
6190764 Shi et al. Feb 2001 B1
6193584 Rudy et al. Feb 2001 B1
6195229 Shen et al. Feb 2001 B1
6198608 Hong et al. Mar 2001 B1
6198609 Barr et al. Mar 2001 B1
6201673 Rottmayer et al. Mar 2001 B1
6204998 Katz Mar 2001 B1
6204999 Crue et al. Mar 2001 B1
6212153 Chen et al. Apr 2001 B1
6215625 Carlson Apr 2001 B1
6219205 Yuan et al. Apr 2001 B1
6221218 Shi et al. Apr 2001 B1
6222707 Huai et al. Apr 2001 B1
6229782 Wang et al. May 2001 B1
6230959 Heist et al. May 2001 B1
6233116 Chen et al. May 2001 B1
6233125 Knapp et al. May 2001 B1
6237215 Hunsaker et al. May 2001 B1
6252743 Bozorgi Jun 2001 B1
6255721 Roberts Jul 2001 B1
6258468 Mahvan et al. Jul 2001 B1
6266216 Hikami et al. Jul 2001 B1
6271604 Frank, Jr. et al. Aug 2001 B1
6275354 Huai et al. Aug 2001 B1
6277505 Shi et al. Aug 2001 B1
6282056 Feng et al. Aug 2001 B1
6296955 Hossain et al. Oct 2001 B1
6297955 Frank, Jr. et al. Oct 2001 B1
6304414 Crue, Jr. et al. Oct 2001 B1
6307715 Berding et al. Oct 2001 B1
6310746 Hawwa et al. Oct 2001 B1
6310750 Hawwa et al. Oct 2001 B1
6317290 Wang et al. Nov 2001 B1
6317297 Tong et al. Nov 2001 B1
6322911 Fukagawa et al. Nov 2001 B1
6330136 Wang et al. Dec 2001 B1
6330137 Knapp et al. Dec 2001 B1
6333830 Rose et al. Dec 2001 B2
6340533 Ueno et al. Jan 2002 B1
6349014 Crue, Jr. et al. Feb 2002 B1
6351355 Min et al. Feb 2002 B1
6353318 Sin et al. Mar 2002 B1
6353511 Shi et al. Mar 2002 B1
6356412 Levi et al. Mar 2002 B1
6359779 Frank, Jr. et al. Mar 2002 B1
6369983 Hong Apr 2002 B1
6375761 Gambino et al. Apr 2002 B1
6376964 Young et al. Apr 2002 B1
6377535 Chen et al. Apr 2002 B1
6381095 Sin et al. Apr 2002 B1
6381105 Huai et al. Apr 2002 B1
6389499 Frank, Jr. et al. May 2002 B1
6392850 Tong et al. May 2002 B1
6396660 Jensen et al. May 2002 B1
6399179 Hanrahan et al. Jun 2002 B1
6400526 Crue, Jr. et al. Jun 2002 B2
6404600 Hawwa et al. Jun 2002 B1
6404601 Rottmayer et al. Jun 2002 B1
6404706 Stovall et al. Jun 2002 B1
6410170 Chen et al. Jun 2002 B1
6411522 Frank, Jr. et al. Jun 2002 B1
6417998 Crue, Jr. et al. Jul 2002 B1
6417999 Knapp et al. Jul 2002 B1
6418000 Gibbons et al. Jul 2002 B1
6418048 Sin et al. Jul 2002 B1
6421211 Hawwa et al. Jul 2002 B1
6421212 Gibbons et al. Jul 2002 B1
6424505 Lam et al. Jul 2002 B1
6424507 Lederman et al. Jul 2002 B1
6430009 Komaki et al. Aug 2002 B1
6430806 Chen et al. Aug 2002 B1
6433965 Gopinathan et al. Aug 2002 B1
6433968 Shi et al. Aug 2002 B1
6433970 Knapp et al. Aug 2002 B1
6437945 Hawwa et al. Aug 2002 B1
6445536 Rudy et al. Sep 2002 B1
6445542 Levi et al. Sep 2002 B1
6445553 Barr et al. Sep 2002 B2
6445554 Dong et al. Sep 2002 B1
6447935 Zhang et al. Sep 2002 B1
6448765 Chen et al. Sep 2002 B1
6451514 Iitsuka Sep 2002 B1
6452742 Crue et al. Sep 2002 B1
6452765 Mahvan et al. Sep 2002 B1
