Claims
- 1. An electromechanical device, comprising:
(a) two or more electrodes; (b) a membrane positioned with said two or more electrodes, wherein one of said two or more electrodes is an input electrode and receives an electrical signal that causes vibration of said membrane and said vibration is coupled to at least one of said two or more electrodes that is an output electrode; and (c) a ground referenced to said input electrode and said output electrode.
- 2. The electromechanical device as set forth in claim 1, wherein said membrane is positioned at a distance from said two or more electrodes.
- 3. The electromechanical device as set forth in claim 1, wherein said two or more electrodes are positioned at various distances from said membrane.
- 4. The electromechanical device as set forth in claim 1, wherein said membrane is a vibrating coupling membrane.
- 5. The electromechanical device as set forth in claim 1, wherein a DC bias voltage is applied to said two or more electrodes to set or modify a width of a gap in said electromechanical device.
- 6. The electromechanical device as set forth in claim 1, wherein said electromechanical device is a transformer.
- 7. The electromechanical device as set forth in claim 1, wherein said electromechanical device is a capacitor.
- 8. The electromechanical device as set forth in claim 1, wherein said electromechanical device is a resonator.
- 9. The electromechanical device as set forth in claim 1, wherein said electromechanical is a filter.
- 10. The electromechanical device as set forth in claim 9, wherein said filter operates around a resonant frequency.
- 11. The electromechanical device as set forth in claim 1, further comprising a control voltage to dynamically change said coupling between said input electrode and said output electrodes.
- 12. The electromechanical device as set forth in claim 1, wherein said two or more electrodes are positioned side by side on said membrane.
- 13. The electromechanical device as set forth in claim 1, wherein membrane is selected from the group consisting of silicon nitride, silicon carbide, diamond, silicon and glass.
- 14. The electromechanical device as set forth in claim 1, wherein said membrane has varying shapes
- 15. The electromechanical device as set forth in claim 1, wherein said two or more electrodes have varying shapes.
- 16. A method of making an electromechanical device, comprising the steps of:
(a) providing two or more electrodes; (b) providing a membrane positioned with said two or more electrodes, wherein one of said two or more electrodes is an input electrode receiving an electrical signal that causes vibration of said membrane and said vibration is coupled to at least one of said two or more electrodes that is an output electrode; and (c) providing a ground reference to said input electrode and said output electrode.
- 17. The method as set forth in claim 16, wherein said membrane is positioned at a distance from said two or more electrodes.
- 18. The method as set forth in claim 16, wherein said two or more electrodes are positioned at various distances from said membrane.
- 19. The method as set forth in claim 16, wherein said membrane is a vibrating coupling membrane.
- 20. The method as set forth in claim 16, wherein a DC bias voltage is applied to said two or more electrodes to set or modify a width of a gap in said electromechanical device.
- 21. The method as set forth in claim 16, wherein said electromechanical device is a transformer.
- 22. The method as set forth in claim 16, wherein said electromechanical device is a capacitor.
- 23. The method as set forth in claim 16, wherein said electromechanical device is a resonator.
- 24. The method as set forth in claim 16, wherein said electromechanical is a filter.
- 25. The method as set forth in claim 24, wherein said filter operates around a resonant frequency.
- 26. The method as set forth in claim 16, further comprising the step of providing a control voltage to dynamically change said coupling between said input electrode and said output electrodes.
- 27. The method as set forth in claim 16, wherein said two or more electrodes are positioned side by side on said membrane.
- 28. The method as set forth in claim 16, wherein membrane is selected from the group consisting of silicon nitride, silicon carbide, diamond, silicon and glass.
- 29. The method as set forth in claim 16, wherein said membrane has varying shapes.
- 30. The method as set forth in claim 16, wherein said two or more electrodes have varying shapes.
- 31. An electronic system, comprising:
(a) an electronic circuit; and (b) one or more membrane devices integrated with said electronic circuit.
- 32. The electronic system as set forth in claim 31, wherein a DC bias voltage is applied to said one or more membrane devices to set a width of a gap.
- 33. The electronic system as set forth in claim 31, wherein said one or more membrane devices is a transformer.
- 34. The electronic system as set forth in claim 31, wherein said one or more membrane devices is a capacitor.
- 35. The electronic system as set forth in claim 31, wherein said one or more membrane devices is a resonator.
- 36. The electronic system as set forth in claim 31, wherein said one or more membrane devices is a filter.
- 37. The electronic system as set forth in claim 36, wherein said filter operates around a resonant frequency.
- 38. The electronic system as set forth in claim 31, wherein said one or more membrane devices comprises a control voltage to dynamically change said coupling between an input electrode and at least one output electrode of said device.
- 39. A method of making an electronic system, comprising the steps of:
(a) providing an electronic circuit; and (b) providing one or more membrane devices integrated with said electronic circuit.
- 40. The method as set forth in claim 39, wherein a DC bias voltage is applied to said one or more membrane devices to set a width of a gap.
- 41. The method as set forth in claim 39, wherein said one or more membrane devices is a transformer.
- 42. The method as set forth in claim 39, wherein said one or more membrane devices is a capacitor.
- 43. The method as set forth in claim 39, wherein said one or more membrane devices is a resonator.
- 44. The method as set forth in claim 39, wherein said one or more membrane devices is a filter.
- 45. The method as set forth in claim 44, wherein said filter operates around a resonant frequency.
- 46. The method as set forth in claim 39, wherein said one or more membrane devices comprises a control voltage to dynamically change said coupling between an input electrode and at least one output electrode of said device.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is cross-referenced to and claims priority from U.S. Provisional Application 60/214,834 filed Jun. 28, 2000, which is hereby incorporated by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60214834 |
Jun 2000 |
US |