Micro displacement mechanism and magnetic disk apparatus

Abstract

A micro displacement mechanism minutely displaces an object to be driven. The micro displacement mechanism includes a stationary part and an actuator fixed to the stationary part so as to rotatably support the object to be driven. The actuator includes a pair of piezoelectric actuators attached to opposite side surfaces of said object to be driven, respectively. The pair of piezoelectric actuators are arranged at point symmetric positions with respect to a center of gravity of the object to be driven.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view showing an interior of a magnetic disk apparatus according to the present invention;

FIG. 2 is a side view of a slider and a distal end portion of a suspension shown in FIG. 1;

FIG. 3 is an exploded perspective view of a micro displacement mechanism according to a first embodiment of the present invention;

FIG. 4 is a plan view of a piezoelectric actuator shown in FIG. 3 when viewed from a suspension side;

FIG. 5 is an exploded perspective view of a micro displacement mechanism according to a second embodiment of the present invention;

FIG. 6 is a plan view of a piezoelectric actuator shown in FIG. 5 when viewed from a suspension side;

FIG. 7 is a plan view of a piezoelectric actuator used for a micro displacement mechanism according to a third embodiment of the present invention when viewed from the suspension side;

FIG. 8 is a plan view of a piezoelectric actuator used for a micro displacement mechanism according to a fourth embodiment of the present invention when viewed from a suspension side; and

FIG. 9 is a plan view of a piezoelectric actuator used for a micro displacement mechanism according to a fourth embodiment of the present invention when viewed from a suspension side in a state where a slider is supported by the suspension.

Claims

1. A micro displacement mechanism for minutely displaces an object to be driven, comprising: a stationary part; andan actuator fixed to the stationary part so as to rotatably support the object to be driven,wherein said actuator includes a pair of piezoelectric actuators attached to opposite side surfaces of said object to be driven, respectively, and the pair of piezoelectric actuators are arranged at point symmetric positions with respect to a center of gravity of said object to be driven.

2. The micro displacement mechanism as claimed in claim 1, wherein each of said piezoelectric actuators is made of a strip-shaped piezoelectric actuator having one end fixed to said side surface of said object to be driven and the other end fixed to said stationary part.

3. The micro displacement mechanism as claimed in claim 1, wherein each of said piezoelectric actuators has a strip-shaped member and a strip-shaped piezoelectric element adhered to the strip-shaped member.

4. The micro displacement mechanism as claimed in claim 3, wherein said strip-shaped piezoelectric element includes at least two active layers consisting of electrode-piezoelectric material-electrode, and said strip-shaped member is made of zirconia.

5. The micro displacement mechanism as claimed in claim 1, wherein each of said piezoelectric actuators is made of an L-shaped piezoelectric actuator having one end fixed to said side surface of said object to be driven and the other end fixed to said stationary part.

6. The micro displacement mechanism as claimed in claim 5, wherein each of said L-shaped piezoelectric actuators has an L-shaped member and piezoelectric elements adhered to each of two portions of the L-shaped member extending perpendicular to each other, respectively.

7. The micro displacement mechanism as claimed in claim 6, wherein the piezoelectric elements are adhered to opposite side surfaces of each of said two portions, respectively.

8. The micro displacement mechanism as claimed in claim 5, wherein each of said piezoelectric elements includes at least two active layers consisting of electrode-piezoelectric material-electrode, and each of said L-shaped members is made of zirconia.

9. The micro displacement mechanism as claimed in claim 1, wherein said actuator further includes another pair of piezoelectric actuators attached to said opposite side surfaces of said object to be driven, respectively, and the another pair of piezoelectric actuators are arranged at point symmetric positions with respect to the center of gravity of said object to be driven.

10. The micro displacement mechanism as claimed in claim 9, wherein each of said piezoelectric actuators is made of an L-shaped piezoelectric actuator having one end fixed to said side surface of said object to be driven and the other end fixed to said stationary part, and said L-shaped piezoelectric actuator has an L-shaped member and piezoelectric elements adhered to opposite side surfaces of each of two portions of the L-shaped member extending perpendicular to each other, respectively.

11. The micro displacement mechanism as claimed in claim 10, wherein each of said piezoelectric elements includes at least two active layers consisting of electrode-piezoelectric material-electrode, and each of said L-shaped members is made of zirconia.

12. A magnetic disk apparatus comprising: a slider having a magnetic head;a suspension supporting the slider; anda micro displacement mechanism that displaces said slider,wherein the micro displacement mechanism includes an actuator fixed to said suspension and rotatably supporting said slider;the actuator includes a pair of piezoelectric actuators attached to opposite side surfaces of said slider; andthe pair of piezoelectric actuators are arranged at point symmetric positions with respect to a center of gravity of said slider.