6456465 Louis et al. Sep 2002 B1
6459552 Liu et al. Oct 2002 B1
6462920 Karimi Oct 2002 B1
6466401 Hong et al. Oct 2002 B1
6466402 Crue, Jr. et al. Oct 2002 B1
6466404 Crue, Jr. et al. Oct 2002 B1
6468436 Shi et al. Oct 2002 B1
6469877 Knapp et al. Oct 2002 B1
6477019 Matono et al. Nov 2002 B2
6479096 Shi et al. Nov 2002 B1
6483662 Thomas et al. Nov 2002 B1
6487040 Hsiao et al. Nov 2002 B1
6487056 Gibbons et al. Nov 2002 B1
6490125 Barr Dec 2002 B1
6496330 Crue, Jr. et al. Dec 2002 B1
6496334 Pang et al. Dec 2002 B1
6504676 Hiner et al. Jan 2003 B1
6512657 Heist et al. Jan 2003 B2
6512659 Hawwa et al. Jan 2003 B1
6512661 Louis Jan 2003 B1
6512690 Qi et al. Jan 2003 B1
6515573 Dong et al. Feb 2003 B1
6515791 Hawwa et al. Feb 2003 B1
6532823 Knapp et al. Mar 2003 B1
6535363 Hosomi et al. Mar 2003 B1
6552874 Chen et al. Apr 2003 B1
6552928 Qi et al. Apr 2003 B1
6577470 Rumpler Jun 2003 B1
6583961 Levi et al. Jun 2003 B2
6583968 Scura et al. Jun 2003 B1
6597548 Yamanaka et al. Jul 2003 B1
6611398 Rumpler et al. Aug 2003 B1
6618223 Chen et al. Sep 2003 B1
6629357 Akoh Oct 2003 B1
6633464 Lai et al. Oct 2003 B2
6636394 Fukagawa et al. Oct 2003 B1
6639291 Sin et al. Oct 2003 B1
6650503 Chen et al. Nov 2003 B1
6650506 Risse Nov 2003 B1
6654195 Frank, Jr. et al. Nov 2003 B1
6657816 Barr et al. Dec 2003 B1
6661621 Iitsuka Dec 2003 B1
6661625 Sin et al. Dec 2003 B1
6674610 Thomas et al. Jan 2004 B1
6680863 Shi et al. Jan 2004 B1
6683763 Hiner et al. Jan 2004 B1
6687098 Huai Feb 2004 B1
6687178 Qi et al. Feb 2004 B1
6687977 Knapp et al. Feb 2004 B2
6691226 Frank, Jr. et al. Feb 2004 B1
6697294 Qi et al. Feb 2004 B1
6700738 Sin et al. Mar 2004 B1
6700759 Knapp et al. Mar 2004 B1
6704158 Hawwa et al. Mar 2004 B2
6707083 Hiner et al. Mar 2004 B1
6707649 Hasegawa et al. Mar 2004 B2
6713801 Sin et al. Mar 2004 B1
6721138 Chen et al. Apr 2004 B1
6721149 Shi et al. Apr 2004 B1
6721203 Qi et al. Apr 2004 B1
6724569 Chen et al. Apr 2004 B1
6724572 Stoev et al. Apr 2004 B1
6729015 Matono et al. May 2004 B2
6735850 Gibbons et al. May 2004 B1
6737281 Dang et al. May 2004 B1
6744608 Sin et al. Jun 2004 B1
6747301 Hiner et al. Jun 2004 B1
6751055 Alfoqaha et al. Jun 2004 B1
6754049 Seagle et al. Jun 2004 B1
6756071 Shi et al. Jun 2004 B1
6757140 Hawwa Jun 2004 B1
6760196 Niu et al. Jul 2004 B1
6762910 Knapp et al. Jul 2004 B1
6765756 Hong et al. Jul 2004 B1
6775902 Huai et al. Aug 2004 B1
6778358 Jiang et al. Aug 2004 B1
6781927 Heanuc et al. Aug 2004 B1
6785955 Chen et al. Sep 2004 B1
6791793 Chen et al. Sep 2004 B1
6791807 Hikami et al. Sep 2004 B1
6798616 Seagle et al. Sep 2004 B1
6798625 Ueno et al. Sep 2004 B1
6801408 Chen et al. Oct 2004 B1
6801411 Lederman et al. Oct 2004 B1
6803615 Sin et al. Oct 2004 B1
6806035 Atireklapvarodom et al. Oct 2004 B1
