This application is a divisional of U.S. patent application Ser. No. 09/974,413, filed Oct. 9, 2001.
Number | Name | Date | Kind |
---|---|---|---|
2403692 | Tibbetts | Jul 1946 | A |
2975307 | Shroeder et al. | Mar 1961 | A |
3304446 | Martinek et al. | Feb 1967 | A |
3381623 | Elliot | May 1968 | A |
3641373 | Elkuch | Feb 1972 | A |
3769531 | Elkuch | Oct 1973 | A |
3803424 | Smiley et al. | Apr 1974 | A |
3947644 | Uchikawa | Mar 1976 | A |
4115036 | Paterson | Sep 1978 | A |
4140936 | Bullock | Feb 1979 | A |
4197737 | Pittman | Apr 1980 | A |
4453169 | Martner | Jun 1984 | A |
4478076 | Bohrer | Oct 1984 | A |
4478077 | Boher | Oct 1984 | A |
4498850 | Perlov et al. | Feb 1985 | A |
4501144 | Higashi et al. | Feb 1985 | A |
4539575 | Nilsson | Sep 1985 | A |
4576050 | Lambert | Mar 1986 | A |
4651564 | Johnson et al. | Mar 1987 | A |
4654546 | Kirjavainen | Mar 1987 | A |
4756508 | Giachino et al. | Jul 1988 | A |
4821999 | Ohtaka | Apr 1989 | A |
4911616 | Laumann, Jr. | Mar 1990 | A |
4938742 | Smits | Jul 1990 | A |
4939405 | Okuyama et al. | Jul 1990 | A |
5065978 | Albarda et al. | Nov 1991 | A |
5069419 | Jerman | Dec 1991 | A |
5078581 | Blum et al. | Jan 1992 | A |
5082242 | Bonne et al. | Jan 1992 | A |
5085562 | van Lintel | Feb 1992 | A |
5096388 | Weinberg | Mar 1992 | A |
5129794 | Beatty | Jul 1992 | A |
5148074 | Fujita et al. | Sep 1992 | A |
5171132 | Miyazaki et al. | Dec 1992 | A |
5176358 | Bonne et al. | Jan 1993 | A |
5180288 | Richter et al. | Jan 1993 | A |
5180623 | Ohnstein | Jan 1993 | A |
5192197 | Culp | Mar 1993 | A |
5206557 | Bobbio | Apr 1993 | A |
5219278 | van Lintel | Jun 1993 | A |
5224843 | van Lintel | Jul 1993 | A |
5244527 | Aoyagi | Sep 1993 | A |
5244537 | Ohnstein | Sep 1993 | A |
5322258 | Bosch et al. | Jun 1994 | A |
5323999 | Bonne et al. | Jun 1994 | A |
5441597 | Bonne et al. | Aug 1995 | A |
5452878 | Gravesen et al. | Sep 1995 | A |
5499909 | Yamada et al. | Mar 1996 | A |
5541465 | Higuchi et al. | Jul 1996 | A |
5542821 | Dugan | Aug 1996 | A |
5552654 | Konno et al. | Sep 1996 | A |
5571401 | Lewis et al. | Nov 1996 | A |
5642015 | Whitehead et al. | Jun 1997 | A |
5683159 | Johnson | Nov 1997 | A |
5725363 | Bustgens et al. | Mar 1998 | A |
5759014 | Van Lintel | Jun 1998 | A |
5759015 | Van Lintel et al. | Jun 1998 | A |
5836750 | Cabuz | Nov 1998 | A |
5863708 | Zanzucchi et al. | Jan 1999 | A |
5901939 | Cabuz et al. | May 1999 | A |
5911872 | Lewis et al. | Jun 1999 | A |
6106245 | Cabuz | Aug 2000 | A |
6179586 | Herb et al. | Jan 2001 | B1 |
6184607 | Cabuz et al. | Feb 2001 | B1 |
6215221 | Cabuz et al. | Apr 2001 | B1 |
6450773 | Upton | Sep 2002 | B1 |
6508528 | Fujii et al. | Jan 2003 | B2 |
6520753 | Grosjean et al. | Feb 2003 | B1 |
6579068 | Bridger et al. | Jun 2003 | B2 |
20020067992 | Bridger et al. | Jun 2002 | A1 |
Number | Date | Country |
---|---|---|