6807030 Hawwa et al. Oct 2004 B1
6807332 Hawwa Oct 2004 B1
6809899 Chen et al. Oct 2004 B1
6816345 Knapp et al. Nov 2004 B1
6828897 Nepela Dec 2004 B1
6829160 Qi et al. Dec 2004 B1
6829819 Crue, Jr. et al. Dec 2004 B1
6833979 Knapp et al. Dec 2004 B1
6834010 Qi et al. Dec 2004 B1
6859343 Alfoqaha et al. Feb 2005 B1
6859997 Tong et al. Mar 2005 B1
6861937 Feng et al. Mar 2005 B1
6870712 Chen et al. Mar 2005 B2
6873494 Chen et al. Mar 2005 B2
6873547 Shi et al. Mar 2005 B1
6879464 Sun et al. Apr 2005 B2
6888184 Shi et al. May 2005 B1
6888704 Diao et al. May 2005 B1
6891702 Tang May 2005 B1
6894871 Alfoqaha et al. May 2005 B2
6894877 Crue, Jr. et al. May 2005 B1
6906894 Chen et al. Jun 2005 B2
6909578 Missell et al. Jun 2005 B1
6912106 Chen et al. Jun 2005 B1
6934113 Chen Aug 2005 B1
6934129 Zhang et al. Aug 2005 B1
6940688 Jiang et al. Sep 2005 B2
6942824 Li Sep 2005 B1
6943993 Chang et al. Sep 2005 B2
6944938 Crue, Jr. et al. Sep 2005 B1
6947258 Li Sep 2005 B1
6950266 McCaslin et al. Sep 2005 B1
6954332 Hong et al. Oct 2005 B1
6958885 Chen et al. Oct 2005 B1
6961221 Niu et al. Nov 2005 B1
6969989 Mei Nov 2005 B1
6975486 Chen et al. Dec 2005 B2
6987643 Seagle Jan 2006 B1
6989962 Dong et al. Jan 2006 B1
6989972 Stoev et al. Jan 2006 B1
7006327 Krounbi et al. Feb 2006 B2
7007372 Chen et al. Mar 2006 B1
7012832 Sin et al. Mar 2006 B1
7023658 Knapp et al. Apr 2006 B1
7026063 Ueno et al. Apr 2006 B2
7027268 Zhu et al. Apr 2006 B1
7027274 Sin et al. Apr 2006 B1
7035046 Young et al. Apr 2006 B1
7041985 Wang et al. May 2006 B1
7042686 Hiramoto et al. May 2006 B2
7046490 Ueno et al. May 2006 B1
7054113 Seagle et al. May 2006 B1
7057857 Niu et al. Jun 2006 B1
7059868 Yan Jun 2006 B1
7092195 Liu et al. Aug 2006 B1
7110289 Sin et al. Sep 2006 B1
7111382 Knapp et al. Sep 2006 B1
7113366 Wang et al. Sep 2006 B1
7114241 Kubota et al. Oct 2006 B2
7116517 He et al. Oct 2006 B1
7124654 Davies et al. Oct 2006 B1
7126788 Liu et al. Oct 2006 B1
7126790 Liu et al. Oct 2006 B1
7131346 Buttar et al. Nov 2006 B1
7133253 Seagle et al. Nov 2006 B1
7134185 Knapp et al. Nov 2006 B1
7154715 Yamanaka et al. Dec 2006 B2
7170725 Zhou et al. Jan 2007 B1
7177117 Jiang et al. Feb 2007 B1
7193815 Stoev et al. Mar 2007 B1
7196880 Anderson et al. Mar 2007 B1
7199974 Alfoqaha Apr 2007 B1
7199975 Pan Apr 2007 B1
7211339 Seagle et al. May 2007 B1
7212384 Stoev et al. May 2007 B1
7238292 He et al. Jul 2007 B1
7239478 Sin et al. Jul 2007 B1
7248431 Liu et al. Jul 2007 B1
7248433 Stoev et al. Jul 2007 B1
7248449 Seagle Jul 2007 B1
7280325 Pan Oct 2007 B1
7283327 Liu et al. Oct 2007 B1
7284316 Huai et al. Oct 2007 B1
7286329 Chen et al. Oct 2007 B1
7289303 Sin et al. Oct 2007 B1
7292409 Stoev et al. Nov 2007 B1
7296339 Yang et al. Nov 2007 B1
7307814 Seagle et al. Dec 2007 B1
7307818 Park et al. Dec 2007 B1
7310204 Stoev et al. Dec 2007 B1
7310207 Hasegawa et al. Dec 2007 B2
7310208 Hasegawa et al. Dec 2007 B2
7318947 Park et al. Jan 2008 B1
7333295 Medina et al. Feb 2008 B1
7336451 Saito Feb 2008 B2
7336453 Hasegawa et al. Feb 2008 B2
7337530 Stoev et al. Mar 2008 B1
7342752 Zhang et al. Mar 2008 B1
7349170 Rudman et al. Mar 2008 B1
7349179 He et al. Mar 2008 B1
7354664 Jiang et al. Apr 2008 B1
7363697 Dunn et al. Apr 2008 B1
7371152 Newman May 2008 B1
7372665 Stoev et al. May 2008 B1
7375926 Stoev et al. May 2008 B1
7379269 Krounbi et al. May 2008 B1
7386933 Krounbi et al. Jun 2008 B1
7389577 Shang et al. Jun 2008 B1
7417832 Erickson et al. Aug 2008 B1
7419891 Chen et al. Sep 2008 B1
7428124 Song et al. Sep 2008 B1
7430098 Song et al. Sep 2008 B1
7436620 Kang et al. Oct 2008 B1
7436638 Pan Oct 2008 B1
7440220 Kang et al. Oct 2008 B1
7443632 Stoev et al. Oct 2008 B1
7444740 Chung et al. Nov 2008 B1
7466525 Hasegawa et al. Dec 2008 B2
7480122 Ide et al. Jan 2009 B2
7493688 Wang et al. Feb 2009 B1
7508627 Zhang et al. Mar 2009 B1
7522377 Jiang et al. Apr 2009 B1
7522379 Krounbi et al. Apr 2009 B1
7522382 Pan Apr 2009 B1
7542246 Song et al. Jun 2009 B1
7551406 Thomas et al. Jun 2009 B1
7552523 He et al. Jun 2009 B1
7554767 Hu et al. Jun 2009 B1
7554776 Hasegawa et al. Jun 2009 B2
7558028 Carey et al. Jul 2009 B2
7583466 Kermiche et al. Sep 2009 B2
7595967 Moon et al. Sep 2009 B1
7602592 Fukuzawa et al. Oct 2009 B2
7639457 Chen et al. Dec 2009 B1
7660080 Liu et al. Feb 2010 B1
7667933 Kudo et al. Feb 2010 B2
7672080 Tang et al. Mar 2010 B1
7672086 Jiang Mar 2010 B1
7684160 Erickson et al. Mar 2010 B1
7688546 Bai et al. Mar 2010 B1
7691434 Zhang et al. Apr 2010 B1
7695761 Shen et al. Apr 2010 B1
7719795 Hu et al. May 2010 B2
7726009 Liu et al. Jun 2010 B1
7729086 Song et al. Jun 2010 B1
7729087 Stoev et al. Jun 2010 B1
7736823 Wang et al. Jun 2010 B1
7760473 Ide et al. Jul 2010 B2
7785666 Sun et al. Aug 2010 B1
7796356 Fowler et al. Sep 2010 B1
7800858 Bajikar et al. Sep 2010 B1
7819979 Chen et al. Oct 2010 B1
7829264 Wang et al. Nov 2010 B1
7846643 Sun et al. Dec 2010 B1
7855854 Hu et al. Dec 2010 B2
7869160 Pan et al. Jan 2011 B1
7872824 Macchioni et al. Jan 2011 B1
7872833 Hu et al. Jan 2011 B2
7910267 Zeng et al. Mar 2011 B1
7911735 Sin et al. Mar 2011 B1
7911737 Jiang et al. Mar 2011 B1
7916426 Hu et al. Mar 2011 B2
7918013 Dunn et al. Apr 2011 B1
7968219 Jiang et al. Jun 2011 B1
7982989 Shi et al. Jul 2011 B1
8008912 Shang Aug 2011 B1
8012804 Wang et al. Sep 2011 B1
8015692 Zhang et al. Sep 2011 B1
8018677 Chung et al. Sep 2011 B1
8018678 Zhang et al. Sep 2011 B1
8024748 Moravec et al. Sep 2011 B1
8072705 Wang et al. Dec 2011 B1
8074345 Anguelouch et al. Dec 2011 B1
8077418 Hu et al. Dec 2011 B1
8077434 Shen et al. Dec 2011 B1