19617852 | Jan 1993 | DE |
0744821 | Nov 1996 | EP |
0744821 | Dec 1996 | EP |
05-219760 | Aug 1993 | JP |
02-86258 | Oct 1995 | JP |
744877 | Jun 1980 | SU |
WO 0028215 | May 2000 | WO |
WO 0133078 | May 2001 | WO |
Entry |
---|
B. Halg, “On a Nonvolatile Memory Cell Based on Micro-Electro-Mechanics”, Proceedings of MEMS CH2832-4/90/0000-0172 IEEE (1990), pp. 172-176. |
Bertz, Schubert, Werner, “Silicon Grooves With Sidewall Angles Down to 1° made By Dry Etching”, pp. 331-339. |
Branebjerg, Gravesen, “A New Electrostatic Actuator Providing Improved Stroke Length and Force.” Micro Elctro Mechanical Systems '92 (Feb. 4-7, 1992), pp. 6-11. |
Bustgens, Bacher, Menz, Schomburg, “Micropump Manufactured by Thermoplastic Molding” MEMS 1994, pp. 18-21. |
C. Cabuz, et al., “High Reliability Touch-Mode Electrostatic Actuators”, Technical Digest of the Solid State Sensor and Actuator Workshop, Hilton Head, S.C., Jun. 8-11, 1998, pp. 296-299. |
C. Cabuz. Tradeoffs in MOEMS Material: Proceedings of the SPIE, vol. 2881, pp. 160-170, Austin, TX., Jul. 1996. |
Minami K et al., “Fabrication of Distributed Electrostatic Micro Actuator (DEMA)” Journal of Microelectromechanical Systems, US, IEEE Inc., New York, vol. 2, No. 3, Sep. 1, 1993, pp. 121-127, XP000426532, ISSN: 1057-7157. |
“Large-Scale Linearization Circuit For Electrostatic Motors” IBM Technical Disclosure Bulletin, US. IBM Corp. New York, vol. 37, No. 10, Oct. 1, 1994, pp. 563-564, XP000475777, ISN: 0018-8689. |
Srinivasan et al., “Self-Assembled Flurocarbon Films for Enhanced Stiction Reduction”, TRANSDUCERS '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Jun. 16-19, 1997, pp. 1399-1402. |
Shikida, Sato, “Characteristics of an Electrostatically-Driven Gas Valve Under High Pressure Conditions, IEEE 1994, pp. 235-240.” |
Shikida, Sato, Harada, “Fabrication of An S-Shaped Microactuator,” Journal of Microelectromechanical Systems, vol. 6, No. 1 (Mar. 1997), pp. 18-24. |
Shikida, Sato, Tanaka, Kawamura, Fujisaki, “Electrostatically Driven Gas Valve With High Conductance”, Journal of Microelectromechanical Systems, vol. 3, No. 2 (Jun. 1994), pp. 76-80. |
Wagner, Quenzer, Hoerscelmann, Lisec, Juerss, “Bistable Microvalve with Pneumatically Coupled Membranes,” 0-7803-2985-6/96, IEEE (1996), pp. 384-388. |
Jye-Shane Yang et al., “Fluorescent Porous Polymer Films as TNT Chemosensors: Electronic and Structural Effects”, J. Am. Chem. Soc., 1998, 120, pp. 11864-11873. |
Jye-Shane Yang et al., “Porous Shape Persistent Fluorescent Polymer Films: An Approach to TNT Sensory Materials”, J. Am. Chem. Soc., 1998, 120, pp. 5321-5322. |
Michael S. Freund et al., “A Chemically Diverse Conducting ‘Polymer-Based Electronic Nose’”, Proceedings of the National Academy of Sciences of the United States of America, vol. 92, No. 7, Mar. 28, 1995, pp. 2652-2656. |
Porex Technologies, brochure, dated prior to Jun. 2, 2000, 4 pages. |