8077435 Liu et al. Dec 2011 B1
8077557 Hu et al. Dec 2011 B1
8079135 Shen et al. Dec 2011 B1
8081403 Chen et al. Dec 2011 B1
8091210 Sasaki et al. Jan 2012 B1
8097846 Anguelouch et al. Jan 2012 B1
8104166 Zhang et al. Jan 2012 B1
8116043 Leng et al. Feb 2012 B2
8116171 Lee Feb 2012 B1
8125856 Li et al. Feb 2012 B1
8134794 Wang Mar 2012 B1
8136224 Sun et al. Mar 2012 B1
8136225 Zhang et al. Mar 2012 B1
8136805 Lee Mar 2012 B1
8141235 Zhang Mar 2012 B1
8146236 Luo et al. Apr 2012 B1
8149536 Yang et al. Apr 2012 B1
8151441 Rudy et al. Apr 2012 B1
8163185 Sun et al. Apr 2012 B1
8164760 Willis Apr 2012 B2
8164855 Gibbons et al. Apr 2012 B1
8164864 Kaiser et al. Apr 2012 B2
8165709 Rudy Apr 2012 B1
8166631 Tran et al. May 2012 B1
8166632 Zhang et al. May 2012 B1
8169473 Yu et al. May 2012 B1
8171618 Wang et al. May 2012 B1
8179636 Bai et al. May 2012 B1
8191237 Luo et al. Jun 2012 B1
8194365 Leng et al. Jun 2012 B1
8194366 Li et al. Jun 2012 B1
8196285 Zhang et al. Jun 2012 B1
8200054 Li et al. Jun 2012 B1
8203800 Li et al. Jun 2012 B2
8208350 Hu et al. Jun 2012 B1
8220140 Wang et al. Jul 2012 B1
8222599 Chien Jul 2012 B1
8225488 Zhang et al. Jul 2012 B1
8227023 Liu et al. Jul 2012 B1
8228633 Tran et al. Jul 2012 B1
8231796 Li et al. Jul 2012 B1
8233248 Li et al. Jul 2012 B1
8248896 Yuan et al. Aug 2012 B1
8254060 Shi et al. Aug 2012 B1
8257597 Guan et al. Sep 2012 B1
8259410 Bai et al. Sep 2012 B1
8259539 Hu et al. Sep 2012 B1
8262918 Li et al. Sep 2012 B1
8262919 Luo et al. Sep 2012 B1
8264797 Emley Sep 2012 B2
8264798 Guan et al. Sep 2012 B1
8270126 Roy et al. Sep 2012 B1
8276258 Tran et al. Oct 2012 B1
8277669 Chen et al. Oct 2012 B1
8279719 Hu et al. Oct 2012 B1
8284517 Sun et al. Oct 2012 B1
8288204 Wang et al. Oct 2012 B1
8289821 Huber Oct 2012 B1
8291743 Shi et al. Oct 2012 B1
8307539 Rudy et al. Nov 2012 B1
8307540 Tran et al. Nov 2012 B1
8308921 Hiner et al. Nov 2012 B1
8310785 Zhang et al. Nov 2012 B1
8310901 Batra et al. Nov 2012 B1
8315019 Mao et al. Nov 2012 B1
8316527 Hong et al. Nov 2012 B2
8320076 Shen et al. Nov 2012 B1
8320077 Tang et al. Nov 2012 B1
8320219 Wolf et al. Nov 2012 B1
8320220 Yuan et al. Nov 2012 B1
8320722 Yuan et al. Nov 2012 B1
8322022 Yi et al. Dec 2012 B1
8322023 Zeng et al. Dec 2012 B1
8325569 Shi et al. Dec 2012 B1
8333008 Sin et al. Dec 2012 B1
8334093 Zhang et al. Dec 2012 B2
8336194 Yuan et al. Dec 2012 B2
8339738 Tran et al. Dec 2012 B1
8341826 Jiang et al. Jan 2013 B1
8343319 Li et al. Jan 2013 B1
8343364 Gao et al. Jan 2013 B1
8349195 Si et al. Jan 2013 B1
8351307 Wolf et al. Jan 2013 B1
8357244 Zhao et al. Jan 2013 B1
8373945 Luo et al. Feb 2013 B1
8375564 Luo et al. Feb 2013 B1
8375565 Hu et al. Feb 2013 B2
8381391 Park et al. Feb 2013 B2
8385157 Champion et al. Feb 2013 B1
8385158 Hu et al. Feb 2013 B1
8394280 Wan et al. Mar 2013 B1
8400731 Li et al. Mar 2013 B1
8404128 Zhang et al. Mar 2013 B1
8404129 Luo et al. Mar 2013 B1
8405930 Li et al. Mar 2013 B1
8409453 Jiang et al. Apr 2013 B1
8413317 Wan et al. Apr 2013 B1
8416540 Li et al. Apr 2013 B1
8419953 Su et al. Apr 2013 B1
8419954 Chen et al. Apr 2013 B1
8422176 Leng et al. Apr 2013 B1
8422342 Lee Apr 2013 B1
8422841 Shi et al. Apr 2013 B1
8424192 Yang et al. Apr 2013 B1
8441756 Sun et al. May 2013 B1
8443510 Shi et al. May 2013 B1
8444866 Guan et al. May 2013 B1
8449948 Medina et al. May 2013 B2
8451556 Wang et al. May 2013 B1
8451563 Zhang et al. May 2013 B1
8454846 Zhou et al. Jun 2013 B1
8455119 Jiang et al. Jun 2013 B1
8456961 Wang et al. Jun 2013 B1
8456963 Hu et al. Jun 2013 B1
8456964 Yuan et al. Jun 2013 B1
8456966 Shi et al. Jun 2013 B1
8456967 Mallary Jun 2013 B1
8458892 Si et al. Jun 2013 B2
8462592 Wolf et al. Jun 2013 B1
8468682 Zhang Jun 2013 B1
8472288 Wolf et al. Jun 2013 B1
8480911 Osugi et al. Jul 2013 B1
8486285 Zhou et al. Jul 2013 B2
8486286 Gao et al. Jul 2013 B1
8488272 Tran et al. Jul 2013 B1
8491801 Tanner et al. Jul 2013 B1
8491802 Gao et al. Jul 2013 B1
8493693 Zheng et al. Jul 2013 B1
8493695 Kaiser et al. Jul 2013 B1
8495813 Hu et al. Jul 2013 B1
8498084 Leng et al. Jul 2013 B1
8506828 Osugi et al. Aug 2013 B1
8514517 Batra et al. Aug 2013 B1
8518279 Wang et al. Aug 2013 B1
8518832 Yang et al. Aug 2013 B1
8520336 Liu et al. Aug 2013 B1
8520337 Liu et al. Aug 2013 B1
8524068 Medina et al. Sep 2013 B2
8526275 Yuan et al. Sep 2013 B1
8531801 Xiao et al. Sep 2013 B1
8532450 Wang et al. Sep 2013 B1
8533937 Wang et al. Sep 2013 B1
8537494 Pan et al. Sep 2013 B1
8537495 Luo et al. Sep 2013 B1
8537502 Park et al. Sep 2013 B1
8545999 Leng et al. Oct 2013 B1
8547659 Bai et al. Oct 2013 B1
8547667 Roy et al. Oct 2013 B1
8547730 Shen et al. Oct 2013 B1
8555486 Medina et al. Oct 2013 B1
8559141 Pakala et al. Oct 2013 B1
8563146 Zhang et al. Oct 2013 B1
8565049 Tanner et al. Oct 2013 B1
8576517 Tran et al. Nov 2013 B1
8578594 Jiang et al. Nov 2013 B2
8582238 Liu et al. Nov 2013 B1
8582241 Yu et al. Nov 2013 B1
8582253 Zheng et al. Nov 2013 B1
8588039 Shi et al. Nov 2013 B1
8593914 Wang et al. Nov 2013 B2
8597528 Roy et al. Dec 2013 B1
8599520 Liu et al. Dec 2013 B1
8599657 Lee Dec 2013 B1
8603593 Roy et al. Dec 2013 B1
8607438 Gao et al. Dec 2013 B1
8607439 Wang et al. Dec 2013 B1
8611035 Bajikar et al. Dec 2013 B1
8611054 Shang et al. Dec 2013 B1
8611055 Pakala et al. Dec 2013 B1
8614864 Hong et al. Dec 2013 B1
8619512 Yuan et al. Dec 2013 B1
8625233 Ji et al. Jan 2014 B1
8625941 Shi et al. Jan 2014 B1
8628672 Si et al. Jan 2014 B1
8630068 Mauri et al. Jan 2014 B1
8634280 Wang et al. Jan 2014 B1
8638529 Leng et al. Jan 2014 B1
8643980 Fowler et al. Feb 2014 B1
8649123 Zhang et al. Feb 2014 B1
8665561 Knutson et al. Mar 2014 B1
8670211 Sun et al. Mar 2014 B1
8670213 Zeng et al. Mar 2014 B1
8670214 Knutson et al. Mar 2014 B1
8670294 Shi et al. Mar 2014 B1
8670295 Hu et al. Mar 2014 B1
8675318 Ho et al. Mar 2014 B1
8675455 Krichevsky et al. Mar 2014 B1
8681594 Shi et al. Mar 2014 B1
8689430 Chen et al. Apr 2014 B1
8693141 Elliott et al. Apr 2014 B1
8703397 Zeng et al. Apr 2014 B1
8705205 Li et al. Apr 2014 B1
8711518 Zeng et al. Apr 2014 B1
8711528 Xiao et al. Apr 2014 B1
8717709 Shi et al. May 2014 B1
8720044 Tran et al. May 2014 B1
8721902 Wang et al. May 2014 B1
8724259 Liu et al. May 2014 B1
8749790 Tanner et al. Jun 2014 B1
8749920 Knutson et al. Jun 2014 B1
8753903 Tanner et al. Jun 2014 B1
8760807 Zhang et al. Jun 2014 B1
8760818 Diao et al. Jun 2014 B1
8760819 Liu et al. Jun 2014 B1
8760822 Li et al. Jun 2014 B1
8760823 Chen et al. Jun 2014 B1
8763235 Wang et al. Jul 2014 B1
8780498 Jiang et al. Jul 2014 B1
8780505 Xiao Jul 2014 B1
8786983 Liu et al. Jul 2014 B1
8790524 Luo et al. Jul 2014 B1
8790527 Luo et al. Jul 2014 B1
8792208 Liu et al. Jul 2014 B1
8792312 Wang et al. Jul 2014 B1
8793866 Zhang et al. Aug 2014 B1
8797680 Luo et al. Aug 2014 B1
8797684 Tran et al. Aug 2014 B1
8797686 Bai et al. Aug 2014 B1
8797692 Guo et al. Aug 2014 B1
8813324 Emley et al. Aug 2014 B2
20050266274 Hasegawa et al. Dec 2005 A1
20060050444 Fukuzawa et al. Mar 2006 A1
20080239591 Fuji et al. Oct 2008 A1
20100072529 Marukame et al. Mar 2010 A1
20100290157 Zhang et al. Nov 2010 A1
20110086240 Xiang et al. Apr 2011 A1
20120111826 Chen et al. May 2012 A1
20120182647 Fuke et al. Jul 2012 A1
20120216378 Emley et al. Aug 2012 A1
20120237878 Zeng et al. Sep 2012 A1
20120298621 Gao Nov 2012 A1
20130128391 Fuji et al. May 2013 A1
20130216702 Kaiser et al. Aug 2013 A1
20130216863 Li et al. Aug 2013 A1
20130257421 Shang et al. Oct 2013 A1
20140154529 Yang et al. Jun 2014 A1
20140175050 Zhang et al. Jun 2014 A1
Foreign Referenced Citations (2)
Number Date Country
2004-146480 May 2004 JP
2005-116703 Apr 2005 JP
Non-Patent Literature Citations (3)
Entry
J.R. Childress, et al., “All Metal Current-Perpendicular-to-Plane Giant Magnetoresistance Sensors for Narrow-Track Magnetic Recording”, IEEE Transactions on Magnetics, Vol. 44, No. 1, Jan. 2008, pp. 90-94.
T. Iwase, et al., “Large Interface Spin-Asymmetry and Magnetoresistance in Fully Epitaxial Co2MnSi/Ag/Co2MnSi Current-Perpendicular-to-Plane Magnetoresistive Devices”, Appl. Phys. Exp., vol. 2, 2009, pp. 063003-063003-3.
J. Sato, et al., “Large Magnetoresistance Effect in Epitaxial Co2Fe0.4Mn0.6Si/Ag/Co2Fe0.4Mn0.6Si Devices”, Appl. Phys. Exp., vol. 4, 2011, pp. 113005-113007.
Divisions (1)
Number Date Country
Parent 13737374 Jan 2013 US
Child 14290961 US